公开(公告)号：US20220197316A1

公开(公告)日：2022-06-23

申请号：US17605948

申请日：2020-04-16

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Keisuke IDEGUCHI ,  Shinya OGAWA ,  Katsuyuki SUGITA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Hiroyuki ITO

IPC: G05D7/06 ,  G01L13/06

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

公开(公告)号：US20240160230A1

公开(公告)日：2024-05-16

申请号：US18418644

申请日：2024-01-22

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Keisuke IDEGUCHI ,  Shinya OGAWA ,  Katsuyuki SUGITA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Hiroyuki ITO

IPC: G05D7/06 ,  G01F1/36 ,  G01F15/00 ,  G01L13/06 ,  G01L19/08

CPC classification number: G05D7/0635 ,  G01F1/363 ,  G01F15/005 ,  G01L13/06 ,  G01L19/08 ,  Y10T137/7761

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.