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1.发明授权Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权微机电系统（MEMS）可变电容器装置，系统及相关方法公开(公告)号：US07388316B2
公开(公告)日：2008-06-17
申请号：US11122379
申请日：2005-05-05
申请人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
发明人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
IPC分类号： H01G5/01
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided. According to one embodiment, a method for varying the capacitance of two conductive plates is provided. The method can include providing a micro-electro-mechanical system (MEMS) variable capacitor. The variable capacitor can include first and second actuation electrodes wherein one of the actuation electrodes is movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes. Further, the variable capacitor can include first and second capacitive electrodes. The method can include applying a voltage to the first and second actuation electrodes for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes.
摘要翻译： 提供微机电系统（MEMS）可变电容器装置，系统及相关方法。 根据一个实施例，提供了一种用于改变两个导电板的电容的方法。 该方法可以包括提供微机电系统（MEMS）可变电容器。 可变电容器可以包括第一和第二致动电极，其中当跨越第一和第二致动电极施加电压时，其中一个致动电极可相对于另一个致动电极移动。 此外，可变电容器可以包括第一和第二电容电极。 该方法可以包括将电压施加到第一和第二致动电极，用于在施加电压跨越第一和第二致动电极时使电容电极中的至少一个在相对于另一个电容电极的基本上直的方向上移动，以改变 第一和第二电容电极之间的电容。
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2.发明授权Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods 有权微机电系统（MEMS）可变电容器装置，系统及相关方法公开(公告)号：US07180145B2
公开(公告)日：2007-02-20
申请号：US10736283
申请日：2003-12-15
申请人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
发明人： Francois-Xavier Musalem , Arthur S. Morris, III , John Richard Gilbert , Siebe Bouwstra , Randy J. Richards
IPC分类号： H01G5/01
摘要： Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided.
摘要翻译： 提供微机电系统（MEMS）可变电容器装置，系统及相关方法。
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3.发明授权MEMS tunable notch filter frequency automatic control loop systems and methods 有权MEMS可调陷波滤波器频率自动控制回路系统及方法公开(公告)号：US08810331B2
公开(公告)日：2014-08-19
申请号：US13323485
申请日：2011-12-12
CPC分类号： H03H7/0153 , H03H9/547 , H03H9/6409 , H03H2007/008 , H03H2007/013 , H04B1/525
摘要： Tunable notch filters and control loop systems and methods can include a tunable notch filter providing a stop band, a sensing circuit in communication with the tunable notch filter and adapted to determine a phase change between a reference signal and a signal reflected from the tunable notch filter, and a control loop in communication with the tunable notch filter and the sensing circuit, the control loop being operable to adjust the tunable notch filter to modify the phase change.
摘要翻译： 可调陷波滤波器和控制回路系统和方法可以包括提供阻带的可调陷波滤波器，与可调陷波滤波器通信的感测电路，并且适于确定参考信号和从可调陷波滤波器反射的信号之间的相位变化 以及与可调谐陷波滤波器和感测电路通信的控制回路，控制回路可操作以调节可调陷波滤波器以修改相位变化。
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4.发明申请SYSTEMS AND METHODS FOR CURRENT DENSITY OPTIMIZATION IN CMOS-INTEGRATED MEMS CAPACITIVE DEVICES 有权CMOS集成MEMS电容器件中电流密度优化的系统与方法公开(公告)号：US20120314335A1
公开(公告)日：2012-12-13
申请号：US13491583
申请日：2012-06-07
IPC分类号： H01G5/16
CPC分类号： H01G5/16 , H01G5/18 , H01H59/0009 , Y10T29/43
摘要： The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relatively narrow interconnects and feeds while maintaining a high Q. Specifically, for example a micro-electromechanical systems (MEMS) device can comprise a metal layer comprising a first portion and a second portion that is electrically separated from the first portion. A first terminus can be independently connected to each of the first portion and the second portion of the metal layer, wherein the first portion defines a first path between the metal layer and the first terminus, and the second portion defines a second path between the metal layer and the first terminus.
