公开(公告)号：US20240201225A1

公开(公告)日：2024-06-20

申请号：US18391228

申请日：2023-12-20

申请人： FormFactor, Inc.

发明人： Kevin John Hughes ,  January Kister

IPC分类号： G01R1/073

CPC分类号： G01R1/07307

摘要： MEMS probes are provided having decoupled electrical and mechanical design. In these probes, electrical conduction is primarily through one or more electrically conductive rails, and mechanical compliance for vertical compression is provided by a coil. The resulting independence of electrical and mechanical design advantageously enables probes to have a combination of electrical and mechanical properties that cannot be obtained in probes where the probe body is subject to both electrical and mechanical design constraints.

公开(公告)号：US20240345133A1

公开(公告)日：2024-10-17

申请号：US18634655

申请日：2024-04-12

申请人： FormFactor, Inc.

发明人： Sterling Tadashi Collins ,  Vinh-Lam Olivier Buu ,  Kevin John Hughes

IPC分类号： G01R1/073

CPC分类号： G01R1/07314

摘要： A roller mechanism with controlled height is used for probe tap-down in arrays of vertical probes for device testing. The height can be controlled using features of the roller, or external shims. This approach overcomes issues related to guide plate flexure during plate tap down by reducing forces on guide plates. It also avoids issues of probe damage from manual tap down.

公开(公告)号：US20230251287A1

公开(公告)日：2023-08-10

申请号：US18107231

申请日：2023-02-08

申请人： FormFactor, Inc.

发明人： January Kister ,  Kevin John Hughes

IPC分类号： G01R1/073

CPC分类号： G01R1/07307

摘要： A probe array having decoupled electrical and mechanical design constraints on the probes is provided. Each probe is a two-part structure with the two parts able to stay in electrical contact with each other as the parts slide up and down with respect to each other. The probes are disposed in through holes of an elastic matrix, each probe having its corresponding hole. The probes engage with the elastic matrix such that a restoring force in response to vertical probe compression is provided by the elastic matrix. With this approach, electrical and mechanical design are much more decoupled than in conventional spring probe design. The elastic matrix provides the mechanical compliance and restoring force, while the parts of the probe determine its current carrying capacity and electrical bandwidth.