公开(公告)号：US20020053358A1

公开(公告)日：2002-05-09

申请号：US09992191

申请日：2001-11-06

Applicant: Fujikoshi Machinery Corp.

Inventor： Yasuhide Denda ,  Yoshio Nakamura ,  Yoshinobu Nishimoto ,  Makoto Nakajima ,  Tsuyoshi Hasegawa ,  Norihiko Moriya

IPC: B08B003/02

CPC classification number: B24B37/08 ,  B08B3/024 ,  B08B15/04 ,  B08B2203/0229 ,  B24B53/017 ,  Y10S134/902

Abstract: The method of the present invention cleans abrasive faces of an upper abrasive plate and a lower abrasive plate of an abrasive machine. The method is executed by a cleaning device including: a nozzle for jetting water; a brush for preventing the jetted water from scattering in the air, the brush enclosing the nozzle; and another brush for closing a gap between the preventing brush and an outer edge of the upper abrasive plate, the method is characterized by the steps of: jetting water from the nozzle toward the abrasive face of the upper abrasive plate; moving the nozzle toward the outer edge of the upper abrasive plate; and closing the gap by the closing brush when the gap is formed between the preventing brush and the outer edge of the upper abrasive plate.

Abstract translation: 本发明的方法清洗研磨机的上磨料板和下研磨板的磨料面。 该方法由清洁装置执行，该清洁装置包括：用于喷射水的喷嘴; 用于防止喷射水在空气中飞散的刷子，刷子包围喷嘴; 以及用于封闭防磨刷和上磨料板的外边缘之间的间隙的另一刷子，其特征在于以下步骤：从喷嘴向上磨料板的研磨面喷射水; 将喷嘴移向上磨料板的外边缘; 并且当在防磨刷和上磨料板的外边缘之间形成间隙时，通过闭合刷闭合间隙。

公开(公告)号：US20010003883A1

公开(公告)日：2001-06-21

申请号：US09737006

申请日：2000-12-14

Applicant: Fujikoshi Machinery Corp.

Inventor： Yasuhide Denda ,  Hisato Kuroiwa ,  Masanori Furukawa ,  Yoshio Nakamura

IPC: B24B007/04

CPC classification number: B24B37/30 ,  H01L21/30625

Abstract: The abrasive machine is capable of preventing deformation and bad abrasion of an abrasive cloth, maintaining flatness of an abrasive face of an abrasive plate and improving abrading accuracy. The abrasive machine comprises the abrasive plate and a holding unit for holding a work piece. In the holding unit, an inner head has a first concave section. An outer head has a second concave section. A holding plate is provided in the first concave section. An elastic holding member forms a first chamber. An outer enclosing member is provided to the outer head. An inner enclosing member is provided between the outer enclosing member and the inner head. A pressing member presses the abrasive face of the abrasive plate and encloses the holding plate. An elastic ring member a second chamber. A pressurizing unit pressurizes the chambers so as to press the work piece and the pressing member onto the abrasive face.

Abstract translation: 研磨机能够防止研磨布的变形和磨损不良，保持研磨板的研磨面的平坦度并提高研磨精度。 研磨机包括研磨板和用于保持工件的保持单元。 在保持单元中，内头部具有第一凹部。 外头部具有第二凹部。 保持板设置在第一凹部中。 弹性保持构件形成第一室。 外包装件设置在外头部。 内封闭构件设置在外封闭构件和内头之间。 按压构件按压研磨板的研磨面并包围保持板。 弹性环构件，第二室。 加压单元对腔室加压，以将工件和按压构件按压到研磨面上。

公开(公告)号：US20020153477A1

公开(公告)日：2002-10-24

申请号：US10128753

申请日：2002-04-23

Applicant: Fujikoshi Machinery Corp.

Inventor： Tsuyoshi Hasegawa ,  Yasuhide Denda

IPC: G02F001/01

CPC classification number: B24B37/345 ,  H01L21/681

Abstract: The work piece feeding machine is capable of correctly and efficiently setting a work piece in a through-hole of a carrier. The work piece feeding machine comprises a positioning unit detecting amount of displacement of the work piece with respect to the through-hole and correcting the position of the work piece in the through-hole. The positioning unit includes: a lighting source section provided on the work piece side or the carrier side, the lighting source section throwing polarized light on the work piece and the carrier; a camera provided on the carrier side or the work piece side, the camera receiving the polarized light from the lighting source section so as to catch images of an outer edge of the work piece and an inner edge of the through-hole in a visual field thereof; and an image processing section measuring the amount of displacement on the basis of positions of the outer edge and the inner edge.

Abstract translation: 工件给料机能够正确有效地将工件设置在载体的通孔中。 工件给料机包括定位单元检测工件相对于通孔的位移量，并校正工件在通孔中的位置。 定位单元包括：设置在工件侧或承载侧的照明源部分，照明源部分在工件和载体上投射偏振光; 设置在载体侧或工件侧的照相机，所述照相机接收来自所述照明源部的偏振光，以便在视场中捕获所述工件的外边缘和所述通孔的内边缘的图像 的; 以及图像处理部，其基于所述外缘和所述内缘的位置来测量位移量。