公开(公告)号：US20200255929A1

公开(公告)日：2020-08-13

申请号：US16640302

申请日：2018-08-08

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Nicolas Schiller ,  Steffen Straach ,  Matthias Fahland ,  Cindy Steiner ,  Sebastian Rethberg

IPC分类号： C23C14/00 ,  C01B3/50 ,  C23C14/56 ,  C23C14/16

摘要： A method is provided for producing a foil made of an electrically conductive material. The foil consists of the same electrically conductive material along the extension of the foil thickness. A flexible substrate is first introduced into a working chamber; a layer made of the electrically conductive material is deposited on at least one surface region of the flexible substrate using a vacuum coating process; and the first layer is then removed from the flexible substrate. Either an ion-etching process is carried out at least on the surface region of the flexible substrate prior to depositing the layer made of the electrically conductive material and/or the layer made of the electrically conductive material is heated during and/or after the layer is deposited.

公开(公告)号：US20140374241A1

公开(公告)日：2014-12-25

申请号：US14377120

申请日：2013-01-16

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Steffen Günther ,  Matthias Fahland ,  Henry Morgner ,  Steffen Straach ,  Björn Meyer

IPC分类号： C23C14/00 ,  C23C14/06

CPC分类号： C23C14/0036 ,  C23C14/0021 ,  C23C14/06 ,  C23C14/0641 ,  C23C14/24 ,  H01M10/0562 ,  H01M2300/0068

摘要： A method for depositing a LiPON coating on a substrate is provided, wherein the vaporization material, which is located in a vessel and which includes at least the chemical elements lithium, phosphorus and oxygen, is vaporized within a vacuum chamber. Here the vaporization material is heated by means of a thermal vaporization apparatus, and simultaneously either a nitrogen-containing component is introduced into the vacuum chamber or a nitrogen-containing material is co-vaporized, and wherein the vapor particle mist rising from the vessel is permeated by a plasma before the deposition on the substrate.

摘要翻译： 提供了一种在衬底上沉积LiPON涂层的方法，其中位于容器中并且至少包括锂，磷和氧的化学元素的汽化材料在真空室内蒸发。 这里，蒸发材料通过热蒸发装置被加热，同时将含氮组分引入真空室或含氮材料共蒸发，其中从容器上升的蒸汽颗粒雾是 在沉积在基底之前通过等离子体渗透。

公开(公告)号：US20200240009A1

公开(公告)日：2020-07-30

申请号：US16752227

申请日：2020-01-24

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Sebastian Rethberg ,  Steffen Straach ,  Thomas Kühnel

IPC分类号： C23C14/56 ,  C23C14/04

摘要： A device for coating a band-shaped substrate within a vacuum chamber is provided. The device comprises a coating device; a cooling device with at least one convex surface area which at least partially touches the band-shaped substrate at the time of the coating; and a coil system comprising at least a supply roller, a receiving roller, and multiple guide rollers, wherein the band-shaped substrate includes an electrically conductive material at least on the side where the band-shaped substrate touches the cooling device, wherein the cooling device has an electrically conductive base body and an outer edge layer comprising an electrically insulating material; the coil system is designed to be potential-free with respect to the electrical mass of the device, and an electrical voltage of at least 10 V is formed between the electrically conductive base body, the cooling device, and the electrically conductive material of the substrate.