摘要翻译： 本主题涉及使用当前的分割和布线技术来均匀地在设备的各个层之间分配电流以实现高Q因子。 这种电流分流可以允许使用相对窄的互连和馈送，同时保持高的Q.具体地，例如微机电系统（MEMS）装置可以包括金属层，其包括第一部分和第二部分，其与 第一部分。 第一末端可以独立地连接到金属层的第一部分和第二部分中的每一个，其中第一部分限定金属层和第一末端之间的第一路径，并且第二部分限定金属之间的第二路径 层和第一个终点。
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公开(公告)号：US08319312B2
公开(公告)日：2012-11-27
申请号：US12178554
申请日：2008-07-23
IPC分类号： H01L29/00
CPC分类号： B81C1/00095 , B81B3/0072 , B81C2203/0728 , B81C2203/0771
摘要： Methods and devices for fabricating tri-layer beams are provided. In particular, disclosed are methods and structures that can be used for fabricating multilayer structures through the deposition and patterning of at least an insulation layer, a first metal layer, a beam oxide layer, a second metal layer, and an insulation balance layer.
摘要翻译： 提供了用于制造三层梁的方法和装置。 特别地，公开了可以通过至少绝缘层，第一金属层，光束氧化物层，第二金属层和绝缘平衡层的沉积和图案化来用于制造多层结构的方法和结构。
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6.发明申请SIMPLE AND MINIMALLY INVASIVE METHODS AND SYSTEMS FOR SENSING AND COMPUTING LOAD IMPEDANCE 有权用于感测和计算负载阻抗的简单和最小的入侵方法和系统公开(公告)号：US20120293187A1
公开(公告)日：2012-11-22
申请号：US13426575
申请日：2012-03-21
IPC分类号： G01R27/28
摘要： Systems and methods for direct load impedance computation for a two-port network are disclosed. For a two-port network connected between a first port and a second port, a method can include defining an equivalent PI network including a first equivalent network element in communication with the first port, a second equivalent network element in communication with the second port, and a third equivalent network element connected between the first port and the second port. A linear passive load can be connected to the second port of the two-port network, currents through the linear passive load, the second equivalent network element, and the third equivalent network element can be measured, and a load impedance of the linear passive load can be determined based on predetermined values of a voltage at the first port and a voltage at the second port.
摘要翻译： 公开了用于双端口网络的直接负载阻抗计算的系统和方法。 对于连接在第一端口和第二端口之间的双端口网络，方法可以包括定义等效的PI网络，其包括与第一端口通信的第一等效网络元件，与第二端口通信的第二等效网络元件， 以及连接在第一端口和第二端口之间的第三等效网络元件。 可以将线性无源负载连接到双端口网络的第二端口，可以测量通过线性无源负载的电流，第二等效网络元件和第三等效网络元件，并且线性被动负载的负载阻抗 可以基于第一端口处的电压的预定值和第二端口处的电压来确定。
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7.发明申请MEMS TUNABLE NOTCH FILTER FREQUENCY AUTOMATIC CONTROL LOOP SYSTEMS AND METHODS 有权MEMS TUNABLE NOTCH滤波器频率自动控制环路系统和方法公开(公告)号：US20120286892A1
公开(公告)日：2012-11-15
申请号：US13323485
申请日：2011-12-12
CPC分类号： H03H7/0153 , H03H9/547 , H03H9/6409 , H03H2007/008 , H03H2007/013 , H04B1/525
摘要： Tunable notch filters and control loop systems and methods can include a tunable notch filter providing a stop band, a sensing circuit in communication with the tunable notch filter and adapted to determine a phase change between a reference signal and a signal reflected from the tunable notch filter, and a control loop in communication with the tunable notch filter and the sensing circuit, the control loop being operable to adjust the tunable notch filter to modify the phase change.
