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    Probe systems and methods for characterizing optical coupling between an optical probe of a probe system and a calibration structure
    1.
    发明授权
    Probe systems and methods for characterizing optical coupling between an optical probe of a probe system and a calibration structure 有权

    公开(公告)号：US11313936B2

    公开(公告)日：2022-04-26

    申请号：US17028102

    申请日：2020-09-22

    Applicant: FormFactor, Inc.

    Inventor： Joseph George Frankel ,  Kazuki Negishi

    IPC: G01R35/00 ,  G01R31/308 ,  G01R1/067 ,  G01R31/28

    Abstract: Probe systems and methods of characterizing optical coupling between an optical probe of a probe system and a calibration structure. The probe systems include a probe assembly that includes an optical probe, a support surface configured to support a substrate, and a signal generation and analysis assembly configured to generate an optical signal and to provide the optical signal to the optical device via the optical probe. The probe systems also include an electrically actuated positioning assembly, a calibration structure configured to receive the optical signal, and an optical detector configured to detect a signal intensity of the optical signal. The probe systems further include a controller programmed to control the probe system to generate a representation of signal intensity as a function of the relative orientation between the optical probe and the calibration structure. The methods include methods of operating the probe systems.

    Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes
    2.
    发明授权
    Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes 有权

    公开(公告)号：US11927603B2

    公开(公告)日：2024-03-12

    申请号：US17954093

    申请日：2022-09-27

    Applicant: FormFactor, Inc.

    Inventor： Quan Yuan ,  Joseph George Frankel

    IPC: G01R1/067

    CPC classification number: G01R1/06794 ,  G01R1/06738

    Abstract: Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes. The probes include the retroreflector, which is defined by a retroreflector body. The retroreflector body includes a first side, an opposed second side, a tapered region that extends from the first side, and a light-receiving region that is defined on the second side. The probes also include a probe tip, which is configured to provide a test signal to a device under test (DUT) and/or to receive a resultant signal from the DUT. The retroreflector is configured to receive light, via the light-receiving region, at a light angle of incidence. The retroreflector also is configured to emit at least an emitted fraction of the light, from the retroreflector body and via the light-receiving region, at a light angle of emission that is at least substantially equal to the light angle of incidence.

    PROBES THAT DEFINE RETROREFLECTORS, PROBE SYSTEMS THAT INCLUDE THE PROBES, AND METHODS OF UTILIZING THE PROBES
    3.
    发明申请
    PROBES THAT DEFINE RETROREFLECTORS, PROBE SYSTEMS THAT INCLUDE THE PROBES, AND METHODS OF UTILIZING THE PROBES 有权

    公开(公告)号：US20230117566A1

    公开(公告)日：2023-04-20

    申请号：US17954093

    申请日：2022-09-27

    Applicant: FormFactor, Inc.

    Inventor： Quan Yuan ,  Joseph George Frankel

    IPC: G01R1/067

    Abstract: Probes that define retroreflectors, probe systems that include the probes, and methods of utilizing the probes. The probes include the retroreflector, which is defined by a retroreflector body. The retroreflector body includes a first side, an opposed second side, a tapered region that extends from the first side, and a light-receiving region that is defined on the second side. The probes also include a probe tip, which is configured to provide a test signal to a device under test (DUT) and/or to receive a resultant signal from the DUT. The retroreflector is configured to receive light, via the light-receiving region, at a light angle of incidence. The retroreflector also is configured to emit at least an emitted fraction of the light, from the retroreflector body and via the light-receiving region, at a light angle of emission that is at least substantially equal to the light angle of incidence.

    Methods for maintaining gap spacing between an optical probe of a probe system and an optical device of a device under test, and probe systems that perform the methods
    5.
    发明授权
    Methods for maintaining gap spacing between an optical probe of a probe system and an optical device of a device under test, and probe systems that perform the methods 有权

    公开(公告)号：US11204383B2

    公开(公告)日：2021-12-21

    申请号：US16914913

    申请日：2020-06-29

    Applicant: FormFactor, Inc.

    Inventor： Joseph George Frankel

    IPC: G01R31/28 ,  G01R1/067

    Abstract: Methods for maintaining gap spacing between an optical probe of a probe system and an optical device of a device under test and probe systems that perform the methods. The methods include determining a desired relative orientation between the optical probe and the DUT and optically testing the optical device with the optical probe. The methods also include maintaining the desired relative orientation during the optically testing. The maintaining includes repeatedly and sequentially collecting an existing DUT image of a DUT reference structure of the DUT and an existing probe image of a probe reference structure of the optical probe, determining a probe-DUT offset between an existing relative orientation between the optical probe and the DUT and the desired relative orientation, and adjusting the relative orientation to return the optical probe and the DUT to the desired relative orientation.

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