公开(公告)号：US06746238B2

公开(公告)日：2004-06-08

申请号：US10120413

申请日：2002-04-12

申请人： Eric Chu ,  Kevin Chiang ,  Ling-Hsin Tseng ,  Ken Yew

发明人： Eric Chu ,  Kevin Chiang ,  Ling-Hsin Tseng ,  Ken Yew

IPC分类号： F27D1502

CPC分类号： H01L21/67109 ,  C21D1/613 ,  F23M5/085 ,  F23M7/04 ,  H01L21/67754

摘要： The present invention relates to a cooling system of a furnace, and more particularly, to a multi-cycle cooling system, located by the furnace door. The multi-cycle cooling system comprises the first gas cooling cycle, the second gas cooling cycle, the first liquid cooling cycle, the second liquid cooling cycle, the heat sinks and the heat insulation slot. When inside the process tube proceeds the high temperature process like depositing process, the first gas cooling cycle and the second gas cooling cycle are opened and the second liquid cooling cycle is closed at the same time. The second gas cooling cycle and the second liquid cooling cycle are assembled in the first flange, which is located on the process tube and contacts with the door. The first liquid cooling cycle in the second flange, which is located on the process tube and contacts with the first range, is always opened. When inside the process tube not proceeds the high temperature process, the first gas cooling cycle and the second gas cooling cycle are closed and the second liquid cycle is opened at the same time. The heat sinks and the heat insulation slot are on the door to increase the heat conduction efficiency of the door and to extend the lifetime of the elements on the door. The first liquid cooling cycle and the second cooling cycle are the independent cooling systems to each other. The first flange is located between the door and the second flange.

摘要翻译： 本发明涉及一种炉的冷却系统，更具体地说，涉及一种由炉门定位的多循环冷却系统。 多循环冷却系统包括第一气体冷却循环，第二气体冷却循环，第一液体冷却循环，第二液体冷却循环，散热器和隔热槽。 当处理管内部进行如沉积工艺的高温处理时，第一气体冷却循环和第二气体冷却循环被打开，并且第二液体冷却循环同时关闭。 第二气体冷却循环和第二液体冷却循环组装在位于处理管上并与门接触的第一凸缘中。 始终打开位于处理管上并与第一范围接触的第二法兰中的第一液体冷却循环。 当处理管内部不进行高温处理时，第一气体冷却循环和第二气体冷却循环被关闭，并且第二液体循环同时打开。 散热器和隔热槽位于门上，以增加门的热传导效率，并延长元件在门上的使用寿命。 第一个液体冷却循环和第二个冷却循环是彼此独立的冷却系统。 第一凸缘位于门和第二凸缘之间。

公开(公告)号：US06427470B1

公开(公告)日：2002-08-06

申请号：US09776745

申请日：2001-02-05

申请人： Eric Chu ,  Kevin Chiang ,  Ling-Hsin Tseng ,  Ken Yew

发明人： Eric Chu ,  Kevin Chiang ,  Ling-Hsin Tseng ,  Ken Yew

IPC分类号： F25D2312

CPC分类号： H01L21/67109 ,  C21D1/613 ,  F23M5/085 ,  F23M7/04 ,  H01L21/67754

摘要： The present invention relates to a cooling system of a furnace, more particularly, to a multi-cycle cooling system, located by the furnace door. The probability of pollution by particles can be decreased and the lifetime of the furnace devices can be extended by using different liquid and gas cycles, cooling the different steps the semiconductor processes in the furnace.

摘要翻译： 本发明涉及一种炉的冷却系统，更具体地说，涉及一种由炉门定位的多循环冷却系统。 可以减少颗粒污染的可能性，并且可以通过使用不同的液体和气体循环来延长炉装置的寿命，冷却炉中半导体工艺的不同步骤。