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公开(公告)号：US06917459B2
公开(公告)日：2005-07-12
申请号：US10454423
申请日：2003-06-03
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G02B26/00 , B05D5/06 , C23C14/02 , H01L21/00 , H01L21/44 , H01L21/461
CPC分类号： B81C1/00801 , B81B2201/042 , B81B2203/0181 , B81C2203/0714 , B81C2203/0771 , G02B26/0841
摘要： A method of forming a MEMS device includes providing a substructure including a base material and at least one conductive layer formed on a first side of the base material, forming a dielectric layer over the at least one conductive layer of the substructure, forming a protective layer over the dielectric layer, defining an electrical contact area for the MEMS device on the protective layer, and forming an opening within the electrical contact area through the protective layer and the dielectric layer to the at least one conductive layer of the substructure.
摘要翻译： 一种形成MEMS器件的方法包括提供包括基底材料的底层结构和形成在基底材料的第一侧上的至少一个导电层，在底层结构的至少一个导电层上形成介电层，形成保护层 限定介电层上的MEMS器件的电接触面积，以及在通过保护层和电介质层的电接触区域内形成在子结构的至少一个导电层上的开口。
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公开(公告)号：US06979585B2
公开(公告)日：2005-12-27
申请号：US10683909
申请日：2003-10-10
CPC分类号： B81C1/00269 , B81C2203/0109 , B81C2203/019
摘要： A microelectromechanical system (MEMS) device is created by forming mechanical structures supported by a substrate having a bond ring area laterally spaced from the mechanical structures and having a sacrificial layer surrounding the mechanical structures. A bond ring material is formed on top of the sacrificial layer and the bond ring area. Some of the bond ring material is then removed to create a bond ring.
摘要翻译： 微机电系统（MEMS）装置通过形成由衬底支撑的机械结构而形成，该衬底具有与机械结构横向间隔开的结合环区域并且具有围绕机械结构的牺牲层。 在牺牲层和结合环区域的顶部上形成结合环材料。 然后去除一些粘结环材料以形成粘结环。
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公开(公告)号：US07273693B2
公开(公告)日：2007-09-25
申请号：US10909074
申请日：2004-07-30
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micro electromechanical system (MEMS) mirror, comprising a displaceable hinged member, a mirror plate, and a plurality of mirror support elements. The mirror plate has a planar mirror face affixed thereto. The plurality of mirror support elements extend between the displaceable hinged member and the mirror plate.
摘要翻译： 一种微机电系统（MEMS）镜，包括可移位的铰接构件，镜板和多个镜支撑元件。 镜面板具有固定在其上的平面镜面。 多个镜支撑元件在可移动的铰接构件和镜板之间延伸。
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公开(公告)号：US20060024620A1
公开(公告)日：2006-02-02
申请号：US10909074
申请日：2004-07-30
申请人： Eric Nikkel , Michael Monroe , Mickey Szepesi
发明人： Eric Nikkel , Michael Monroe , Mickey Szepesi
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micro electromechanical system (MEMS) mirror, comprising a displaceable hinged member, a mirror plate, and a plurality of mirror support elements. The mirror plate has a planar mirror face affixed thereto. The plurality of mirror support elements extend between the displaceable hinged member and the mirror plate.
摘要翻译： 一种微机电系统（MEMS）镜，包括可移位的铰接构件，镜板和多个镜支撑元件。 镜面板具有固定在其上的平面镜面。 多个镜支撑元件在可移动的铰接构件和镜板之间延伸。
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公开(公告)号：US20050077612A1
公开(公告)日：2005-04-14
申请号：US10683909
申请日：2003-10-10
CPC分类号： B81C1/00269 , B81C2203/0109 , B81C2203/019
摘要： A microelectromechanical system (MEMS) device is created by forming mechanical structures supported by a substrate having a bond ring area laterally spaced from the mechanical structures and having a sacrificial layer surrounding the mechanical structures. A bond ring material is formed on top of the sacrificial layer and the bond ring area. Some of the bond ring material is then removed to create a bond ring.
摘要翻译： 微机电系统（MEMS）装置通过形成由衬底支撑的机械结构而形成，该衬底具有与机械结构横向间隔开的结合环区域并且具有围绕机械结构的牺牲层。 在牺牲层和结合环区域的顶部上形成结合环材料。 然后去除一些粘结环材料以形成粘结环。
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