VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENT

    公开(公告)号:US20220349528A1

    公开(公告)日:2022-11-03

    申请号:US17732446

    申请日:2022-04-28

    Applicant: ENTEGRIS, INC.

    Abstract: A storage vessel to contain reagent material. The storage vessel includes a vessel with a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior including a volume, and an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.

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