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公开(公告)号：US20160096734A2
公开(公告)日：2016-04-07
申请号：US14560919
申请日：2014-12-04
摘要： A freestanding thin film of nano-crystalline graphite is described, as well as a method of producing a freestanding thin film of nano-crystalline graphite including: providing a freestanding thin film of amorphous carbon, heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. The films can be used, for example, as phase plates in a Transmission Electron Microscope.
摘要翻译： 描述了独立的纳米晶体石墨薄膜，以及制造纳米晶体石墨的独立薄膜的方法，包括：提供独立的无定形碳薄膜，将独立的薄膜加热到高温下 惰性气氛或真空中; 并且允许独立的薄膜冷却，由此形成独立的纳米晶体石墨薄膜。 这些膜可以用作例如透射电子显微镜中的相位板。
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公开(公告)号：US20150243474A1
公开(公告)日：2015-08-27
申请号：US14629387
申请日：2015-02-23
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch , Faysal Boughorbel , Bart Buijsse , Kasim Sader , Sorin Lazar
IPC分类号： H01J37/244 , H01J37/26 , H01J37/28
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.
摘要翻译： 在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。
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公开(公告)号：US09312098B2
公开(公告)日：2016-04-12
申请号：US14629387
申请日：2015-02-23
申请人： FEI Company
发明人： Ivan Lazic , Eric Gerardus Theodoor Bosch , Faysal Boughorbel , Bart Buijsse , Kasim Sader , Sorin Lazar
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.
摘要翻译： 在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。
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公开(公告)号：US09908778B2
公开(公告)日：2018-03-06
申请号：US14560919
申请日：2014-12-04
摘要： A freestanding thin film of nano-crystalline graphite is described, as well as a method of producing a freestanding thin film of nano-crystalline graphite including: providing a freestanding thin film of amorphous carbon, heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. The films can be used, for example, as phase plates in a Transmission Electron Microscope.
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5.发明申请公开(公告)号：US20150151972A1
公开(公告)日：2015-06-04
申请号：US14560919
申请日：2014-12-04
申请人： FEI Company
摘要： A freestanding thin film of nano-crystalline graphite is described, as well as a method of producing a freestanding thin film of nano-crystalline graphite including: providing a freestanding thin film of amorphous carbon, heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. The films can be used, for example, as phase plates in a Transmission Electron Microscope.
摘要翻译： 描述了独立的纳米晶体石墨薄膜，以及制造纳米晶体石墨的独立薄膜的方法，包括：提供独立的无定形碳薄膜，将独立的薄膜加热到高温下 惰性气氛或真空中; 并且允许独立的薄膜冷却，由此形成独立的纳米晶体石墨薄膜。 这些膜可以用作例如透射电子显微镜中的相位板。
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