公开(公告)号：US20190078696A1

公开(公告)日：2019-03-14

申请号：US15743109

申请日：2016-07-08

Applicant: Entegris, Inc.

Inventor： Glenn M. Tom ,  Karl W. Olander ,  James A. Dietz ,  Michael J. Wodjenski ,  Edward A. Sturm ,  Susan K. Dimascio ,  Luping Wang ,  James V. McManus ,  Steven M. Lurcott ,  Jose I. Amo ,  Paul J. Marganski ,  Joseph D. Sweeney ,  Shaun M. Wilson ,  Steven E. Bishop ,  Greg Nelson ,  Donald J. Carruthers ,  Sharad N. Yedave ,  Ying Tang ,  Joseph Despres ,  Barry Chambers ,  Richard Ray ,  Daniel Elzer

IPC: F16K17/00 ,  F16K17/04 ,  F16K31/00 ,  F16K31/06 ,  F17C13/04

Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.

公开(公告)号：US20160305682A1

公开(公告)日：2016-10-20

申请号：US15202521

申请日：2016-07-05

Applicant: Entegris, Inc.

Inventor： W. Karl Olander ,  Paul J. Marganski

IPC: F24F11/04 ,  B01D53/04 ,  F17C13/08 ,  F24F11/00 ,  F17C11/00

CPC classification number: F24F11/74 ,  B01D53/04 ,  B01D2253/102 ,  B01D2258/0216 ,  F17C11/00 ,  F17C11/005 ,  F17C11/007 ,  F17C13/084 ,  F17C2201/0109 ,  F17C2201/032 ,  F17C2201/056 ,  F17C2205/0111 ,  F17C2205/0126 ,  F17C2205/0142 ,  F17C2205/0176 ,  F17C2205/018 ,  F17C2205/0338 ,  F17C2205/0394 ,  F17C2250/032 ,  F17C2250/043 ,  F17C2250/0439 ,  F17C2250/0469 ,  F17C2250/0491 ,  F17C2250/0636 ,  F17C2260/044 ,  F17C2270/0518 ,  F24F11/30 ,  F24F2110/10 ,  F24F2110/40 ,  Y02P80/156

Abstract: A ventilation gas management system and process for an enclosure adapted to contain fluid supply vessel(s) and through which ventilation gas is flowed to provide safe operation in the event of leakage of fluid from a vessel. Ventilation gas flow is modulated to accommodate various hazard levels associated with the deployment and operation of such enclosure containing fluid supply vessel(s), e.g., a gas box or gas cabinet in a semiconductor manufacturing facility, thereby achieving reduction in ventilation gas requirements otherwise required for such deployment and operation.

Abstract translation: 一种通风气体管理系统和适用于容纳流体供应容器的外壳的过程，并且在流体从容器泄漏的情况下通过该通气气体流动以提供安全的操作。 调节通风气流以适应与包含流体供应容器（例如半导体制造设备中的气体箱或气体柜）的这种外壳的展开和操作相关的各种危险水平，从而实现另外需要的通气气体需求的减少 用于这种部署和操作。

公开(公告)号：US09132412B2

公开(公告)日：2015-09-15

申请号：US14035834

申请日：2013-09-24

Applicant: Entegris, Inc.

Inventor： J. Donald Carruthers ,  Karl Boggs ,  Luping Wang ,  Shaun M. Wilson ,  Jose I. Arno ,  Paul J. Marganski ,  Steven M. Bilodeau ,  Peng Zou ,  Brian Bobita ,  Joseph D. Sweeney ,  Douglas Edwards

IPC: B01J20/26 ,  B01J20/28 ,  F25B17/08 ,  F25B27/00 ,  F25B35/04 ,  B01J20/20 ,  B01J20/30 ,  C09K5/04 ,  F25B37/00

CPC classification number: B01J20/26 ,  B01J20/20 ,  B01J20/28054 ,  B01J20/28092 ,  B01J20/30 ,  B01J20/305 ,  B01J20/3078 ,  B01J2220/445 ,  C09K5/047 ,  F25B17/08 ,  F25B27/007 ,  F25B35/04 ,  F25B37/00 ,  F25B2500/01

Abstract: An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.

Abstract translation: 描述了吸附结构，其包括由吸附剂材料形成的至少一个吸附构件和与吸附构件的一部分接触设置的至少一个多孔构件，以允许气体进入和离开吸附构件的该部分。 这种吸附结构在吸附剂型制冷系统中有用。 还描述了一种用于生产吸附材料的方法，其中提供具有第一密度的第一聚合物材料和第二聚合物材料，其具有第二密度，其中第二聚合物材料与第一聚合物材料接触以形成 一个结构。 该结构被热解以形成多孔吸附材料，其包括对应于第一聚合物材料的第一区域和对应于第二聚合物材料的第二区域，其中孔径和孔分布中的至少一个在第一区域和第 第二个地区。