公开(公告)号：US20140241662A1

公开(公告)日：2014-08-28

申请号：US13934006

申请日：2013-07-02

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sahnggi PARK ,  Sang Gi KIM ,  Seong Wook YOO ,  Gyungock KIM

IPC: G02B6/12

CPC classification number: H04B10/27 ,  G02B6/12004 ,  G02B6/29373 ,  G02B6/34 ,  G02B6/4214 ,  G02B2006/12114

Abstract: An optical device module includes a substrate, an interlayer insulating layer on the substrate, an optical waveguide on the interlayer insulating layer, an optical device on the optical waveguide, and a prism disposed between the optical device and the optical waveguide. The prism has a refractive index greater than a refractive index of the optical waveguide.

Abstract translation: 光学器件模块包括衬底，衬底上的层间绝缘层，层间绝缘层上的光波导，光波导上的光学器件，以及设置在光学器件和光波导之间的棱镜。 棱镜的折射率大于光波导的折射率。

公开(公告)号：US20150283743A1

公开(公告)日：2015-10-08

申请号：US14517482

申请日：2014-10-17

Applicant: Electronics and Telecommunications Research Institute

Inventor： Jong-Moon PARK ,  Kunsik PARK ,  Dong Suk JUN ,  Seong Wook YOO ,  Sang Gi KIM ,  Jin Ho LEE

IPC: B29C45/17

CPC classification number: B29C33/3842 ,  B29C45/17 ,  B29C59/002 ,  B29C2033/385 ,  B29L2031/757

Abstract: Provided is a method of fabricating a mold, the method including: forming a first preliminary layer and a second preliminary layer, which are spaced apart from each other and stacked on a substrate; forming a first pattern by patterning the first preliminary layer; forming a first spacer on both sidewalls of the first pattern;forming a second pattern by etching the second preliminary layer by using the first spacer as an etching mask; forming a multilayer structure including the first pattern and the second pattern on the substrate by removing the first spacer; and forming a mold layer covering the multilayer structure.

Abstract translation: 提供一种制造模具的方法，该方法包括：形成彼此间隔开并堆叠在基板上的第一预备层和第二预备层; 通过图案化第一预备层形成第一图案; 在所述第一图案的两个侧壁上形成第一间隔物; 通过使用第一间隔件作为蚀刻掩模蚀刻第二预备层来形成第二图案; 通过去除所述第一间隔件在所述基板上形成包括所述第一图案和所述第二图案的多层结构; 以及形成覆盖所述多层结构的模具层。

公开(公告)号：US20150215045A1

公开(公告)日：2015-07-30

申请号：US14684195

申请日：2015-04-10

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sahnggi PARK ,  Sang Gi KIM ,  Seong Wook YOO ,  Gyungock KIM

IPC: H04B10/27 ,  G02B6/34

CPC classification number: H04B10/27 ,  G02B6/12004 ,  G02B6/29373 ,  G02B6/34 ,  G02B6/4214 ,  G02B2006/12114

Abstract: An optical device module includes a substrate, an interlayer insulating layer on the substrate, an optical waveguide on the interlayer insulating layer, an optical device on the optical waveguide, and a prism disposed between the optical device and the optical waveguide. The prism has a refractive index greater than a refractive index of the optical waveguide.

Abstract translation: 光学器件模块包括衬底，衬底上的层间绝缘层，层间绝缘层上的光波导，光波导上的光学器件，以及设置在光学器件和光波导之间的棱镜。 棱镜的折射率大于光波导的折射率。

公开(公告)号：US20140091388A1

公开(公告)日：2014-04-03

申请号：US14100780

申请日：2013-12-09

Applicant: Electronics and Telecommunications Research Institute

Inventor： Sang Gi KIM ,  Jin-Gun KOO ,  Seong Wook YOO ,  Jong-Moon PARK ,  Jin Ho LEE ,  KYOUNG IL NA ,  Yil Suk Yang ,  Jongdae KIM

IPC: H01L29/78 ,  H01L29/10

CPC classification number: H01L29/7813 ,  H01L21/2255 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/1095 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7811

Abstract: Provided are a semiconductor device and a method of fabricating the same. The method includes: forming a trench in a semiconductor substrate of a first conductive type; forming a trench dopant containing layer including a dopant of a second conductive type on a sidewall and a bottom surface of the trench; forming a doping region by diffusing the dopant in the trench dopant containing layer into the semiconductor substrate; and removing the trench dopant containing layer.

Abstract translation: 提供半导体器件及其制造方法。 该方法包括：在第一导电类型的半导体衬底中形成沟槽; 在所述沟槽的侧壁和底表面上形成包含第二导电类型的掺杂剂的沟槽掺杂剂层; 通过将所述沟槽掺杂剂含量层中的掺杂剂扩散到所述半导体衬底中来形成掺杂区域; 并去除含沟槽掺杂剂层。