Homogeneous linear evaporation source

    公开(公告)号:US10982319B2

    公开(公告)日:2021-04-20

    申请号:US15753462

    申请日:2016-08-19

    申请人: FLISOM AG

    IPC分类号: C23C14/24 C23C14/26

    摘要: Embodiments of the present disclosure generally relate to evaporation sources used for physical vapor deposition of material onto substrates and more particularly for controlled coating of large substrates, such as vacuum deposition of copper, indium, gallium, selenium, tellurium, cadmium, or zinc on flexible substrates. Embodiments disclosed herein are able to control the evaporation rate of the source material during processing so as to obtain a uniform deposition across the width of the substrate as the complete length of a roll-to-roll substrate is moved past the evaporation source during processing.

    THIN-FILM PHOTOVOLTAIC DEVICE WITH WAVY MONOLITHIC INTERCONNECTS
    3.
    发明申请
    THIN-FILM PHOTOVOLTAIC DEVICE WITH WAVY MONOLITHIC INTERCONNECTS 有权
    具有波形单片互连的薄膜光电器件

    公开(公告)号:US20150214409A1

    公开(公告)日:2015-07-30

    申请号:US14388022

    申请日:2013-03-27

    申请人: FLISOM AG

    IPC分类号: H01L31/05 G06F17/50 H01L31/02

    摘要: A thin-film optoelectronic module device (100) and design method comprising at least three monolithically-interconnected cells (104, 106, 108) where at least one monolithically-interconnecting line (250) depicts a spatial periodic or quasi-periodic wave and wherein the optoelectronic surface of said thin-film optoelectronic module device (100) presents at least one set of at least three zones (210, 220, 230) having curves of substantially parallel monolithic interconnect lines. Border zones (210, 230) have a lower front-contact sheet resistivity than th at of internal zone (220). Said curves of substantially parallel interconnecting lines may comprise peaks of triangular or rounded shape, additional spatial periods that are smaller than a baseline period, and mappings from one curve to the adjacent curve such as in the case of non-rectangular module devices (100). The device (100) and design method are advantageous to reduce costs and materials to manufacture thin-film optoelectronic module devices (100) while increasing production yield, reliability, aesthetic appearance, and range of applications.

    摘要翻译: 一种薄膜光电子模块器件(100)和包括至少三个单片互连的单元(104,106,108)的设计方法,其中至少一个单片互连线(250)描绘空间周期性或准周期波,并且其中 所述薄膜光电子模块装置(100)的光电子表面呈现具有基本上平行的单片互连线的曲线的至少一组至少三个区域(210,220,230)。 边界区域(210,230)的前接触片电阻率低于内部区域(220)的电阻率。 基本上平行的互连线的所述曲线可以包括三角形或圆形形状的峰值,小于基线周期的附加空间周期以及从一条曲线到相邻曲线的映射,例如在非矩形模块装置(100)的情况下, 。 设备(100)和设计方法有利于降低制造薄膜光电子模块设备(100)的成本和材料,同时提高产量,可靠性,美学外观和应用范围。

    Thin-film photovoltaic device with wavy monolithic interconnects

    公开(公告)号:US10211357B2

    公开(公告)日:2019-02-19

    申请号:US15887595

    申请日:2018-02-02

    申请人: FLISOM AG

    摘要: A thin-film optoelectronic module device (100) and design method comprising at least three monolithically-interconnected cells (104, 106, 108) where at least one monolithically-interconnecting line (250) depicts a spatial periodic or quasi-periodic wave and wherein the optoelectronic surface of said thin-film optoelectronic module device (100) presents at least one set of at least three zones (210, 220, 230) having curves of substantially parallel monolithic interconnect lines. Border zones (210, 230) have a lower front-contact sheet resistance than that of internal zone (220). Said curves of substantially parallel interconnecting lines may comprise peaks of triangular or rounded shape, additional spatial periods that are smaller than a baseline period, and mappings from one curve to the adjacent curve such as in the case of non-rectangular module devices (100). The device (100) and design method are advantageous to reduce costs and materials to manufacture thin-film optoelectronic module devices (100) while increasing production yield, reliability, aesthetic appearance, and range of applications.