公开(公告)号：US08987037B2

公开(公告)日：2015-03-24

申请号：US13841772

申请日：2013-03-15

Applicant: Electronics and Telecommunications Research Institute

Inventor： Yong-Duck Chung ,  Dae-Hyung Cho ,  Won Seok Han

IPC: H01L21/00 ,  H01L31/18

CPC classification number: H01L31/186 ,  C23C14/5853 ,  C23C14/5866 ,  H01L21/02485 ,  H01L21/02491 ,  H01L21/02502 ,  H01L21/02554 ,  H01L21/02557 ,  H01L21/02614 ,  H01L31/0749 ,  H01L31/1828 ,  H01L31/1864 ,  Y02E10/50 ,  Y02E10/541 ,  Y02E10/543 ,  Y02P70/521

Abstract: A method of manufacturing a solar cell includes forming a buffer layer between an optical absorption layer and a window electrode layer. Forming the buffer layer includes depositing a metal material on the optical absorption layer, supplying a non-metal material on the optical absorption layer, supplying a gas material including oxygen atoms on the optical absorption layer, and reacting the metal material with the non-metal material. The gas material reacts with the metal material and the non-metal material to form a metal sulfur oxide on the optical absorption layer.

Abstract translation: 太阳能电池的制造方法包括在光吸收层和窗电极层之间形成缓冲层。 形成缓冲层包括在光吸收层上沉积金属材料，在光吸收层上提供非金属材料，在光吸收层上提供包含氧原子的气体材料，并使金属材料与非金属材料反应 材料。 气体材料与金属材料和非金属材料反应，以在光吸收层上形成金属硫氧化物。