公开(公告)号：US20020134135A1

公开(公告)日：2002-09-26

申请号：US10098038

申请日：2002-03-13

Applicant: FUJIKIN INCORPORATED

Inventor： Katsunori Komehana ,  Yukio Minami ,  Akihiro Morimoto ,  Koji Kawada ,  Teruo Honiden ,  Osamu Nakamura ,  Toru Hirai ,  Nobukazu Ikeda

IPC: G01N007/00

CPC classification number: G01N25/36 ,  G01N25/28 ,  G01N27/16

Abstract: An unreacted gas detector including a reactor unit for producing a target gas by way of reacting material gases in its reaction chamber, a sensor body connected to the reactor unit, a measurement space provided in the sensor body for allowing the target gas to flow, an unreacted gas sensor having a temperature measurement section covered by a catalyst layer and disposed inside the measurement space, and a target gas sensor with its temperature measurement section disposed in the sensor body. Any unreacted gas remaining in the target gas is reacted by the catalyst layer so that a resulted temperature change is detected by the unreacted gas sensor, and a target gas temperature is measured by target gas temperature sensor, thus finding a unreacted gas concentration from a temperature difference between the temperatures obtained by the unreacted gas sensor and the target gas temperature sensor.

Abstract translation: 一种未反应的气体检测器，包括用于通过在其反应室中反应材料气体来生产目标气体的反应器单元，连接到反应器单元的传感器主体，设置在传感器主体中用于允许目标气体流动的测量空间， 未反应气体传感器，其具有由催化剂层覆盖并设置在测量空间内的温度测量部分，以及其目标气体传感器，其温度测量部分设置在传感器主体中。 残留在目标气体中的任何未反应气体都被催化剂层反应，从而通过未反应的气体传感器检测到所产生的温度变化，并且通过目标气体温度传感器测量目标气体温度，从而从温度 由未反应气体传感器和目标气体温度传感器获得的温度之间的差。

公开(公告)号：US20040137744A1

公开(公告)日：2004-07-15

申请号：US10724101

申请日：2003-12-01

Applicant: Fujikin Incorporated ,  Tadahiro OHMI

Inventor： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Yukio Minami ,  Kouji Kawada ,  Katunori Komehana ,  Teruo Honiden ,  Touru Hirai ,  Akihiro Morimoto ,  Toshirou Nariai ,  Keiji Hirao ,  Masaharu Taguchi ,  Osamu Nakamura

IPC: H01L021/311

CPC classification number: B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

Abstract: A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

Abstract translation: 一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。 该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

公开(公告)号：US20020136676A1

公开(公告)日：2002-09-26

申请号：US10096247

申请日：2002-03-12

Applicant: Fujikin Incorporated

Inventor： Katsunori Komehana ,  Yukio Minami ,  Koji Kawada ,  Akihiro Morimoto ,  Nobukazu Ikeda ,  Osamu Nakamura ,  Teruo Honiden ,  Toru Hirai

IPC: B01J007/00 ,  B01J008/00

CPC classification number: C01B5/00 ,  B01J12/007

Abstract: A reactor (2) for generating moisture in which the starting material gases are caused to undergo turbulence so as to increase the efficiency of the moisture-generating reaction. The reactor (2) for generating moisture comprises a first inlet-side reactor structural component (4) which is adapted to supply the starting material gases from a starting material gas feed port into the inlet side of an interior space; a second outlet-side reactor structural component (2) which is adapted to transfer generated gas to a moisture gas take-out port (30a) from a moisture gas feed passage (28); a reflector (12) clamped air-tightly between the first and second structural components (4, 20 ) and having a plurality of blowing holes (16) at predetermined locations for communicating with the inlet-side interior space (8); a reactor chamber (18) formed with a narrow gap d provided between the reflector (12) and the second structural component (20); a nozzle hole (24) formed in the second structural component (20) for communicating with the moisture gas feed passage (28); and a coating catalyst layer (21) formed on a wall surface (20a) of the reaction chamber opposing the reflector (12); wherein when hydrogen and oxygen gas fed from the starting material gas feed port flow into the reaction chamber (18) through the blowing holes (16) in the reflector (12), they react and generate moisture gas by a non-combustive pathway by the catalytic effect of the coating catalyst layer (21)

Abstract translation: 一种用于产生水分的反应器（2），其中使起始材料气体发生湍流，以提高发生水反应的效率。 用于产生水分的反应器（2）包括第一入口侧反应器结构部件（4），其适于将起始原料气体进料口供应到内部空间的入口侧; 第二出口侧反应器结构部件（2），其适于将产生的气体从湿气供给通道（28）转移到湿气输出口（30a）; 在第一和第二结构部件（4,20）之间气密地夹紧并且在预定位置具有多个吹风孔（16）的反射器（12），用于与入口侧内部空间（8）连通; 形成有设置在反射器（12）和第二结构部件（20）之间的窄间隙d的反应室（18）; 形成在第二结构部件（20）中的用于与湿气供给通道（28）连通的喷嘴孔（24）; 以及形成在所述反应室的与所述反射体（12）相对的壁面（20a）上的涂层催化剂层（21）。 其中当从原料气体供给口供给的氢气和氧气通过反射器（12）中的吹出孔（16）流入反应室（18）时，它们通过非燃烧途径反应并产生湿气 涂层催化剂层（21）的催化作用