公开(公告)号：US08907333B2

公开(公告)日：2014-12-09

申请号：US12596150

申请日：2008-03-10

申请人： Frank-Martin Petrat ,  Heiko Thiem ,  Sven Hill ,  Andre Ebbers ,  Koshi Okamura ,  Roland Schmechel

发明人： Frank-Martin Petrat ,  Heiko Thiem ,  Sven Hill ,  Andre Ebbers ,  Koshi Okamura ,  Roland Schmechel

IPC分类号： H01L21/00 ,  H01L21/16 ,  H01L21/3205 ,  H01L29/786

CPC分类号： H01L21/32055 ,  H01L29/7869

摘要： Composite of layers which comprises a dielectric layer and a layer which comprises pyrogenic zinc oxide and is bonded to the dielectric layer. Process for producing the composite of layers, in which the pyrogenic zinc oxide is applied to the dielectric layer in the form of a dispersion in which the zinc oxide particles are present with a mean aggregate diameter of less than 200 nm, and the zinc oxide layer is dried and then treated at temperatures of less than 200° C. Process for producing the composite of layers, in which the pyrogenic zinc oxide is applied to a substrate layer or a composite of substrate layers in the form of a dispersion in which the zinc oxide particles are present with a mean aggregate diameter of less than 200 nm to form a zinc oxide layer, and then the zinc oxide layer and the substrate layer are treated at temperatures of less than 200° C., and then a dielectric layer is applied to the zinc oxide layer. Field-effect transistor which has the composite of layers.

摘要翻译： 包括电介质层和包含热解氧化锌并结合到电介质层的层的层的复合物。 制造层的复合体的方法，其中将热解氧化锌以平均聚集体直径小于200nm的存在氧化锌颗粒的分散体形式施加到电介质层，氧化锌层 干燥，然后在小于200℃的温度下处理。制备层的复合物的方法，其中将热解氧化锌施加到基质层或基质层的复合物，其中锌的分散体 存在平均聚集体直径小于200nm的氧化物颗粒以形成氧化锌层，然后在小于200℃的温度下处理氧化锌层和基底层，然后施加电介质层 到氧化锌层。 具有复合层的场效应晶体管。

公开(公告)号：US20100132788A1

公开(公告)日：2010-06-03

申请号：US12596150

申请日：2008-03-10

申请人： Frank-Martin Petrat ,  Heiko Thiem ,  Sven Hill ,  Andre Ebbers ,  Koshi Okamura ,  Roland Schmechel

发明人： Frank-Martin Petrat ,  Heiko Thiem ,  Sven Hill ,  Andre Ebbers ,  Koshi Okamura ,  Roland Schmechel

IPC分类号： H01L31/0216 ,  H01L29/12 ,  H01L21/04 ,  B32B9/00 ,  B05D5/12

CPC分类号： H01L21/32055 ,  H01L29/7869

摘要： Composite of layers which comprises a dielectric layer and a layer which comprises pyrogenic zinc oxide and is bonded to the dielectric layer. Process for producing the composite of layers, in which the pyrogenic zinc oxide is applied to the dielectric layer in the form of a dispersion in which the zinc oxide particles are present with a mean aggregate diameter of less than 200 nm, and the zinc oxide layer is dried and then treated at temperatures of less than 200° C. Process for producing the composite of layers, in which the pyrogenic zinc oxide is applied to a substrate layer or a composite of substrate layers in the form of a dispersion in which the zinc oxide particles are present with a mean aggregate diameter of less than 200 nm to form a zinc oxide layer, and then the zinc oxide layer and the substrate layer are treated at temperatures of less than 200° C., and then a dielectric layer is applied to the zinc oxide layer. Field-effect transistor which has the composite of layers.

摘要翻译： 包括电介质层和包含热解氧化锌并结合到电介质层的层的层的复合物。 制造层的复合体的方法，其中将热解氧化锌以平均聚集体直径小于200nm的存在氧化锌颗粒的分散体形式施加到电介质层，氧化锌层 干燥，然后在小于200℃的温度下处理。制备层的复合物的方法，其中将热解氧化锌施加到基质层或基质层的复合物，其中锌的分散体 存在平均聚集体直径小于200nm的氧化物颗粒以形成氧化锌层，然后在小于200℃的温度下处理氧化锌层和基底层，然后施加电介质层 到氧化锌层。 具有复合层的场效应晶体管。