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公开(公告)号：US20150373826A1
公开(公告)日：2015-12-24
申请号：US14410488
申请日：2013-06-18
发明人： Aaron Kombai KNOLL
CPC分类号： H05H5/02 , F03H1/0037 , F03H1/0068 , H01J27/146 , H01J27/205
摘要： An ion accelerator includes: an inner magnet having a channel extending through it in an axial direction; an outer magnet extending around the inner magnet, the magnets having like polarities so as to produce a magnetic field having two locations of zero magnetic field strength. The locations are spaced apart in the axial direction; and an anode and a cathode are arranged to generate an electrical potential difference between the locations.
摘要翻译： 离子加速器包括：具有沿轴向延伸穿过其的通道的内部磁体; 围绕内磁体延伸的外磁体，磁体具有相同的极性，从而产生具有零磁场强度的两个位置的磁场。 这些位置沿轴向间隔开; 并且布置阳极和阴极以在位置之间产生电位差。
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公开(公告)号：US20120025710A1
公开(公告)日：2012-02-02
申请号：US12804763
申请日：2010-07-29
IPC分类号： H01J27/02
CPC分类号： H01J27/146 , H01J37/08 , H01J2237/006 , H01J2237/022 , H01J2237/061 , H01J2237/08 , H01J2237/31
摘要： A Hall-current ion source with a narrow ion beam energy distribution is presented. A narrow ion beam energy distribution is provided by a utilization of a multi-chamber anode through which a working gas is applied and delivers a uniform working gas distribution in a discharge channel. Introduction of a working gas through a lower part of anode makes applied electric potential in a narrow area and leading to enhanced conditions for a working gas ionization, high ion beam current, high translation of a discharge voltage into a “monochromatic” ion beam mean energy distribution. A multi-chamber anode with a slit exit for introduction of a working gas into area under anode is utilized to prevent a backflow of insulating and dielectric depositions on anode parts, and under anode area makes a nominal operation with reactive gases without a phenomenon called as “anode poisoning” during long operating hours. The ion source with a shielded Hot Filament design shows very effective ion beam neutralization properties; it produces less heating of the substrate than a traditional one; it has a cleaner ion beam because its beam is not contaminated by the Hot Filament material particles. In the design with two Hot Filaments the ion source operation is extended for tens of hours.
摘要翻译： 提出了具有窄离子束能量分布的霍尔电流离子源。 通过利用施加工作气体的多室阳极提供窄的离子束能量分布，并在排放通道中输送均匀的工作气体分布。 通过阳极下部引入工作气体可在较小的区域内施加电位，从而提高工作气体电离条件，高离子束电流，将放电电压高度平移为“单色”离子束平均能量 分配。 利用具有用于将工作气体引入阳极区域的狭缝出口的多室阳极来防止阳极部分上的绝缘和电介质沉积的回流，并且在阳极区域下使用反应气体进行标称操作，而没有称为“ 长时间运行时“阳极中毒”。 具有屏蔽热丝设计的离子源显示出非常有效的离子束中和特性; 它比传统的基板产生较少的加热; 它具有更清洁的离子束，因为其光束不被热丝材料颗粒污染。 在使用两根热丝的设计中，离子源操作延长数十小时。
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公开(公告)号：US07566883B2
公开(公告)日：2009-07-28
申请号：US11622989
申请日：2007-01-12
CPC分类号： H01J27/022 , H01J27/04 , H01J27/146 , H01J2237/002 , H01J2237/08
摘要： One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.
摘要翻译： 一个或多个热转印片可以在离子源中容易地移除和替换。 离子源具有可移除的阳极组件，其包括热分解片，其是可分离的并且与基底组件相容以便于维护阳极组件的可消耗部件。 热转印片材可以介于阳极组件内的消耗部件之间。 热转印片材可以是导热的并且是电绝缘的或导电的。
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公开(公告)号：US07476869B2
公开(公告)日：2009-01-13
申请号：US11622981
申请日：2007-01-12
CPC分类号： H01J27/146
摘要： A gas distributor is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the gas distributor, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The gas distributor may be mounted to a thermal control plate in the anode assembly with several set screws. The gas distributor may be disk-shaped with counterbores in a surface to recess the heads of the set screws. Alternately, the gas distributor may be clamped or held in place by other structures or components of the ion source.
摘要翻译： 气体分配器易于在离子源中移除和更换。 离子源具有可拆卸阳极组件，包括气体分配器，其可分离并且与基座组件相接触，以便易于维护阳极组件的可消耗部件。 气体分配器可以用多个固定螺钉安装在阳极组件中的热控制板上。 气体分配器可以是盘形的，在表面中具有沉孔以使固定螺钉的头部凹陷。 或者，气体分配器可以被离子源的其它结构或部件夹紧或保持就位。
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公开(公告)号：US07327089B2
公开(公告)日：2008-02-05
申请号：US10528386
申请日：2003-09-19
申请人： John E. Madocks
发明人： John E. Madocks
IPC分类号： H01J7/24
CPC分类号： H05H1/46 , H01J27/146 , H01J37/32009 , H01J37/32357 , H01J37/3266 , H01J2237/0815 , H05H1/48
摘要： A plasma source which includes a discharge cavity having a first width, where that discharge cavity includes a top portion, a wall portion, and a nozzle disposed on the top portion and extending outwardly therefrom, where the nozzle is formed to include an aperture extending through the top portion and into the discharge cavity, wherein the aperture has a second width, where the second width is less than the first width. The plasma source further includes a power supply, a conduit disposed in the discharge cavity for introducing an ionizable gas therein, and at least one cathode electrode connected to the power supply, where that cathode electrode is capable of supporting at least one magnetron discharge region within the discharge cavity. The plasma source further includes a plurality of magnets disposed adjacent the wall portion, where that plurality of magnets create a null magnetic field point within the discharge cavity.
