公开(公告)号：US06315512B1

公开(公告)日：2001-11-13

申请号：US09200660

申请日：1998-11-25

申请人： Farzad Tabrizi ,  Barry Kitazumi ,  David A. Barker ,  David A. Setton ,  Leszek Niewmierzycki ,  Michael J. Kuhlman

发明人： Farzad Tabrizi ,  Barry Kitazumi ,  David A. Barker ,  David A. Setton ,  Leszek Niewmierzycki ,  Michael J. Kuhlman

IPC分类号： B65G4907

CPC分类号： H01L21/67196 ,  H01L21/67126 ,  H01L21/67178 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67754 ,  H01L21/67781 ,  Y10S414/135 ,  Y10S414/139

摘要： A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding envirornment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing. Additional process chambers may be added to the transport chamber to further increase throughput. Each stage of the workpiece handling system may also be designed to handle multiple workpieces, such as two side by side workpieces. Throughput is increased while allowing shared machinery to be used. Linear and rotational doors may be used for the load locks to provide a simple, compact design.

摘要翻译： 具有双重加载锁的工件处理系统，运输室和处理室。 工件可以从一个装载锁中取出，以在真空压力下进行处理，而工件在周围环境的压力下从另一个装载锁卸载。 运输室具有两臂的运输机器人。 加工的工件和新的工件可以通过两个机器人臂的简单的不足/过运动来交换。 运输机器人围绕中心轴旋转以与负载锁或处理室对准。 机器人也可以被升高或降低以将臂与所要求的工件的沉积位置对齐，或者从哪个工件被取回。 两个加载锁定可以一个位于另一个之上，使得机器人的简单的垂直运动可以用于在两个加载锁之间进行选择。 两个加载锁和运输机器人允许几乎连续的处理。 可以将另外的处理室添加到传送室中以进一步提高生产量。 工件处理系统的每个阶段也可以设计成处理多个工件，例如两个并排工件。 吞吐量增加，同时允许使用共享机器。 线性和旋转门可用于装载锁，以提供简单，紧凑的设计。

公开(公告)号：US06647665B1

公开(公告)日：2003-11-18

申请号：US09651453

申请日：2000-08-30

申请人： Farzad Tabrizi ,  Barry Kitazumi ,  David A. Barker ,  David A. Setton ,  Leszek Niewmierzycki ,  Michael J. Kuhlman

发明人： Farzad Tabrizi ,  Barry Kitazumi ,  David A. Barker ,  David A. Setton ,  Leszek Niewmierzycki ,  Michael J. Kuhlman

IPC分类号： E05F1124

CPC分类号： H01L21/67196 ,  H01L21/67126 ,  H01L21/67178 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67754 ,  H01L21/67781 ,  Y10S414/135 ,  Y10S414/139

摘要： A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing. Additional process chambers may be added to the transport chamber to further increase throughput. Each stage of the workpiece handling system may also be designed to handle multiple workpieces, such as two side by side workpieces. Throughput is increased while allowing shared machinery to be used. Linear and rotational doors may be used for the load locks to provide a simple, compact design.

摘要翻译： 具有双重加载锁的工件处理系统，运输室和处理室。 可以从一个装载锁中取出工件，以在真空压力下进行处理，同时工件在周围环境的压力下从另一个装载锁卸载。 运输室具有两臂的运输机器人。 加工的工件和新的工件可以通过两个机器人臂的简单的不足/过运动来交换。 运输机器人围绕中心轴旋转以与负载锁或处理室对准。 机器人也可以被升高或降低以将臂与所要求的工件的沉积位置对齐，或者从哪个工件被取回。 两个加载锁定可以一个位于另一个之上，使得机器人的简单的垂直运动可以用于在两个加载锁之间进行选择。 两个加载锁和运输机器人允许几乎连续的处理。 可以将另外的处理室添加到传送室中以进一步提高生产量。 工件处理系统的每个阶段也可以设计成处理多个工件，例如两个并排工件。 吞吐量增加，同时允许使用共享机器。 线性和旋转门可用于装载锁，以提供简单，紧凑的设计。

公开(公告)号：US06568552B1

公开(公告)日：2003-05-27

申请号：US09651512

申请日：2000-08-30

申请人： Farzad Tabrizi ,  Barry Kitazumi ,  David A. Barker ,  David A. Setton ,  Leszek Niewmierzycki ,  Michael J. Kuhlman

发明人： Farzad Tabrizi ,  Barry Kitazumi ,  David A. Barker ,  David A. Setton ,  Leszek Niewmierzycki ,  Michael J. Kuhlman

IPC分类号： B65D4102

CPC分类号： H01L21/67196 ,  H01L21/67126 ,  H01L21/67178 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/67754 ,  H01L21/67781 ,  Y10S414/135 ,  Y10S414/139

摘要： A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing. Additional process chambers may be added to the transport chamber to further increase throughput. Each stage of the workpiece handling system may also be designed to handle multiple workpieces, such as two side by side workpieces. Throughput is increased while allowing shared machinery to be used. Linear and rotational doors may be used for the load locks to provide a simple, compact design.

