公开(公告)号：US09636626B2

公开(公告)日：2017-05-02

申请号：US14746776

申请日：2015-06-22

Applicant: Entegris, Inc. ,  Judith A. Moroco

Inventor： Dennis Brestovansky ,  Michael J. Wodjenski ,  Jose I. Arno ,  J. Donald Carruthers ,  Philip A. Moroco

IPC: B01D53/04 ,  F17C11/00 ,  B01D53/053 ,  F17C13/08

CPC classification number: B01D53/053 ,  B01D53/0407 ,  B01D2253/102 ,  B01D2253/304 ,  B01D2253/342 ,  B01D2257/40 ,  B01D2257/704 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C13/084 ,  F17C2201/0157 ,  F17C2205/0103 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0318

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

公开(公告)号：US20150306537A1

公开(公告)日：2015-10-29

申请号：US14746776

申请日：2015-06-22

Applicant: Entegris, Inc.

Inventor： Dennis Brestovansky ,  Michael J. Wodjenski ,  Jose I. Arno ,  J. Donald Carruthers ,  Philip A. Moroco

IPC: B01D53/053 ,  F17C11/00 ,  F17C13/08

CPC classification number: B01D53/053 ,  B01D53/0407 ,  B01D2253/102 ,  B01D2253/304 ,  B01D2253/342 ,  B01D2257/40 ,  B01D2257/704 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C13/084 ,  F17C2201/0157 ,  F17C2205/0103 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0318

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.