公开(公告)号：US06388454B1

公开(公告)日：2002-05-14

申请号：US09452297

申请日：1999-11-30

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01K31305

CPC分类号： G01R13/347

摘要： An electro-optic sampling prober is used to measure a waveform of a measured signal applied to wiring of an IC wafer. Herein, a laser radiates laser beams, which are supplied to an optical module containing an optical isolator and photodiodes by way of an optical fiber. Then, the laser beams pass through an optical wavelength filter to propagate through a prober unit. The laser beams are incident on an electro-optical element, which is changed in polarization state in response to an electric field being caused by the measured signal. The laser beams are reflected by a surface mirror of the electro-optical element, so that reflected beams propagate back through the prober unit and are returned to the optical module by way of the optical wavelength filter. During the measurement, a human operator watches an image of a selected portion of the IC wafer presently placed beneath the prober unit to adjust a positional relationship between the prober unit and IC wafer. The image is produced by an infrared camera equipped with a halogen lamp and a monitor. Incidentally, the optical wavelength filter has an optical characteristic such that a center wavelength in transmission of light coincides with a wavelength of the laser beams whose intensities are maximal, so it is possible to prevent components of light, which are not required for measurement, from being unnecessarily returned to the optical module, and it is possible to improve a S/N ratio in measurement.

摘要翻译： 电光采样探测器用于测量施加到IC晶片布线的测量信号的波形。 这里，激光照射通过光纤提供给包含光隔离器和光电二极管的光学模块的激光束。 然后，激光束通过光学波长滤光器，通过探测器单元传播。 激光束入射在电光元件上，该电光元件响应于由测量信号引起的电场而在偏振状态下改变。 激光束被电光元件的表面反射镜反射，使得反射光束通过探测器单元传播回来，并通过光学波长滤光器返回到光学模块。 在测量期间，人类操作者观察当前放置在探测器单元下方的IC晶片的选定部分的图像，以调整探针单元和IC晶片之间的位置关系。 该图像由配有卤素灯和监视器的红外摄像机产生。 顺便提及，光波长滤光器具有使光的透射中的中心波长与其强度最大的激光的波长一致的光学特性，因此可以防止测量不需要的光的分量 不必要地返回到光学模块，并且可以提高测量中的S / N比。

公开(公告)号：US06445198B1

公开(公告)日：2002-09-03

申请号：US09541584

申请日：2000-04-03

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Tadao Nagatsuma ,  Mitsuru Shinagawa ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Tadao Nagatsuma ,  Mitsuru Shinagawa ,  Junzo Yamada

IPC分类号： G01R31308

CPC分类号： G01R1/071 ,  G01R29/0885 ,  G01R31/311

摘要： An electro-optic sampling probe includes an electro-optic element which is to be positioned to contact wiring on an IC wafer surface which is a measurement target and whose optical characteristics are changed depending on an electric field applied via the wiring and an electro-optic sampling optical system module having a polarized beam splitter, a wave plate, and a photo diode. The module separates light, which is transmitted through the electro-optic element and is reflected by a surface of the electro-optic element from laser light emitted from the outside and converts the separated light into an electric signal, and includes an optical axis adjuster attached to a detachable portion of an optical fiber that emits the laser light for adjusting the optical axis of the laser light and a light receiving surface adjuster attached to the detachable portion of the photo diode for adjusting the position of a light receiving surface of the photo diode.

摘要翻译： 电光采样探头包括电光元件，其被定位成接触作为测量对象的IC晶片表面上的布线，并且其光学特性根据经由布线施加的电场而改变，并且电光学 具有偏振分束器，波片和光电二极管的采样光学系统模块。 该模块将通过电光元件传输的光从外部发射的激光照射到电光元件的表面，并将分离的光转换为电信号，并且包括附接的光轴调节器 涉及发射用于调节激光的光轴的激光的光纤的可拆卸部分，以及附着到光电二极管的可拆卸部分的光接收表面调节器，用于调节光电二极管的光接收表面的位置 。

公开(公告)号：US06297651B1

公开(公告)日：2001-10-02

申请号：US09491337

申请日：2000-01-26

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Tadao Nagatsuma ,  Mitsuru Shinagawa ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Tadao Nagatsuma ,  Mitsuru Shinagawa ,  Junzo Yamada

IPC分类号： G01R31308

CPC分类号： G01R31/311 ,  G01R1/071

摘要： Disclosed herein is an electro-optic sampling probe in which the quantity of light incident on the electro-optic sampling system module can be adjusted. The probe includes an electro-optic element that has a reflective face, an optical system for transmitting a laser beam received from an external source and an electro-optic sampling optical system module as well as unit for attenuating the quantity of light of the laser beam that is received by the optical system.

