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公开(公告)号:US20180251908A1
公开(公告)日:2018-09-06
申请号:US15866952
申请日:2018-01-10
发明人: Keigo HOSHIKAWA , Yasuyuki Fujiwara , Keiichi Kohama , Shinji Nakanishi , Takumi Kobayashi , Etsuko Ohba
CPC分类号: C30B11/002 , C22C5/04 , C30B11/003 , C30B29/16 , C30B29/30
摘要: To provide a single crystal production apparatus that is capable of prolonging the lifetime of a heater, and capable of reducing the cost. A single crystal production apparatus of the present invention is the single crystal production apparatus which produces a single crystal of a metal oxide in an oxidative atmosphere, containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a high frequency coil heating the heater through high frequency induction heating; and a crucible heated with the heater, the heater containing a Pt-based alloy and having a zirconia coating on an overall surface of the heater.
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公开(公告)号:US10280530B2
公开(公告)日:2019-05-07
申请号:US15866952
申请日:2018-01-10
发明人: Keigo Hoshikawa , Yasuyuki Fujiwara , Keiichi Kohama , Shinji Nakanishi , Takumi Kobayashi , Etsuko Ohba
摘要: To provide a single crystal production apparatus that is capable of prolonging the lifetime of a heater, and capable of reducing the cost. A single crystal production apparatus of the present invention is the single crystal production apparatus which produces a single crystal of a metal oxide in an oxidative atmosphere, containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a high frequency coil heating the heater through high frequency induction heating; and a crucible heated with the heater, the heater containing a Pt-based alloy and having a zirconia coating on an overall surface of the heater.
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