公开(公告)号：US08508134B2

公开(公告)日：2013-08-13

申请号：US12804763

申请日：2010-07-29

申请人： Evgeny Vitalievich Klyuev ,  Viacheslav Vasilievich Zhurin

发明人： Evgeny Vitalievich Klyuev ,  Viacheslav Vasilievich Zhurin

IPC分类号： H01J7/24

CPC分类号： H01J27/146 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/31

摘要： A Hall-current ion source with a narrow ion beam energy distribution is presented. A narrow ion beam energy distribution is provided by a utilization of a multi-chamber anode through which a working gas is applied and delivers a uniform working gas distribution in a discharge channel. Introduction of a working gas through a lower part of anode makes applied electric potential in a narrow area and leading to enhanced conditions for a working gas ionization, high ion beam current, high translation of a discharge voltage into a “monochromatic” ion beam mean energy distribution. A multi-chamber anode with a slit exit for introduction of a working gas into area under anode is utilized to prevent a backflow of insulating and dielectric depositions on anode parts, and under anode area makes a nominal operation with reactive gases without a phenomenon called as “anode poisoning” during long operating hours. The ion source with a shielded Hot Filament design shows very effective ion beam neutralization properties; it produces less heating of the substrate than a traditional one; it has a cleaner ion beam because its beam is not contaminated by the Hot Filament material particles. In the design with two Hot Filaments the ion source operation is extended for tens of hours.

摘要翻译： 提出了具有窄离子束能量分布的霍尔电流离子源。 通过利用施加工作气体的多室阳极提供窄的离子束能量分布，并在排放通道中输送均匀的工作气体分布。 通过阳极下部引入工作气体可在较小的区域内施加电位，从而提高工作气体电离条件，高离子束电流，将放电电压高度平移为“单色”离子束平均能量 分配。 利用具有用于将工作气体引入阳极区域的狭缝出口的多室阳极来防止阳极部分上的绝缘和电介质沉积的回流，并且在阳极区域下使用反应气体进行标称操作，而没有称为“ 长时间运行时“阳极中毒”。 具有屏蔽热丝设计的离子源显示出非常有效的离子束中和特性; 它比传统的基板产生较少的加热; 它具有更清洁的离子束，因为其光束不被热丝材料颗粒污染。 在使用两根热丝的设计中，离子源操作延长数十小时。

公开(公告)号：US20120025710A1

公开(公告)日：2012-02-02

申请号：US12804763

申请日：2010-07-29

申请人： Evgeny Vitalievich Klyuev ,  Viacheslav Vasilievich Zhurin

发明人： Evgeny Vitalievich Klyuev ,  Viacheslav Vasilievich Zhurin

IPC分类号： H01J27/02

CPC分类号： H01J27/146 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/31

摘要： A Hall-current ion source with a narrow ion beam energy distribution is presented. A narrow ion beam energy distribution is provided by a utilization of a multi-chamber anode through which a working gas is applied and delivers a uniform working gas distribution in a discharge channel. Introduction of a working gas through a lower part of anode makes applied electric potential in a narrow area and leading to enhanced conditions for a working gas ionization, high ion beam current, high translation of a discharge voltage into a “monochromatic” ion beam mean energy distribution. A multi-chamber anode with a slit exit for introduction of a working gas into area under anode is utilized to prevent a backflow of insulating and dielectric depositions on anode parts, and under anode area makes a nominal operation with reactive gases without a phenomenon called as “anode poisoning” during long operating hours. The ion source with a shielded Hot Filament design shows very effective ion beam neutralization properties; it produces less heating of the substrate than a traditional one; it has a cleaner ion beam because its beam is not contaminated by the Hot Filament material particles. In the design with two Hot Filaments the ion source operation is extended for tens of hours.

摘要翻译： 提出了具有窄离子束能量分布的霍尔电流离子源。 通过利用施加工作气体的多室阳极提供窄的离子束能量分布，并在排放通道中输送均匀的工作气体分布。 通过阳极下部引入工作气体可在较小的区域内施加电位，从而提高工作气体电离条件，高离子束电流，将放电电压高度平移为“单色”离子束平均能量 分配。 利用具有用于将工作气体引入阳极区域的狭缝出口的多室阳极来防止阳极部分上的绝缘和电介质沉积的回流，并且在阳极区域下使用反应气体进行标称操作，而没有称为“ 长时间运行时“阳极中毒”。 具有屏蔽热丝设计的离子源显示出非常有效的离子束中和特性; 它比传统的基板产生较少的加热; 它具有更清洁的离子束，因为其光束不被热丝材料颗粒污染。 在使用两根热丝的设计中，离子源操作延长数十小时。