摘要翻译： 具有双重加载锁的工件处理系统，运输室和处理室。 可以从一个装载锁中取出工件，以在真空压力下进行处理，同时工件在周围环境的压力下从另一个装载锁卸载。 运输室具有两臂的运输机器人。 加工的工件和新的工件可以通过两个机器人臂的简单的不足/过运动来交换。 运输机器人围绕中心轴旋转以与负载锁或处理室对准。 机器人也可以被升高或降低以将臂与所要求的工件的沉积位置对齐，或者从哪个工件被取回。 两个加载锁定可以一个位于另一个之上，使得机器人的简单的垂直运动可以用于在两个加载锁之间进行选择。 两个加载锁和运输机器人允许几乎连续的处理。 可以将另外的处理室添加到传送室中以进一步提高生产量。 工件处理系统的每个阶段也可以设计成处理多个工件，例如两个并排工件。 吞吐量增加，同时允许使用共享机器。 线性和旋转门可用于装载锁，以提供简单，紧凑的设计。

公开(公告)号：US20090082895A1

公开(公告)日：2009-03-26

申请号：US11859752

申请日：2007-09-22

申请人： David Barker ,  Robert Thomas LoBianco ,  Sai Mantripragada ,  Farzad Tabrizi

发明人： David Barker ,  Robert Thomas LoBianco ,  Sai Mantripragada ,  Farzad Tabrizi

IPC分类号： H01L21/677 ,  B25J13/00 ,  B25J15/00 ,  G06F19/00

CPC分类号： H01L21/67742 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/681

摘要： An integrated high speed robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly typically comprises an end effector for moving the object in and out of a chamber, a rotation chuck incorporated on the robot body to provide centering and theta alignment capability, and an optional identification subsystem for identifying the object during transport. The present invention also discloses a transfer robot system, employing a plurality of integrated robot assemblies; a transfer system where a transfer robot system can service a plurality of connected chambers such as FOUP or FOSB; a front end module (FEM); or a sorter system. Through the use of these incorporated capabilities into the moving robot, single object transfer operations can exceed 500 parts per hour.

摘要翻译： 公开了一种集成的高速机器人机构，用于改善运输设备，将物体运动与诸如对准或识别的其它功能相结合。 所公开的集成机器人组件通常包括用于将物体移入和移出室的端部执行器，结合在机器人主体上以提供定心和θ对准能力的旋转卡盘，以及用于在运输期间识别物体的可选标识子系统。 本发明还公开了一种采用多个集成的机器人组件的传送机器人系统; 传送系统，其中传送机器人系统可以服务于诸如FOUP或FOSB的多个连接的室; 前端模块（FEM）; 或分拣机系统。 通过将这些结合的能力应用于移动机器人，单个物体传送操作可以超过500个小时。

公开(公告)号：US20130028691A1

公开(公告)日：2013-01-31

申请号：US13632229

申请日：2012-10-01

申请人： Farzad Tabrizi ,  David Barker

发明人： Farzad Tabrizi ,  David Barker

IPC分类号： H01L21/677

CPC分类号： H01L21/67781 ,  H01L21/67294 ,  H01L21/67754

摘要： An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system.

公开(公告)号：US08277165B2

公开(公告)日：2012-10-02

申请号：US11859755

申请日：2007-09-22

申请人： Farzad Tabrizi ,  David Barker

发明人： Farzad Tabrizi ,  David Barker

IPC分类号： B25J15/00

CPC分类号： H01L21/67781 ,  H01L21/67294 ,  H01L21/67754

摘要： An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system.

摘要翻译： 公开了一种用于改进运输设备的集成机器人机构，将物体运动与诸如对准或识别的其他功能相结合。 所公开的集成机器人组件可以包括用于移动多个工件的多端部执行器，用于移动单个工件的单个端部执行器，结合在机器人主体上的旋转卡盘以提供对准能力，以及用于识别物体的可选的识别子系统 在运输过程中。 本发明的机器人组件可用于分拣机或储料机设备，加工设备和传送系统中。

公开(公告)号：US07976263B2

公开(公告)日：2011-07-12

申请号：US11859752

申请日：2007-09-22

申请人： David Barker ,  Robert T. LoBianco ,  Sai Mantripragada ,  Farzad Tabrizi

发明人： David Barker ,  Robert T. LoBianco ,  Sai Mantripragada ,  Farzad Tabrizi

IPC分类号： B25J15/10 ,  F26B3/08

CPC分类号： H01L21/67742 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/681

摘要： An integrated high speed robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly typically comprises an end effector for moving the object in and out of a chamber, a rotation chuck incorporated on the robot body to provide centering and theta alignment capability, and an optional identification subsystem for identifying the object during transport. The present invention also discloses a transfer robot system, employing a plurality of integrated robot assemblies; a transfer system where a transfer robot system can service a plurality of connected chambers such as FOUP or FOSB; a front end module (FEM); or a sorter system. Through the use of these incorporated capabilities into the moving robot, single object transfer operations can exceed 500 parts per hour.

摘要翻译： 公开了一种集成的高速机器人机构，用于改善运输设备，将物体运动与诸如对准或识别的其他功能相结合。 所公开的集成机器人组件通常包括用于将物体移入和移出室的端部执行器，结合在机器人主体上以提供定心和θ对准能力的旋转卡盘，以及用于在运输期间识别物体的可选标识子系统。 本发明还公开了一种采用多个集成的机器人组件的传送机器人系统; 传送系统，其中传送机器人系统可以服务于诸如FOUP或FOSB的多个连接的室; 前端模块（FEM）; 或分拣机系统。 通过将这些结合的能力应用于移动机器人，单个物体传送操作可以超过500个小时。