公开(公告)号：US06394793B1

公开(公告)日：2002-05-28

申请号：US09760320

申请日：2001-01-13

申请人： Gene Bunge

发明人： Gene Bunge

IPC分类号： F27D1502

CPC分类号： C21D9/34 ,  C21D1/613 ,  C21D1/667 ,  C21D9/0068 ,  C21D2221/00 ,  F27D15/02 ,  F27D2009/0075 ,  F27D2009/0089

摘要： A method and apparatus for cooling heat-treated metallic work pieces, particularly jet engine components that are normally round in shape, have a complex radial cross-section, and are subject to subsequent machining steps, includes a set of concentric air quench delivery tubes for directing a compressed air quench onto specified areas of the work piece for cooling. A first set of tubes is located above the work piece, and a second set of tubes is located below the work piece. The tubes include a multiplicity of bores around their circumference. The air quench tubes are placed in close proximity to the relatively thicker and more massive portion of the work piece, while the thinner and less massive portions are allowed to cool in normal ambient air, thereby cooling the entire part at a substantially uniform rate. Shields placed at specified locations blocks the flow of compressed air and redirect it away from the thin portions of the part.

摘要翻译： 用于冷却经热处理的金属工件，特别是通常为圆形的喷气发动机部件的方法和装置具有复杂的径向横截面，并且经受后续的加工步骤，包括一组同心空气淬火输送管，其用于 将压缩空气淬火引导到工件的指定区域以进行冷却。 第一组管位于工件上方，第二组管位于工件下方。 这些管在其周围包括多个孔。 空气骤冷管被放置成靠近工件的相对较厚和更大块的部分，而较薄和较小块状的部分被允许在正常环境空气中冷却，从而以大致均匀的速率冷却整个部件。 放置在指定位置的屏蔽物阻挡压缩空气的流动，并将其重新定位成远离零件的薄部分。

公开(公告)号：US06474986B2

公开(公告)日：2002-11-05

申请号：US09832909

申请日：2001-04-12

申请人： Tetsuya Oda ,  Mitsuhiro Tanoue ,  Toshichika Takei ,  Eiichi Shirakawa

发明人： Tetsuya Oda ,  Mitsuhiro Tanoue ,  Toshichika Takei ,  Eiichi Shirakawa

IPC分类号： F27D1502

CPC分类号： H01L21/67109 ,  F27D9/00

摘要： In a heat processing apparatus structured to heat a wafer on a hot plate, a black plate at least the rear face of which practically has a color with a JIS lightness of 0V to 4V is positioned above the hot plate. Moreover, cooling air is blown out from nozzles onto the rear face of the hot plate. Thus, the temperature of the hot plate can be cooled rapidly.

摘要翻译： 在构成为对热板上的晶片进行加热的热处理装置中，至少其背面实际上具有JIS亮度为0V〜4V的颜色的黑板位于热板上方。 此外，冷却空气从喷嘴吹出到热板的后表面上。 因此，可以快速冷却热板的温度。

公开(公告)号：US06312253B1

公开(公告)日：2001-11-06

申请号：US09403118

申请日：1999-10-14

申请人： Mogens Juhl Fons ,  Flemming Schomburg

发明人： Mogens Juhl Fons ,  Flemming Schomburg

IPC分类号： F27D1502

CPC分类号： F28C3/16 ,  F27D15/0213 ,  F28F27/02

摘要： A cooler for cooling particulate material which has been subjected to heat treatment in an industrial kiln, such as a rotary kiln for manufacturing cement clinker, which cooler comprises an inlet, an outlet, end walls, side walls, a bottom and a ceiling, at least one stationary supporting surface for receiving and supporting the material to be cooled, means for injecting cooling gas into the material, as well as a reciprocating scraper system which comprises a number of rows of scraper elements arranged transversely across the direction of movement of the material, said scraper elements being moved back and forth in the direction of movement of the material for conveying the material forward across the supporting surface. The cooler is peculiar in that each of the transverse scraper elements is firmly fixed to at least one drive plate oriented in the direction of movement of the material, said plate extending at least across the entire length of the supporting surface, and being led either through the supporting surface of the cooler, its ceiling, one of its side walls and/or at least one of its end walls, where the drive plate is connected to a drive arrangement for movement back and forth.

