公开(公告)号：US11131709B2

公开(公告)日：2021-09-28

申请号：US17021288

申请日：2020-09-15

Applicant: FormFactor, Inc.

Inventor： Joseph George Frankel ,  Kazuki Negishi ,  Michael E. Simmons ,  Eric Robert Christenson ,  Daniel Rishavy

IPC: G01R31/28 ,  G01R1/067

Abstract: Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.