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9 条记录 (耗时 0.015 秒)

    Gas supply system
    1.
    发明授权
    Gas supply system 有权

    公开(公告)号：US11073215B2

    公开(公告)日：2021-07-27

    申请号：US16618912

    申请日：2018-06-06

    申请人： FUJIKIN INCORPORATED

    发明人： Takeru Miura ,  Tomohiro Nakata ,  Toshiyuki Inada ,  Kazunari Watanabe ,  Kenta Kondo ,  Hidenobu Sato

    IPC分类号： F16K7/16 ,  F16K31/50 ,  H01L21/31

    摘要： A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

    Handwheel cap
    5.
    发明授权
    Handwheel cap 有权

    公开(公告)号：US09951882B2

    公开(公告)日：2018-04-24

    申请号：US15112845

    申请日：2015-02-06

    申请人： Fujikin Incorporated

    发明人： Yusuke Iwanaga ,  Hidenobu Sato ,  Takahiro Matsuda

    IPC分类号： F16K35/02 ,  F16K31/60 ,  F16K35/04 ,  F16K7/00

    CPC分类号： F16K35/02 ,  F16K7/00 ,  F16K31/60 ,  F16K35/04

    摘要： Provided is a cap for a handwheel that opens and closes a valve, capable of being readily attached to the handwheel without requiring a large space around the handwheel. The cap has easily switchable two working modes: One is a co-rotation mode where the cap is capable of rotating with the handwheel and the other is an independent rotation mode where the cap is capable of rotating independently of the handwheel. The cap has an internal casing to be securely fitted to the handwheel; an external casing being rotatable around its axis and having the internal casing in an interior thereof; a clutch for connecting the external casing with the internal casing and for disconnecting the former from the latter; and a maintaining member for keeping the external casing rotatable independently of the internal casing when they are disconnected by the clutch.

    Valve device, method for replacing valve body unit of valve device, and valve device assembly method
    7.
    发明授权
    Valve device, method for replacing valve body unit of valve device, and valve device assembly method 有权

    公开(公告)号：US11506294B2

    公开(公告)日：2022-11-22

    申请号：US17213882

    申请日：2021-03-26

    申请人： FUJIKIN INCORPORATED

    发明人： Hidenobu Sato ,  Kenta Kondo ,  Tomohiro Nakata ,  Masahiko Nakazawa ,  Nobuo Nakamura ,  Tomoko Yuhara

    IPC分类号： F16K7/16 ,  F16K1/04 ,  F16K43/00

    摘要： A valve body unit is configured to be disengaged from a stem by moving the stem and the valve body unit to a valve seat side in a state where a bonnet is separated from the valve seat, thereby pushing a replacement ring such that the replacement ring moves through the bonnet while decreasing in diameter and then drops down onto a ring dropping portion in the free state, then moving the stem, the valve body unit, and the replacement ring to an opposite side to the valve seat side such that a first surface comes into contact with a second surface and the ring dropping portion comes into contact with the replacement ring, and in this state, moving only the stem to the opposite side to the valve seat side such that the connection formed by a connecting mechanism between the stem connection portion and the stem is released.

    Valve device
    8.
    发明授权
    Valve device 有权

    公开(公告)号：US11306830B2

    公开(公告)日：2022-04-19

    申请号：US17262984

    申请日：2019-05-31

    申请人： FUJIKIN INCORPORATED

    发明人： Kenta Kondo ,  Tsutomu Shinohara ,  Tomohiro Nakata ,  Hidenobu Sato

    IPC分类号： F16K7/16 ,  F16K25/00 ,  F16K11/02

    摘要： A valve device includes a valve body; a valve seat; an inner disk made of a metal alloy having an inner annular portion, outer annular portion and a connecting portion that connects the inner annular portion and the outer annular portion; a diaphragm made of a metal alloy covering the inner disk and the valve seat and moving between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat to enable and shuts off communication between the first flow path and the second flow paths; and a presser adapter that presses a peripheral edge portion of the diaphragm toward the outer annular portion; and the inner disk has a hardness higher than the valve seat and lower than both the valve body and the diaphragm.