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1.发明授权Method for the plasma cleaning of the surface of a material coated with an organic substance 有权用有机物质涂覆的材料的表面进行等离子体清洗的方法公开(公告)号：US08591660B2
公开(公告)日：2013-11-26
申请号：US12631220
申请日：2009-12-04
IPC分类号： C03C25/62
CPC分类号： H01J37/32348 , B08B7/0035 , C23G5/00
摘要： The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode in order to break down the organic substance under the action of the free radicals O thus produces. The invention also relates to an installation that is used to carry out said method.
摘要翻译： 本发明涉及清洁涂有有机物质的材料的表面的方法。 本发明的方法的特征在于其包括以下步骤：将材料引入处理室中，其中压力为10mbar和1bar之间，其中供给含有至少90体积％ 氧; 并通过在材料表面和电介质覆盖的电极之间通过放电来产生等离子体，以便在由此产生的自由基O的作用下分解有机物质。 本发明还涉及一种用于执行所述方法的装置。
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2.发明申请Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method 有权涂覆有机物质的材料的表面的等离子体清洗方法以及用于实施所述方法的装置公开(公告)号：US20050161433A1
公开(公告)日：2005-07-28
申请号：US10504596
申请日：2003-02-19
CPC分类号： H01J37/32348 , B08B7/0035 , C23G5/00
摘要： The invention relates to a method of cleaning the surface of a material (4) that is coated with an organic substance. The inventive method is characterised in that it comprises the following steps, consisting in: introducing the material (4) into a treatment chamber (2), having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode (5a, 5b, 5c, 5d, 5e, 5f, 5g) in order to break down the organic substance under the action of the free radicals O thus produced. The invention also relates to an installation (1) that is used to carry out said method.
摘要翻译： 本发明涉及一种清洁涂有有机物质的材料（4）的表面的方法。 本发明的方法的特征在于其包括以下步骤：将材料（4）引入处理室（2）中，其中压力为10mbar和1bar之间，其中供给含有 至少90体积％的氧气; 并通过使材料的表面和电介质覆盖的电极（5a，5b，5c，5d，5e，5f，5g）之间的放电进行放电来产生等离子体，以便分解有机物 在由此产生的自由基O的作用下的物质。 本发明还涉及一种用于执行所述方法的装置（1）。
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3.发明授权Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method 有权涂覆有机物质的材料的表面的等离子体清洗方法以及用于实施所述方法的装置公开(公告)号：US08877003B2
公开(公告)日：2014-11-04
申请号：US12631193
申请日：2009-12-04
IPC分类号： C23F1/00 , H01L21/306 , B08B7/00 , H01J37/32 , C23G5/00
CPC分类号： H01J37/32348 , B08B7/0035 , C23G5/00
摘要： The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode in order to break down the organic substance under the action of the free radicals O thus produces. The invention also relates to an installation that is used to carry out said method.
摘要翻译： 本发明涉及清洁涂有有机物质的材料的表面的方法。 本发明的方法的特征在于其包括以下步骤：将材料引入处理室中，其中压力为10mbar和1bar之间，其中供给含有至少90体积％ 氧; 并通过在材料表面和电介质覆盖的电极之间通过放电来产生等离子体，以便在由此产生的自由基O的作用下分解有机物质。 本发明还涉及一种用于执行所述方法的装置。
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公开(公告)号：US20100139864A1
公开(公告)日：2010-06-10
申请号：US12631193
申请日：2009-12-04
CPC分类号： H01J37/32348 , B08B7/0035 , C23G5/00
摘要： The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode in order to break down the organic substance under the action of the free radicals O thus produces. The invention also relates to an installation that is used to carry out said method.
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5.发明申请公开(公告)号：US20100139691A1
公开(公告)日：2010-06-10
申请号：US12631220
申请日：2009-12-04
IPC分类号： B08B6/00
CPC分类号： H01J37/32348 , B08B7/0035 , C23G5/00
摘要： The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode in order to break down the organic substance under the action of the free radicals O thus produces. The invention also relates to an installation that is used to carry out said method.
摘要翻译： 本发明涉及清洁涂有有机物质的材料的表面的方法。 本发明的方法的特征在于其包括以下步骤：将材料引入处理室中，其中压力为10mbar和1bar之间，其中供给含有至少90体积％ 氧; 并通过在材料表面和电介质覆盖的电极之间通过放电来产生等离子体，以便在由此产生的自由基O的作用下分解有机物质。 本发明还涉及一种用于执行所述方法的装置。
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6.发明授权Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method 有权涂覆有机物质的材料的表面的等离子体清洗方法以及用于实施所述方法的装置公开(公告)号：US07674339B2
公开(公告)日：2010-03-09
申请号：US10504596
申请日：2003-02-19
CPC分类号： H01J37/32348 , B08B7/0035 , C23G5/00
摘要： The invention relates to a method of cleaning the surface of a material (4) that is coated with an organic substance. The inventive method is characterised in that it comprises the following steps, consisting in: introducing the material (4) into a treatment chamber (2), having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode (5a, 5b, 5c, 5d, 5e, 5f, 5g) in order to break down the organic substance under the action of the free radicals O thus produced. The invention also relates to an installation (1) that is used to carry out said method.
摘要翻译： 本发明涉及一种清洁涂有有机物质的材料（4）的表面的方法。 本发明的方法的特征在于其包括以下步骤：将材料（4）引入处理室（2）中，其中压力为10mbar和1bar之间，其中供给含有 至少90体积％的氧气; 通过使材料的表面和电介质覆盖的电极（5a，5b，5c，5d，5e，5f，5g）之间的放电进行放电来产生等离子体，以在有机物的自由的作用下分解有机物质 因此产生的自由基O。 本发明还涉及一种用于执行所述方法的装置（1）。
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