公开(公告)号：US20200243477A1

公开(公告)日：2020-07-30

申请号：US16849564

申请日：2020-04-15

Applicant: FURUKAWA ELECTRIC CO., LTD.

Inventor： Teruyuki NAKAMURA ,  Akira SEKINO ,  Hidehiro TANIGUCHI

IPC: H01L23/00 ,  H01S5/10 ,  H01S5/022

Abstract: A die bonding apparatus includes: a mounting base including a mounting area on which a first member is mounted; a heater arranged below the mounting base; a side wall configured to surround the mounting area; a collet configured to hold a second member by vacuum-chucking at an end portion; a lid including a hole, the lid being mounted on the side wall; a moving structure configured to move the collet to transport the second member held by the collet through the hole for bonding the second member to the first member; and a gas-supplying tube arranged on the side wall and configured to supply a heating gas to a heating space formed by the side wall and the lid. The lid contains a material capable of: reflecting an infrared radiation caused by the heater and the heating gas; or absorbing and re-radiating the infrared radiation.

公开(公告)号：US20170365578A1

公开(公告)日：2017-12-21

申请号：US15631541

申请日：2017-06-23

Applicant: FURUKAWA ELECTRIC CO., LTD.

Inventor： Teruyuki NAKAMURA ,  Akira SEKINO ,  Hidehiro TANIGUCHI

IPC: H01L23/00 ,  H01S5/10 ,  H01S5/022

CPC classification number: H01L24/75 ,  H01L24/29 ,  H01L24/32 ,  H01L24/83 ,  H01L2224/29111 ,  H01L2224/29144 ,  H01L2224/751 ,  H01L2224/7525 ,  H01L2224/75251 ,  H01L2224/75272 ,  H01L2224/75281 ,  H01L2224/75283 ,  H01L2224/7565 ,  H01L2224/75744 ,  H01L2224/75745 ,  H01L2224/75756 ,  H01L2224/75804 ,  H01L2224/75824 ,  H01L2224/83048 ,  H01L2224/83055 ,  H01L2224/83065 ,  H01L2224/83075 ,  H01L2224/83192 ,  H01L2224/8321 ,  H01L2224/8322 ,  H01L2224/8323 ,  H01L2224/83411 ,  H01L2224/83444 ,  H01L2224/83815 ,  H01L2924/1011 ,  H01L2924/12042 ,  H01S5/02256 ,  H01S5/1039 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/0105 ,  H01L2924/00012

Abstract: A die bonding apparatus includes: a mounting base including a mounting area on which a first member is mounted; a heater arranged below the mounting base; a side wall configured to surround the mounting area; a collet configured to hold a second member by vacuum-chucking at an end portion; a lid including a hole, the lid being mounted on the side wall; a moving structure configured to move the collet to transport the second member held by the collet through the hole for bonding the second member to the first member; and a gas-supplying tube arranged on the side wall and configured to supply a heating gas to a heating space formed by the side wall and the lid. The lid contains a material capable of: reflecting an infrared radiation caused by the heater and the heating gas; or absorbing and re-radiating the infrared radiation.