公开(公告)号：US06989904B2

公开(公告)日：2006-01-24

申请号：US10464402

申请日：2003-06-18

申请人： Ewald Moersen ,  Axel Engel ,  Christian Lemke ,  Guenter Grabosch

发明人： Ewald Moersen ,  Axel Engel ,  Christian Lemke ,  Guenter Grabosch

IPC分类号： G01B9/02 ,  G01N21/00 ,  G01J4/00

CPC分类号： G03F7/70966 ,  G01N21/23 ,  G01N21/455 ,  G01N21/896 ,  G01N21/958

摘要： The method for determining local structures in optical materials, especially crystals, includes observing schlieren visually in a material to be tested with divergent white light in a first step; measuring birefringence of polarized laser light in the material to determine local defects and structure faults in the material with a spatial resolution of 0.5 mm or better in a second step if the material is judged to be suitable in the first step and then interferometrically measuring the material to determine the faults in the material by interferometry in a third step if the material is judged to be suitable in the first and second steps. This method can be part of a method for making optical components, especially for microlithography.

摘要翻译： 用于确定光学材料，特别是晶体中的局部结构的方法包括在第一步骤中以发散的白光在待测材料中目视观察schlieren; 测量材料中的偏振激光的双折射，以确定在第二步中空间分辨率为0.5mm或更好的材料中的局部缺陷和结构断层，如果该材料被判断为适合于第一步骤然后干涉测量材料 如果在第一和第二步骤中判断材料是合适的，则通过第三步骤中的干涉测量来确定材料中的故障。 该方法可以是制造光学部件的方法的一部分，特别是用于微光刻。

公开(公告)号：US20110090492A1

公开(公告)日：2011-04-21

申请号：US12888775

申请日：2010-09-23

申请人： Christian Lemke ,  Manuela Lohse ,  Lars Ortmann ,  Stephan Strohm ,  Albrecht Hertzsch ,  Karl Hehl

发明人： Christian Lemke ,  Manuela Lohse ,  Lars Ortmann ,  Stephan Strohm ,  Albrecht Hertzsch ,  Karl Hehl

IPC分类号： G01N21/958 ,  G01N21/00 ,  C03B20/00

CPC分类号： G01M11/0278 ,  G01N21/958

摘要： The method of evaluating an optical defect in a transparent material includes irradiating the material with light to produce scattered light from the defect, rotating the material about a rotation axis passing through the defect, measuring scattered light intensity at a scattering angle (θs) to the rotation axis by means of a detector, determining the dependence of the measured scattered light intensity on rotation angle (φs) around the rotation axis and characterizing size and/or shape of the defect from that dependence. The apparatus for performing the method has a light source, a rotatable holder for the transparent material, a light sensitive receiving device and an imaging optical system for imaging scattered light from the material within a certain angular range on a detector surface of the receiving device.

摘要翻译： 评估透明材料中的光学缺陷的方法包括用光照射材料以产生来自缺陷的散射光，围绕穿过缺陷的旋转轴旋转材料，以散射角度测量散射光强度（Δt） 通过检测器到旋转轴线，确定测量的散射光强度对旋转轴线周围的旋转角度（＆phgr）的依赖性，并根据该依赖性来表征缺陷的尺寸和/或形状。 用于执行该方法的装置具有光源，用于透明材料的可旋转保持器，光敏接收装置和成像光学系统，用于在接收装置的检测器表面上将来自材料的散射光在一定角度范围内成像。

公开(公告)号：US08892586B2

公开(公告)日：2014-11-18

申请号：US13336962

申请日：2011-12-23

申请人： Christian Lemke ,  Tobias Mindnich ,  Christoph Weyerhaeuser ,  Franz Faerber ,  Kai-Uwe Sattler

发明人： Christian Lemke ,  Tobias Mindnich ,  Christoph Weyerhaeuser ,  Franz Faerber ,  Kai-Uwe Sattler

IPC分类号： G06F17/30

CPC分类号： G06F17/30483 ,  G06F17/30315

摘要： An additional data structure can be initialized for a column of compressed data to include a prefix storing, for each block of values in the column, a total number of bits set in previous blocks in the bit vector. A block number can be determined for a target block of the plurality of blocks, for example by checking whether or not a specified row number is located in the prefix. If the specified row number is located in the prefix, the prefix value of the prefix is returned, the most frequently occurring value is returned if a corresponding bit in the bit vector in the specified row number is not located in the prefix, or a position of the specified row in an index vector for the column is returned.

摘要翻译： 可以针对一列压缩数据初始化附加的数据结构，以包括为该列中的每个数据块存储在位向量中先前块中设置的总位数的前缀。 可以例如通过检查指定的行号是否位于前缀中来确定多个块的目标块的块号。 如果指定的行号位于前缀中，则返回前缀的前缀值，如果指定行号的位向量中的相应位不在前缀中，则返回最频繁出现的值，或者位置 返回列的索引向量中的指定行。

公开(公告)号：US20130166566A1

公开(公告)日：2013-06-27

申请号：US13336962

申请日：2011-12-23

申请人： Christian Lemke ,  Tobias Mindnich ,  Christoph Weyerhaeuser ,  Franz Faerber ,  Kai-Uwe Sattler

发明人： Christian Lemke ,  Tobias Mindnich ,  Christoph Weyerhaeuser ,  Franz Faerber ,  Kai-Uwe Sattler

IPC分类号： G06F17/30

CPC分类号： G06F17/30483 ,  G06F17/30315

摘要： An additional data structure can be initialized for a column of compressed data to include a prefix storing, for each block of values in the column, a total number of bits set in previous blocks in the bit vector. A block number can be determined for a target block of the plurality of blocks, for example by checking whether or not a specified row number is located in the prefix. If the specified row number is located in the prefix, the prefix value of the prefix is returned, the most frequently occurring value is returned if a corresponding bit in the bit vector in the specified row number is not located in the prefix, or a position of the specified row in an index vector for the column is returned.

摘要翻译： 可以针对一列压缩数据初始化附加的数据结构，以包括为该列中的每个数据块存储在位向量中先前块中设置的总位数的前缀。 可以例如通过检查指定的行号是否位于前缀中来确定多个块的目标块的块号。 如果指定的行号位于前缀中，则返回前缀的前缀值，如果指定行号的位向量中的相应位不在前缀中，则返回最频繁出现的值，或者位置 返回列的索引向量中的指定行。