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    HIGH ACCURACY BEAM PLACEMENT FOR LOCAL AREA NAVIGATION
    1.
    发明申请
    HIGH ACCURACY BEAM PLACEMENT FOR LOCAL AREA NAVIGATION 审中-公开
    用于当地区域导航的高精度光束放置

    公开(公告)号：US20150016677A1

    公开(公告)日：2015-01-15

    申请号：US14332193

    申请日：2014-07-15

    Applicant: FEI Company

    Inventor： Richard J. Young ,  Chad Rue ,  Peter D. Carleson ,  Reinier Louis Warschauer

    IPC: G06T7/00

    CPC classification number: G06T7/0004 ,  G06T7/73 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/31749 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. Preferred embodiments of the present invention can also be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan only a “strip” of cells on the one edge of the array (along either the X axis and the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically “count” the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.

    Abstract translation: 一种用于半导体芯片制造领域的局部导航的高精度光束放置的改进方法。 本发明的优选实施例也可用于快速导航到存储器阵列或类似结构中的一个单个位单元，例如用于表征或校正该单独位单元中的缺陷。 高分辨率扫描仅用于扫描阵列一个边缘上的“条带”（沿着X轴和Y轴），以定位包含所需单元格的行，然后进行类似的高速扫描 定位的行（在剩余的方向），直到达到所需的单元格位置。 这允许使用模式识别工具来自动“计数”导航到所需单元格所需的单元格，而无需大量花费整个阵列成像所需的时间。

    High accuracy beam placement for local area navigation
    2.
    发明授权
    High accuracy beam placement for local area navigation 有权
    用于局部导航的高精度光束放置

    公开(公告)号：US09087366B2

    公开(公告)日：2015-07-21

    申请号：US14332193

    申请日：2014-07-15

    Applicant: FEI Company

    Inventor： Richard J. Young ,  Chad Rue ,  Peter D. Carleson ,  Reinier Louis Warschauer

    IPC: G06K9/00 ,  G06T7/00 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01L21/66

    CPC classification number: G06T7/0004 ,  G06T7/73 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/31749 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. Preferred embodiments of the present invention can also be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan only a “strip” of cells on the one edge of the array (along either the X axis or the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically “count” the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.

    Abstract translation: 一种用于半导体芯片制造领域的局部导航的高精度光束放置的改进方法。 本发明的优选实施例也可用于快速导航到存储器阵列或类似结构中的一个单个位单元，例如用于表征或校正该单独位单元中的缺陷。 高分辨率扫描仅用于扫描阵列的一个边缘（沿着X轴或Y轴）的单元格的“条带”，以便定位包含所需单元格的行，然后进行类似的高速扫描 定位的行（在剩余的方向），直到达到所需的单元格位置。 这允许使用模式识别工具来自动“计数”导航到所需单元格所需的单元格，而无需大量花费整个阵列成像所需的时间。

    Using images from secondary microscope detectors to automatically generate labeled images from primary microscope detectors
    3.
    发明授权
    Using images from secondary microscope detectors to automatically generate labeled images from primary microscope detectors 有权

    公开(公告)号：US10714309B1

    公开(公告)日：2020-07-14

    申请号：US16375537

    申请日：2019-04-04

    Applicant: FEI Company

    Inventor： Reinier Louis Warschauer

    IPC: H01J37/28 ,  H01J37/22 ,  H01J37/244 ,  H01J37/26

    Abstract: Methods and systems for generating labeled images from a microscope detector by leveraging detector data from a different microscope detector of a different modality include applying a focused charged beam to a sample, using a first microscope detector to detect emissions resultant from the focused charged beam being incident on the sample, and then using detector data from the first microscope detector to automatically generate a first labeled image. Automatically generating the first labeled image includes determining composition information about portions of the sample based on the detector data, and then automatically labeling regions of the first image associated with the portions of the sample with corresponding composition information. A second image of the sample is generated using detector data from a second microscope detector system of a different modality, and then the first labeled image is used to automatically label regions of the second image with corresponding composition information.

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