摘要翻译： 本文公开了一种电光采样探头，其中可以调节入射在电光采样系统模块上的光量。 探头包括具有反射面的电光元件，用于透射从外部源接收的激光束的光学系统和电光采样光学系统模块以及用于衰减激光束的光量的单元 由光学系统接收。

公开(公告)号：US06469528B2

公开(公告)日：2002-10-22

申请号：US09452295

申请日：1999-11-30

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R31/311

摘要： An electro-optic sampling probe is disclosed, by which both faces of an IC wafer can be measured without moving the IC wafer. In the probe, an excitation optical system is provided at the back face side of a back-face excitation type IC wafer. The back face of the IC wafer is irradiated by light output from the excitation optical system, and simultaneously, the electric signal transmitted through wiring on the IC wafer is measured by using light output from an electro-optic sampling optical system provided at the front face side of the IC wafer. If the excitation optical system is substituted with an electro-optic sampling optical system, an IC wafer having wiring in both faces can also be measured.

摘要翻译： 公开了一种电光采样探针，可以在不移动IC晶片的情况下测量IC晶片的两个面。 在探针中，在背面激励型IC晶片的背面设置有激发光学系统。 利用从激励光学系统输出的光照射IC晶片的背面，同时，通过使用从设置在前表面的电光采样光学系统输出的光来测量通过IC晶片上的布线发送的电信号 一侧的IC晶片。 如果激发光学系统被电光采样光学系统代替，则也可以测量在两个面上具有布线的IC晶片。

公开(公告)号：US06403946B1

公开(公告)日：2002-06-11

申请号：US09513788

申请日：2000-02-25

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Tadao Nagatsuma ,  Mitsuru Shinagawa ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Tadao Nagatsuma ,  Mitsuru Shinagawa ,  Junzo Yamada

IPC分类号： G01R31303

CPC分类号： G01R1/071

摘要： An electro-optic sampling probe for preventing noise from being transmitted to photodiodes and improving the measurement accuracy is disclosed. In the probe, the optical system module comprises wavelength plates and polarized beam splitters arranged along an optical path of the relevant laser beam, and photodiodes facing the polarized beam splitters, wherein each photodiode is fixed via an insulating material to the main frame of the optical system module.

摘要翻译： 公开了一种用于防止噪声传输到光电二极管并提高测量精度的电光采样探头。 在探针中，光学系统模块包括沿着相关激光束的光路布置的波长板和偏振分束器，以及面向偏振分束器的光电二极管，其中每个光电二极管经由绝缘材料固定到光学主体 系统模块

公开(公告)号：US06369562B2

公开(公告)日：2002-04-09

申请号：US09448525

申请日：1999-11-23

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R13/347

摘要： An electro-optical probe used for an oscilloscope (e.g., electro-optic sampling oscilloscope) is mainly constructed by a probe head and a probe unit. The probe head contains a metal pin and an electro-optical element having a reflector at its terminal surface. The probe unit contains a reduced number of optical parts, which are arranged such that an optical axis of incoming beams of the electro-optical element differs from a optical axis of outgoing beams of the electro-optical element. That is, laser beams output form a laser diode are subjected to convergence by a converging lens to produce converged beams, which are incident on the electro-optical element as its incoming beams. The incoming beams are subjected to reflection by the reflector to produce reflected beams, which are output from the electro-optical element as its outgoing beams. Then, the reflected beams are converted to parallel beams by a collimator lens, or they are converged by a converging lens. A polarization detector performs separation on input beams from the lens to produce separated components of beams, optical axes of which differ from each other. Those components of beams are respectively supplied to photodiodes, wherein they are converted to electric signals. Thus, it is possible to measure a waveform of a measured signal based on differences between the electric signals, which reflect changes of polarization states of the beams in the electro-optical element.

摘要翻译： 用于示波器（例如电光采样示波器）的电光探头主要由探头和探头单元构成。 探头包含金属销和在其端子表面具有反射器的电光元件。 探针单元包含减少数量的光学部件，其被布置为使得电光元件的入射光束的光轴与电光元件的输出光束的光轴不同。 也就是说，由激光二极管输出的激光束通过会聚透镜进行会聚，以产生入射到作为入射光束的电光元件上的会聚光束。 入射光束被反射器反射以产生从电光元件作为其输出光束输出的反射光束。 然后，反射光束通过准直透镜转换为平行光束，或者它们被会聚透镜会聚。 偏振检测器执行从透镜的输入光束上的分离，以产生分离的光束分量，光轴彼此不同。 光束的这些分量分别提供给光电二极管，其中它们被转换成电信号。 因此，可以基于反映电光元件中的光束的偏振态的变化的电信号之间的差异来测量测量信号的波形。

公开(公告)号：US06337565B1

公开(公告)日：2002-01-08

申请号：US09520854

申请日：2000-03-07

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： H05K3/1216 ,  G01R1/071

摘要： An electro-optic probe having a laser diode for generating a laser beam based on a control signal from an oscilloscope body; a collimator lens for making the laser beam into a parallel beam; an electro-optic element having on an end face thereof a reflective coating, with optical characteristics which are changed by propagating an electrical field via a metal pin provided at the end face on the reflective coating side; an isolator provided between the collimator lens and the electro-optic element, which passes a laser beam generated by the laser diode and isolates a reflected beam which is reflected by the reflective coating; and photodiodes which convert the reflected beam isolated by the isolator into electrical signals. The electro-optic element is integrally affixed to a probe head which is rotatable with respect to a probe body on which the probe head is mounted.