摘要翻译： 可调陷波滤波器和控制回路系统和方法可以包括提供阻带的可调陷波滤波器，与可调陷波滤波器通信的感测电路，并且适于确定参考信号和从可调陷波滤波器反射的信号之间的相位变化 以及与可调谐陷波滤波器和感测电路通信的控制回路，控制回路可操作以调节可调陷波滤波器以修改相位变化。
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8.发明申请MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITORS AND ACTUATION COMPONENTS AND RELATED METHODS 有权微电子机械系统（MEMS）可变电容器和致动部件及相关方法公开(公告)号：US20090296309A1
公开(公告)日：2009-12-03
申请号：US12480027
申请日：2009-06-08
摘要： Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
摘要翻译： 提供了微电机械系统（MEMS）可变电容器和致动部件及相关方法。 MEMS可变电容器可以包括基本上彼此平行延伸的第一和第二馈送线。 此外，MEMS可变电容器可以包括与第一和第二馈电线间隔开的第一和第二电容板。 第一和第二电容板可以相对于第一和第二馈电线中的至少一个分别移动，以在预定电容范围内改变第一和第二馈电线之间的电容。
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9.发明授权Simple and minimally invasive methods and systems for sensing and computing load impedance 有权用于感测和计算负载阻抗的简单和微创方法和系统公开(公告)号：US09178488B2
公开(公告)日：2015-11-03
申请号：US13426575
申请日：2012-03-21
摘要： Systems and methods for direct load impedance computation for a two-port network are disclosed. For a two-port network connected between a first port and a second port, a method can include defining an equivalent PI network including a first equivalent network element in communication with the first port, a second equivalent network element in communication with the second port, and a third equivalent network element connected between the first port and the second port. A linear passive load can be connected to the second port of the two-port network, currents through the linear passive load, the second equivalent network element, and the third equivalent network element can be measured, and a load impedance of the linear passive load can be determined based on predetermined values of a voltage at the first port and a voltage at the second port.
摘要翻译： 公开了用于双端口网络的直接负载阻抗计算的系统和方法。 对于连接在第一端口和第二端口之间的双端口网络，方法可以包括定义等效的PI网络，其包括与第一端口通信的第一等效网络元件，与第二端口通信的第二等效网络元件， 以及连接在第一端口和第二端口之间的第三等效网络元件。 可以将线性无源负载连接到双端口网络的第二端口，可以测量通过线性无源负载的电流，第二等效网络元件和第三等效网络元件，并且线性被动负载的负载阻抗 可以基于第一端口处的电压的预定值和第二端口处的电压来确定。
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公开(公告)号：US20120169565A1
公开(公告)日：2012-07-05
申请号：US13219343
申请日：2011-08-26
IPC分类号： H01Q1/50
CPC分类号： H03F3/195 , H03F1/565 , H03F3/245 , H03F3/68 , H03F2200/111 , H03F2200/165 , H03F2200/171 , H03F2200/222 , H03F2200/294 , H03F2200/318 , H03F2200/387 , H03F2200/391 , H03F2200/429 , H03H7/0115 , H03H7/1783 , H04B1/0458 , H04B1/18 , H04B1/56
摘要： Tunable radio front end systems and methods are disclosed in which the tunable radio front end includes a first tunable impedance matching network, a second tunable impedance matching network, a transmission signal path, and a reception signal path. The transmission signal path can include a first tunable filter in communication with the first tunable impedance matching network, a tunable power amplifier connected to the first tunable filter, and a radio transmitter connected to the tunable power amplifier. The reception signal path can include a second tunable filter in communication with the second tunable impedance matching network, a tunable low-noise amplifier connected to the second tunable filter, and a radio receiver connected to the tunable low-noise amplifier.
摘要翻译： 公开了可调谐无线电前端系统和方法，其中可调谐无线电前端包括第一可调谐阻抗匹配网络，第二可调谐阻抗匹配网络，传输信号路径和接收信号路径。 传输信号路径可以包括与第一可调谐阻抗匹配网络通信的第一可调谐滤波器，连接到第一可调谐滤波器的可调谐功率放大器以及连接到可调谐功率放大器的无线电发射器。 接收信号路径可以包括与第二可调谐阻抗匹配网络通信的第二可调谐滤波器，连接到第二可调谐滤波器的可调低噪声放大器以及连接到可调低噪声放大器的无线电接收器。
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