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公开(公告)号：US20140374241A1
公开(公告)日：2014-12-25
申请号：US14377120
申请日：2013-01-16
CPC分类号： C23C14/0036 , C23C14/0021 , C23C14/06 , C23C14/0641 , C23C14/24 , H01M10/0562 , H01M2300/0068
摘要： A method for depositing a LiPON coating on a substrate is provided, wherein the vaporization material, which is located in a vessel and which includes at least the chemical elements lithium, phosphorus and oxygen, is vaporized within a vacuum chamber. Here the vaporization material is heated by means of a thermal vaporization apparatus, and simultaneously either a nitrogen-containing component is introduced into the vacuum chamber or a nitrogen-containing material is co-vaporized, and wherein the vapor particle mist rising from the vessel is permeated by a plasma before the deposition on the substrate.
摘要翻译： 提供了一种在衬底上沉积LiPON涂层的方法，其中位于容器中并且至少包括锂，磷和氧的化学元素的汽化材料在真空室内蒸发。 这里，蒸发材料通过热蒸发装置被加热，同时将含氮组分引入真空室或含氮材料共蒸发，其中从容器上升的蒸汽颗粒雾是 在沉积在基底之前通过等离子体渗透。
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公开(公告)号：US10907249B2
公开(公告)日：2021-02-02
申请号：US16308243
申请日：2017-06-08
发明人： Matthias Fahland , Uwe Meyer , Tobias Vogt , Steffen Günther , John Fahlteich , Nicole Prager
摘要： Methods and apparatuses for coating a flexible substrate are provided. The flexible substrate is guided over a process roller. The flexible substrate has a first protective film, which is removed from the flexible substrate before the flexible substrate reaches a coating zone of a coating device located opposite the process roller. The first protective film is removed from the flexible substrate after the flexible substrate has formed a mechanical contact with the surface of the process roller. A second protective film is applied to the coated side of the flexible substrate after the flexible substrate has left the coating zone of the coating device and before the mechanical contact between the process roller and the flexible substrate is ended.
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公开(公告)号：US20170218504A1
公开(公告)日：2017-08-03
申请号：US15508905
申请日：2015-09-10
发明人： Steffen Günther , Cindy Steiner , Jörg Kubusch
摘要： A method for reducing the adhesion of dirt to a substrate is provided, where a thin, incompletely closed layer of a material is deposited on at least one surface area of the substrate by means of a vacuum deposition process, and then said surface area is acted upon by accelerated ions.
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公开(公告)号：US20180321424A1
公开(公告)日：2018-11-08
申请号：US15968237
申请日：2018-05-01
IPC分类号： G02B1/12 , H01J37/305 , G02B1/11 , B05D3/06 , B05D3/14
CPC分类号： G02B1/12 , B05D3/06 , B05D3/068 , B05D3/145 , B05D3/148 , B05D7/04 , B29C59/14 , C08J7/047 , C08J7/123 , C08J2367/02 , C08J2433/06 , G02B1/11 , H01J37/3056 , H01J2237/3174 , H01L31/02168
摘要： A method for the production of nanoscopic and/or microscopic surface structures on a flat substrate is provided, wherein the surface structure of the substrate is changed through the use of an ion etching process. First, a coating that features a boundary surface-active substance with a concentration of 0.01 to 5 percent by weight is applied to the substrate. The coating applied to the substrate is subsequently transformed into a solid form, and the ion etching process is then performed.
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公开(公告)号：US09771650B2
公开(公告)日：2017-09-26
申请号：US15247403
申请日：2016-08-25
发明人： Vincent Fischer , Benjamin Graffel , Falk Winckler , Björn Meyer , Matthias Fahland , Steffen Günther
CPC分类号： C23C14/582 , C23C14/0036 , C23C14/086 , C23C14/5846 , C23C14/5873
摘要： Methods are provided for modifying a transparent and electrically conductive metal-oxide coating deposited on a plastic substrate. At least one surface region of the metal oxide coating is impinged by a pulse-driven electron beam. The impingement of the surface region of the metal oxide coating by the pulse-driven electron beam occurs inside a vacuum chamber into which hydrogen, argon, nitrogen, or oxygen, or a gas mixture of at least two of the above-mentioned gasses has been introduced.
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公开(公告)号：US10557196B2
公开(公告)日：2020-02-11
申请号：US15508905
申请日：2015-09-10
发明人： Steffen Günther , Cindy Steiner , Jörg Kubusch
IPC分类号： C23C14/00 , C23C14/04 , C23C14/08 , C23C14/10 , C23C14/35 , C23C14/56 , C23C14/58 , C23C16/455 , H01J37/32
摘要： A method for reducing the adhesion of dirt to a substrate is provided, where a thin, incompletely closed layer of a material is deposited on at least one surface area of the substrate by means of a vacuum deposition process, and then said surface area is acted upon by accelerated ions.
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公开(公告)号：US20170067148A1
公开(公告)日：2017-03-09
申请号：US15247403
申请日：2016-08-25
发明人： Vincent Fischer , Benjamin Graffel , Falk Winckler , Björn Meyer , Matthias Fahland , Steffen Günther
CPC分类号： C23C14/582 , C23C14/0036 , C23C14/086 , C23C14/5846 , C23C14/5873
摘要： Methods are provided for modifying a transparent and electrically conductive metal-oxide coating deposited on a plastic substrate. At least one surface region of the metal oxide coating is impinged by a pulse-driven electron beam. The impingement of the surface region of the metal oxide coating by the pulse-driven electron beam occurs inside a vacuum chamber into which hydrogen, argon, nitrogen, or oxygen, or a gas mixture of at least two of the above-mentioned gasses has been introduced.
摘要翻译： 提供了用于修饰沉积在塑料基底上的透明和导电金属氧化物涂层的方法。 金属氧化物涂层的至少一个表面区域被脉冲驱动的电子束撞击。 通过脉冲驱动的电子束对金属氧化物涂层的表面区域的冲击发生在真空室内，其中氢，氩，氮或氧或至少两种上述气体的气体混合物已经被 介绍。
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