公开(公告)号：US20010003883A1

公开(公告)日：2001-06-21

申请号：US09737006

申请日：2000-12-14

Applicant: Fujikoshi Machinery Corp.

Inventor： Yasuhide Denda ,  Hisato Kuroiwa ,  Masanori Furukawa ,  Yoshio Nakamura

IPC: B24B007/04

CPC classification number: B24B37/30 ,  H01L21/30625

Abstract: The abrasive machine is capable of preventing deformation and bad abrasion of an abrasive cloth, maintaining flatness of an abrasive face of an abrasive plate and improving abrading accuracy. The abrasive machine comprises the abrasive plate and a holding unit for holding a work piece. In the holding unit, an inner head has a first concave section. An outer head has a second concave section. A holding plate is provided in the first concave section. An elastic holding member forms a first chamber. An outer enclosing member is provided to the outer head. An inner enclosing member is provided between the outer enclosing member and the inner head. A pressing member presses the abrasive face of the abrasive plate and encloses the holding plate. An elastic ring member a second chamber. A pressurizing unit pressurizes the chambers so as to press the work piece and the pressing member onto the abrasive face.

Abstract translation: 研磨机能够防止研磨布的变形和磨损不良，保持研磨板的研磨面的平坦度并提高研磨精度。 研磨机包括研磨板和用于保持工件的保持单元。 在保持单元中，内头部具有第一凹部。 外头部具有第二凹部。 保持板设置在第一凹部中。 弹性保持构件形成第一室。 外包装件设置在外头部。 内封闭构件设置在外封闭构件和内头之间。 按压构件按压研磨板的研磨面并包围保持板。 弹性环构件，第二室。 加压单元对腔室加压，以将工件和按压构件按压到研磨面上。