摘要翻译： 一种等离子体源，其包括具有第一宽度的排出腔，其中所述排出腔包括顶部，壁部分和设置在顶部上并从其向外延伸的喷嘴，其中所述喷嘴形成为包括延伸穿过的孔 顶部并进入排出腔，其中孔具有第二宽度，其中第二宽度小于第一宽度。 等离子体源还包括电源，设置在放电腔中的用于在其中引入可电离气体的导管和连接到电源的至少一个阴极，其中阴极能够支撑至少一个磁控管放电区域 放电腔。 等离子体源还包括邻近壁部设置的多个磁体，其中多个磁体在放电腔内形成零磁场点。
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公开(公告)号：US20070125966A1
公开(公告)日：2007-06-07
申请号：US11622989
申请日：2007-01-12
申请人： David Burtner , Scott Townsend , Daniel Siegfried
发明人： David Burtner , Scott Townsend , Daniel Siegfried
IPC分类号： H01J37/08
CPC分类号： H01J27/022 , H01J27/04 , H01J27/146 , H01J2237/002 , H01J2237/08
摘要： One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.
摘要翻译： 一个或多个热转印片可以在离子源中容易地移除和替换。 离子源具有可移除的阳极组件，其包括热分解片，其是可分离的并且与基底组件相容以便于维护阳极组件的可消耗部件。 热转印片材可以介于阳极组件内的消耗部件之间。 热转印片材可以是导热的并且是电绝缘的或导电的。
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公开(公告)号：US20050237000A1
公开(公告)日：2005-10-27
申请号：US11111019
申请日：2005-04-21
申请人： Viacheslav Zhurin
发明人： Viacheslav Zhurin
CPC分类号： H01J27/143 , H01J27/146
摘要： A Hall-type ion source for generation of ion beams for technological applications presents itself a hybrid ion source, where properties of closed drift systems and end-Hall ion sources are combined for more efficient operation. An ion source has shorter central magnetic pole than regular closed drift ion source with magnetic screens that provide positive magnetic gradient in an ion source's discharge channel. An ion source with these combined properties has higher ratio of ion beam current to discharge current than end-Hall ion source and wider range of discharge parameters than closed drift ion source.
摘要翻译： 用于产生用于技术应用的离子束的霍尔型离子源本身是混合离子源，其中闭合漂移系统和末端霍尔离子源的性质被组合以用于更有效的操作。 离子源具有比具有磁屏幕的常规闭合漂移离子源更短的中心磁极，其在离子源的放电通道中提供正的磁梯度。 具有这些组合性质的离子源具有比封闭漂移离子源更高的离子束电流与放电霍尔离子源的比率和放电参数范围更大的离子源电流。
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公开(公告)号：US06645301B2
公开(公告)日：2003-11-11
申请号：US09925187
申请日：2001-08-09
申请人： Wayne G Sainty
发明人： Wayne G Sainty
IPC分类号： B05C1100
CPC分类号： H01J27/02 , C23C14/221 , C23C14/54 , H01J27/146 , H01J37/08
摘要： An ion source for use in ion assisted deposition of films, has an ionization region, a gas supply supplying ionizable gas to the ionization region, a gas excitation system causing ionization of the gas, ion influencing means forming the ions into a current directed at a target, and an ion source controller controlling the ion source so as to intermittently produce the ion current.
摘要翻译： 用于膜的离子辅助沉积的离子源具有电离区域，向离子化区域供应可电离气体的气体供应源，引起气体离子化的气体激发系统，将离子形成为直流电流的电流的离子影响装置 靶和离子源控制器，其控制离子源以间歇地产生离子电流。
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9.发明申请公开(公告)号：US20180226217A1
公开(公告)日：2018-08-09
申请号：US15901763
申请日：2018-02-21
CPC分类号： H01J27/146 , F03H1/0075 , H01J27/143
摘要： A miniature Hall current plasma source apparatus having magnetic shielding of the walls from ionized plasma, an integrated discharge channel and gas distributor, an instant-start hollow cathode mounted to the plasma source, and an externally mounted keeper, is described. The apparatus offers advantages over existing other Hall current plasma sources having similar power levels, including: lower mass, longer lifetime, lower part count including fewer power supplies, and the ability to be continuously adjustable to lower average power levels using pulsed operation and adjustment of the pulse duty cycle. The Hall current plasma source can provide propulsion for small spacecraft that either do not have sufficient power to accommodate a propulsion system or do not have available volume to incorporate the larger propulsion systems currently available. The present low-power Hall current plasma source can be used to provide energetic ions to assist the deposition of thin films in plasma processing applications.
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公开(公告)号：US20180012722A1
公开(公告)日：2018-01-11
申请号：US15546034
申请日：2014-07-29
IPC分类号： H01J27/14
CPC分类号： H01J27/146 , H01J27/14 , H01J2237/002
摘要： In accordance with one embodiment of the present invention, an end-Hall ion source has an electron emitting cathode, an anode, a reflector, an internal pole piece, an external pole piece, a magnetically permeable path, and a magnetic-field generating means located in the permeable path between the two pole pieces. The anode and reflector are enclosed without contact by a thermally conductive cup that has internal passages through which a cooling fluid can flow. The closed end of the cup is located between the reflector and the internal pole piece and the opposite end of the cup is in direct contact with the external pole piece, and wherein the cup is made of a material having a low microhardness, such as copper or aluminum.
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