公开(公告)号：US20140361165A1

公开(公告)日：2014-12-11

申请号：US14294772

申请日：2014-06-03

Applicant: FEI Company

Inventor： Bohuslav Sed'a ,  Lubomír Tùma ,  Petr Hlavenka ,  Petr Sytar

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/12

CPC classification number: H01J37/12 ,  H01J37/09 ,  H01J37/3005 ,  H01J2237/12 ,  H01J2237/20207

Abstract: The invention relates to a dual beam apparatus equipped with an ion beam column and an electron beam column having an electrostatic immersion lens. When tilting the sample, the electrostatic immersion field is distorted and the symmetry round the electron optical axis is lost. As a consequence tilting introduces detrimental effects such as traverse chromatic aberration and beam displacement. Also in-column detectors, detecting either secondary electrons or backscattered electrons in the non-tilted position of the sample, will, due to the loss of the symmetry of the immersion field, show a mix of these electrons when tilting the sample.The invention shows how, by biasing the stage with respect to the grounded electrodes closest to the sample, these disadvantages are eliminated, or at least reduced.

Abstract translation: 本发明涉及一种配备有离子束柱和具有静电浸没透镜的电子束柱的双光束装置。 当倾斜样品时，静电浸没场失真，并且电子光轴周围的对称性丧失。 因此，倾斜引入有害影响，例如横向色差和光束位移。 在样品的非倾斜位置检测二次电子或后向散射电子的柱内检测器也将由于浸没场的对称性的损失而在倾斜样品时显示这些电子的混合物。 本发明示出了如何通过相对于最接近样品的接地电极偏置级来消除或至少减少这些缺点。

公开(公告)号：US20140097341A1

公开(公告)日：2014-04-10

申请号：US13975809

申请日：2013-08-26

Applicant: FEI Company

Inventor： Lubomír Tuma ,  Petr Hlavenka ,  Petr Sytar ,  Radek Ceska ,  Bohuslav Sed'a

IPC: H01J37/244 ,  H01J37/26

CPC classification number: H01J37/26 ,  H01J37/145 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04926 ,  H01J2237/2443 ,  H01J2237/24465

Abstract: The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.

Abstract translation: 本发明涉及一种柱内反向散射电子检测器，该探测器放置在用于SEM的组合静电/磁性物镜中。 检测器形成为带电粒子敏感表面，优选地形成作为形成静电聚焦场的电极面之一的闪烁体盘。 在闪烁体中产生的光子被光子检测器（例如光电二极管或多像素光子检测器）检测。 物镜可以配备有用于检测保持靠近轴线的二次电子的另一电子检测器。 可以使用光导来在光子检测器和闪烁体之间提供电绝缘。

公开(公告)号：US20140070098A1

公开(公告)日：2014-03-13

申请号：US14021480

申请日：2013-09-09

Applicant: FEI Company

Inventor： Petr Sytar ,  Petr Hlavenka ,  Lubomir Tûma

IPC: H01J37/14

CPC classification number: H01J37/14 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/248

Abstract: The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis.By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.

Abstract translation: 本发明涉及一种用于扫描电子显微镜的复合物镜，其具有由第一透镜线圈激发的常规磁透镜，由第二透镜线圈激发的浸没磁透镜，以及由样品和 静电透镜电极。 对于透镜的预定激发，可以使用两个透镜线圈的激发的组合将电子束聚焦在样品上。 当检测器区分击穿靠近轴的检测器的BSE（202）和撞击检测器进一步从轴移除的BSE（204）之后，可以获得更多的BSE信息。 通过调整两个透镜线圈的激励的比率，可以改变从BSE撞击在检测器上的轴的距离，并且复合透镜可以用作能量选择性检测器。