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公开(公告)号:US09958775B2
公开(公告)日:2018-05-01
申请号:US14560650
申请日:2014-12-04
Applicant: FUJIFILM Corporation
Inventor: Takuya Tsuruta , Tomotaka Tsuchimura , Tadeteru Yatsuo
IPC: G03F7/004 , G03F7/039 , G03F7/038 , G03F7/20 , G03F7/32 , C07D333/46 , C07D327/08 , C07C309/65 , C07C381/12
CPC classification number: G03F7/0045 , C07C309/65 , C07C381/12 , C07C2601/14 , C07D327/08 , C07D333/46 , G03F7/0046 , G03F7/038 , G03F7/0382 , G03F7/0397 , G03F7/2037 , G03F7/325
Abstract: An actinic ray-sensitive or radiation-sensitive resin composition includes; a compound (A) which generates an acid by irradiation with actinic rays or radiation, wherein the acid is linked with a group represented by the following general formula (M) through covalent bonding. In the formula, Y1 and Y2 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group, or an acyl group. Z represents a hydrogen atom or a substituent. * represents a linking site with a residue of the compound (A)