摘要翻译： 用于冷却在工业窑中进行热处理的颗粒材料的冷却器，例如用于制造水泥熟料的回转窑，该冷却器包括入口，出口，端壁，侧壁，底部和顶板， 用于接收和支撑待冷却材料的至少一个固定支撑表面，用于将冷却气体注入到该材料中的装置，以及一个往复式刮刀系统，该系统包括沿横向跨越材料运动方向布置的多排刮板元件 所述刮刀元件沿用于将材料向前穿过支撑表面输送的材料的运动方向来回移动。 冷却器是特别的，因为每个横向刮刀元件牢固地固定到至少一个在材料运动方向上定向的驱动板，所述板至少延伸穿过支撑表面的整个长度，并且被引导通过 冷却器的支撑表面，其天花板，其侧壁中的一个和/或其端壁中的至少一个，其中驱动板连接到用于前后运动的驱动装置。

公开(公告)号：US06290493B1

公开(公告)日：2001-09-18

申请号：US09622752

申请日：2000-10-10

申请人： Regnier Pirard ,  Bruno Wolan

发明人： Regnier Pirard ,  Bruno Wolan

IPC分类号： F27D1502

CPC分类号： F27D15/022

摘要： A plate globally shaped like an upturned caisson with a bearing surface (10) for supporting and driving forward a bulk material layer to be cooled with a cooling gas passing through the platex. The plate front part (10b), viewed in the material forward motion direction, is formed with overlapping flanges (14) sloping upwards and defining transverse cavities (20) in the bearing surface and the overlapping parts of two adjacent flanges (14) defining narrow channels (22) for the cooling gas to pass through.

摘要翻译： 全局地形成为具有支承表面（10）的上翘沉箱的板，用于支撑并向前驱动通过板x的冷却气体冷却的散装材料层。 从材料向前运动方向观察的板前部（10b）形成有向上倾斜并在轴承表面中限定横向腔（20）的重叠凸缘（14），并且两个相邻凸缘（14）的重叠部分限定窄 用于冷却气体通过的通道（22）。

公开(公告)号：US06821114B2

公开(公告)日：2004-11-23

申请号：US10239894

申请日：2002-10-24

申请人： Kinya Kisoda

发明人： Kinya Kisoda

IPC分类号： F27D1502

CPC分类号： C21D1/767 ,  C21D1/613 ,  F27B5/06 ,  F27B2005/066 ,  F27B2005/167 ,  F27D19/00 ,  F27D21/0014

摘要： A gas-cooled single-chamber type heat-treating furnace T in which cooling gas vents 9A and 9B opened and closed by doors 11A and 11B are provided on each of mutually opposed walls of an inner chamber 5 forming a processing room and cooling gas is circulated by opening the cooling gas vents 9A and 9B during gas cooling, wherein the cooling gas vents 9A and 9B of the inner chamber 5 are provided with lattice-shaped flow uniforming members 19 made of heat-resisting materials.

公开(公告)号：US06514073B1

公开(公告)日：2003-02-04

申请号：US09667604

申请日：2000-09-22

申请人： Takayuki Toshima ,  Nobuo Konishi

发明人： Takayuki Toshima ,  Nobuo Konishi

IPC分类号： F27D1502

CPC分类号： G03F7/168

摘要： A resist processing method includes (a), to a substrate having a circuit pattern with an uneven surface formed thereon, coating a photoresist solution to, by doing so, form a photoresist film, (b) subjecting the substrate to heat processing to cause a portion of the photoresist film to be chemically modified to create a modified resist layer of a substantially uniform thickness from the uneven surface of the circuit pattern, and (c) selectively removing only a resist portion unmodified at the step (b) to leave a modified resist layer on the uneven surface of the circuit pattern.

摘要翻译： 抗蚀剂处理方法包括：（a）对具有形成在其上的不平坦表面的电路图案的基板，通过涂布光致抗蚀剂溶液，形成光致抗蚀剂膜，（b）对基板进行加热处理，使 光致抗蚀剂膜的部分被化学改性以从电路图案的不平坦表面形成具有基本均匀厚度的改性抗蚀剂层，以及（c）仅在步骤（b）仅选择性地除去未修饰的抗蚀剂部分，以留下经修饰的 抗蚀剂层在电路图案的不平坦表面上。

公开(公告)号：US06382963B2

公开(公告)日：2002-05-07

申请号：US09817496

申请日：2001-03-26

申请人： Hubert Ramesohl

发明人： Hubert Ramesohl

IPC分类号： F27D1502

CPC分类号： F27D15/0213 ,  F27B9/243 ,  F27B2009/2492

摘要： A grate cooler of simple construction whose cooling grate is substantly protected against wear and which can be operated in simple fashion and with a high cooling efficiency. A plurality of rotatably supported tubular oscillating shafts, spaced apart from one another, are arranged transversely to the conveyance direction of cooling feed material above a stationary cooling grate. Upwardly extending shovel arms (16a, 16b, 16c), are attached to the shafts which move with a reciprocating oscillatory motion (17) in the conveyance direction of cooling feed material. The shovel arms have a pushing surface on their forward side and a wedge surface on their rearward side and, in their oscillatory motion, moving the hot bed of cooling feed material successively from the beginning of grate-cooler to the discharge of the grate cooler.

