ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

    公开(公告)号:US20230259029A1

    公开(公告)日:2023-08-17

    申请号:US18191597

    申请日:2023-03-28

    CPC classification number: G03F7/0397

    Abstract: An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition having an excellent resolution. In addition, another object of the present invention is to provide a resist film, a pattern forming method, and a method for manufacturing an electronic device, each relating to the actinic ray-sensitive or radiation-sensitive resin composition.
    The actinic ray-sensitive or radiation-sensitive resin composition of the embodiment of the present invention includes:



    a resin of which polarity increases through decomposition by the action of an acid; and
    a compound that generates an acid upon irradiation with actinic rays or radiation,
    in which the resin includes a resin including a repeating unit X1 having two or more groups of which polarity increases through decomposition by the action of an acid and a repeating unit X2 having a phenolic hydroxyl group.

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