摘要翻译： 一种具有激光二极管的电光探针，用于基于来自示波器主体的控制信号产生激光束; 用于使激光束成平行光束的准直透镜; 电光元件在其端面上具有反射涂层，光学特性通过经由设置在反射涂层侧的端面处的金属销传播电场而改变; 设置在准直透镜和电光元件之间的隔离器，其通过由激光二极管产生的激光束并隔离由反射涂层反射的反射光束; 以及将由隔离器隔离的反射光束转换成电信号的光电二极管。 电光元件整体固定在探针头上，该探针头可相对于其上安装有探头的探针主体旋转。

公开(公告)号：US06507014B2

公开(公告)日：2003-01-14

申请号：US10080768

申请日：2002-02-22

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01J104

CPC分类号： G01R1/071

摘要： The present invention relates to an electro-optic probe, which includes the following components: a laser diode for emitting a modulating laser light according to control signals generated in a main body of the electro-optic sampling oscilloscope; a first lens for converting the modulating laser light to a parallel beam; a second lens for focusing the parallel beam; an opto-electronic element having a reflection film at a reflection-end; an isolator device disposed between the first lens and the second lens for transmitting the modulating laser light and separating a reflected beam produced at the reflection film into signal beams; and photo-diodes for converting optical energies of the signal beams separated by the isolator device into respective electrical signals; wherein, the signal beams to enter the photo-diodes are directed to propagate towards the laser diode, and the photo-diodes are disposed in a longitudinal direction of a probe casing.

公开(公告)号：US06288531B1

公开(公告)日：2001-09-11

申请号：US09495087

申请日：2000-01-31

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R13/347 ,  G01R1/071

摘要： An electro-optic probe is provided which is capable of maintaining the contact pressure of the metal pin on the test object at a constant and capable of protecting the safety of the electro-optic element during measurement. The electro-optic probe has a probe head which is attached to the probe body such that a relative position of the probe head in the direction of the optical path can be elastically regulated by a spring disposed between the probe head and the probe body.

摘要翻译： 提供一种电光探针，其能够将测试对象上的金属针的接触压力保持恒定，并且能够在测量期间保护电光元件的安全性。 电光探头具有探针头，该探针头附接到探针体，使得探针头在光路方向上的相对位置可以通过设置在探针头和探针体之间的弹簧来弹性调节。

公开(公告)号：US6166845A

公开(公告)日：2000-12-26

申请号：US317917

申请日：1999-05-25

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R13/34 ,  G01R1/07 ,  G01R13/40 ,  G02F1/03

CPC分类号： G01R1/071 ,  G01R13/347

摘要： The present invention relates to a probe for an electro-optic sampling oscillator.The probe for an electro-optic sampling oscillator provides a laser diode that generates a laser beam based on the control signal of the electro-optical sampling oscilloscope; a collimator lens that makes the laser beam into a parallel beam; an electro-optic element that has a reflecting film at the end; an isolator provided between the collimator lens and the electro-optic element that passes the laser beam that is generated by the laser diode and separates the reflected beam of the laser beam that was reflected by the reflecting film; photodiodes that convert the reflected beam separated by the isolator into an electrical signal; and a condenser lens provided between the isolator and the electro-optic element that condenses the parallel beam to one point on the reflecting film, makes the reflected beam reflected by the reflecting film into a parallel beam again, and makes the optical axes of the light incident on the reflecting film and the light reflected by the reflecting film coincide.

摘要翻译： 本发明涉及一种用于电光采样振荡器的探针。 用于电光采样振荡器的探针提供基于电光采样示波器的控制信号产生激光束的激光二极管; 使激光束成平行光束的准直透镜; 电光元件，其末端具有反射膜; 设置在准直透镜和电光元件之间的隔离器，其通过由激光二极管产生的激光束并分离由反射膜反射的激光束的反射光束; 将由隔离器分离的反射光束转换为电信号的光电二极管; 并且设置在隔离器和电光元件之间的聚光透镜，其将平行光束会聚到反射膜上的一个点，使得由反射膜反射的反射光束再次成为平行光束，并使光的光轴 入射到反射膜上并且由反射膜反射的光重合。