摘要翻译： 一种简单结构的格栅式冷却器，其冷却炉具有实质上的防磨损，并且可以简单的方式操作并具有高的冷却效率。 彼此间隔开的多个可旋转支撑的管状摆动轴横向于固定式冷却炉排上方的冷却进料的输送方向。 向上延伸的铲斗（16a，16b，16c）附接到在冷却进料的传送方向上以往复振荡运动（17）运动的轴。 铲臂在其前侧具有推动表面并且在其后侧具有楔形表面，并且在其振荡运动中，将冷却进料的热床从炉排冷却器的开始依次移动到排出炉排冷却器。

公开(公告)号：US06461154B2

公开(公告)日：2002-10-08

申请号：US09827464

申请日：2001-04-06

申请人： Hannes Piringer ,  Walter Egger

发明人： Hannes Piringer ,  Walter Egger

IPC分类号： F27D1502

CPC分类号： F23B1/36 ,  F23G5/24

摘要： In a method for burning carbonate-containing material the latter moves as a result of gravity in counter-current to the cooling and combustion air through a shaft kiln. The fuel supply takes place by means of burning lances introduced into the granular burning material at right angles to the shaft wall. On limiting the grain size and the residence time as a result of this type of fuel supply it is possible to achieve high burning temperatures even suitable for hard burning without there being any sintering together of the granular burning material.

摘要翻译： 在用于燃烧含碳酸盐材料的方法中，后者由于重力与通过轴窑的冷却和燃烧空气逆流而移动。 燃料供应通过与轴壁成直角的引入到颗粒燃烧材料中的燃烧喷枪进行。 由于这种燃料供给的限制，在限制晶粒尺寸和停留时间的情况下，可以实现高燃烧温度，甚至适合于硬烧，而不需要在颗粒燃烧材料上一起烧结。

公开(公告)号：US06450805B1

公开(公告)日：2002-09-17

申请号：US09634299

申请日：2000-08-09

申请人： Tetsuya Oda ,  Mitsuhiro Tanoue ,  Toshichika Takei

发明人： Tetsuya Oda ,  Mitsuhiro Tanoue ,  Toshichika Takei

IPC分类号： F27D1502

CPC分类号： F27D15/02 ,  F27B17/0025 ,  H01L21/67109

摘要： In a heat processing apparatus for heating a wafer on a hot plate, a black plate having at least a rear face practically having a color with a JIS lightness of 0V to 4V is positioned above the hot plate. Moreover, cooling air is blown out from nozzles onto the rear face of the hot plate so that the temperature of the hot plate can be cooled rapidly.

摘要翻译： 在用于加热热板上的晶片的加热装置中，至少具有JIS亮度为0V至4V的颜色的至少后面的黑板位于热板上方。 此外，冷却空气从喷嘴吹出到热板的后表面，使得热板的温度可以快速冷却。

公开(公告)号：US06450803B2

公开(公告)日：2002-09-17

申请号：US09781418

申请日：2001-02-13

申请人： Eiichi Shirakawa ,  Nobuyuki Sata

发明人： Eiichi Shirakawa ,  Nobuyuki Sata

IPC分类号： F27D1502

CPC分类号： H01L21/67248 ,  H01L21/67109

摘要： A heat treatment table is divided into two or more regions, a heater is disposed for each region. On a predetermined portion of the heat treatment table, a plurality of sensors are disposed separately each other. A relation between temperatures of the respective portions on the heat treatment table and temperatures detected by the sensors is grasped in advance, thereby enables to surmise a temperature of the respective portion of the heat treatment table from the temperature detected by the sensors. In the case of an wafer being actually treated by placing on the heat treatment table, the temperatures detected by the sensors are observed, from these detected temperatures, the temperatures of the respective portions on the heat treatment table, that is, temperatures affecting the wafer, are surmised.

摘要翻译： 热处理台被分为两个或更多个区域，每个区域设置加热器。 在热处理台的预定部分上，多个传感器彼此分开设置。 预先掌握热处理台上的各部分的温度与传感器检测的温度之间的关系，从而能够从热传感器检测到的温度推测热处理台的各部分的温度。 在通过放置在热处理台上实际处理晶片的情况下，从这些检测温度观察由传感器检测的温度，热处理台上各部分的温度，即影响晶片的温度 ，被推测。