公开(公告)号：US09863978B2

公开(公告)日：2018-01-09

申请号：US14786770

申请日：2014-03-25

Applicant: FEINMETALL GMBH

Inventor： Gunther Böhm ,  Georg Steidle ,  Wolfgang Schäfer ,  Achim Weiland

IPC: G01R1/073 ,  G01R31/28 ,  H01R12/71 ,  H01R12/91

CPC classification number: G01R1/07357 ,  G01R31/2889 ,  H01R12/714 ,  H01R12/91

Abstract: An electrical contacting device for electrical physical contact with a specimen, particularly wafers, taking place in a contacting direction, with at least one conductor substrate which can be electrically connected to a testing device, at least one contact distance transformer and at least one contact head having electrical contact elements, particularly resilient contact elements, preferably serving to compensate different physical contact distances existing in the contacting direction particularly at the contact elements.