Method of polishing
    10.
    发明授权
    Method of polishing 失效
    抛光方法

    公开(公告)号:US5083401A

    公开(公告)日:1992-01-28

    申请号:US315414

    申请日:1989-02-23

    IPC分类号: B24B7/22 B24B37/04 B24B49/16

    CPC分类号: B24B37/04 B24B49/16 B24B7/228

    摘要: A rotor is formed by rotationally cutting a metal mass mounted on a machine tool shaft under computer control, and also its outer periphery is formed with annular grooves by rotational cutting. The rotor is rotated on a shaft while feeding an abrasive to it, while a workpiece set on a stage movable along three perpendicular axes, i.e., X-, Y and Z-axes, urged against the rotor by moving the stage in the Z-axis direction. The surface of the workpiece is polished by causing the stage to be moved in the X-axis direction and reciprocated in the Y-axis direction, the urging pressure being controlled by measuring it with a pressure sensor.

    摘要翻译: 通过在计算机控制下旋转地切割安装在机床轴上的金属块而形成转子,并且其外周通过旋转切割形成有环形槽。 当沿着三个垂直轴线(即,X,Y和Z轴)移动的台架上的工件设置在轴上时,转子在轴上旋转,同时通过移动Z轴中的平台来推动转子, 轴方向。 通过使台架在X轴方向上移动并沿Y轴方向往复运动来抛光工件的表面,通过用压力传感器测量推压力来控制施力压力。