公开(公告)号：US20130140976A1

公开(公告)日：2013-06-06

申请号：US13758450

申请日：2013-02-04

Applicant: FUJIKURA LTD.

Inventor： Satoshi YAMAMOTO ,  Tatsuo SUEMASU

IPC: B05D3/06 ,  B05D3/10

CPC classification number: B05D3/06 ,  B01L3/502707 ,  B01L3/502715 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0851 ,  B01L2300/0877 ,  B01L2300/168 ,  B01L2400/086 ,  B05D3/10 ,  B81B2201/058 ,  B81B2203/033 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C1/00063 ,  B81C1/00515 ,  B81C2201/0143 ,  G01N21/554 ,  G01N21/6452 ,  G01N21/648

Abstract: A method of manufacturing a microfluidic chip includes: irradiating, with a laser light, an area to be provided with a valley for storing a fluid on a surface of a substrate so as to form a modified region having a periodic pattern formed in a self-organizing manner in a light-collecting area of the laser light, the laser light having a pulse width for which the pulse duration is on the order of picoseconds or less; carrying out an etching treatment on the substrate in which the modified region is formed, removing at least some of the modified portion so as to provide the valley, and forming a periodic structure having a plurality of groove portions along one direction which have a surface profile based on the periodic pattern on at least a bottom surface of the valley; and forming a metal layer that covers the periodic structure of the bottom surface.

Abstract translation: 一种微流体芯片的制造方法，其特征在于，具备：激光照射在基板表面上设置有用于存储流体的谷部的区域，形成具有形成于所述自流体的周期性图案的改质区域， 在激光的聚光区域中组织的方式，具有脉冲宽度大约为皮秒或更小的脉冲宽度的激光; 对其中形成有改质区域的基板进行蚀刻处理，除去至少一部分改性部分以提供谷部，并形成沿着一个方向具有多个凹槽部分的周期性结构，其具有表面轮廓 基于谷的至少底表面上的周期性图案; 并形成覆盖底面的周期性结构的金属层。

公开(公告)号：US20190327829A1

公开(公告)日：2019-10-24

申请号：US16310659

申请日：2017-02-06

Applicant: FUJIKURA LTD.

Inventor： Shingo OGURA ,  Tatsuo SUEMASU ,  Hiroyuki HIRANO ,  Masaaki ISHI

IPC: H05K1/02 ,  H05K1/09 ,  H05K3/20 ,  H05K1/03

Abstract: A stretchable board includes: a substrate having a stretching property; and a conductor portion provided on the substrate, wherein the conductor portion comprises: conductor wires intersecting with each other; and an opening surrounded by the conductor wires.