公开(公告)号：US20190293922A1

公开(公告)日：2019-09-26

申请号：US16435986

申请日：2019-06-10

Applicant: Gigaphoton Inc.

Inventor： Hiroyuki ITO ,  Hiroshi TANAKA

IPC: G02B26/08 ,  H05G2/00 ,  H01S3/23 ,  H01S3/223 ,  H01S3/00 ,  G02B27/14 ,  G02B27/10

Abstract: A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

公开(公告)号：US20140111635A1

公开(公告)日：2014-04-24

申请号：US14061295

申请日：2013-10-23

Applicant: GIGAPHOTON INC.

Inventor： Toru SUZUKI ,  Hiroshi TANAKA ,  Hideyuki HAYASHI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G06T7/20

CPC classification number: H05G2/008 ,  G06T7/20 ,  G06T7/246 ,  G06T2207/30241 ,  H05G2/003 ,  H05G2/006

Abstract: In an extreme ultraviolet light generation apparatus, a target detection section may include a light source, a transfer optical system, an image sensor configured to output image data of an image that has been formed by irradiating a target outputted from a target supply device with light outputted from the light source on a light-receiving unit of the image sensor by the transfer optical system, and a processing unit, connected to the image sensor, configured to receive the image data, obtain a first optical intensity distribution along a first line that intersects with a trajectory of the target and a second optical intensity distribution along a second line that intersects with the trajectory, calculate a center of gravity position in the first optical intensity distribution and a center of gravity position in the second optical intensity distribution, and calculate an actual path of the target based on the calculated positions.

Abstract translation: 在极紫外光发生装置中，目标检测部可以包括光源，转印光学系统，图像传感器，被配置为输出通过用光照射从目标供给装置输出的目标而形成的图像的图像数据 通过所述传送光学系统从所述图像传感器的光接收单元从所述光源输出的图像数据;以及处理单元，连接到所述图像传感器，被配置为接收所述图像数据，沿着第一行获得第一光强分布， 与目标的轨迹相交，沿着与轨迹相交的第二线的第二光强分布，计算第一光强度分布中的重心位置和第二光强分布中的重心位置，并计算 基于计算出的位置的目标的实际路径。

公开(公告)号：US20240405502A1

公开(公告)日：2024-12-05

申请号：US18807455

申请日：2024-08-16

Applicant: Gigaphoton Inc.

Inventor： Kazuhiro SUZUKI ,  Hiroshi TANAKA

IPC: H01S3/10 ,  G03F7/20 ,  H01S3/13

Abstract: A laser apparatus includes: a laser oscillator including a wavelength adjuster and configured to output pulse laser light having a center wavelength adjusted by the wavelength adjuster; a spectrum monitor configured to generate data on a spectrum of the pulse laser light; and a processor configured to control the wavelength adjuster in such a way that the center wavelength of the pulse laser light changes in accordance with a target wavelength that periodically changes to each of multiple values including first and second wavelengths, calculate a first spectral linewidth from data on spectra of multiple pulses each having the first wavelength as the target wavelength, and calculate a second spectral linewidth from data on spectra of multiple pulses each having the second wavelength as the target wavelength.