公开(公告)号：US20140353528A1

公开(公告)日：2014-12-04

申请号：US14290483

申请日：2014-05-29

Applicant: GIGAPHOTON INC.

Inventor： Hideyuki HAYASHI ,  Kazuhiro SUZUKI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  H01S3/11

CPC classification number: H05G2/008 ,  H01S3/005 ,  H01S3/10015 ,  H01S3/10038 ,  H01S3/2316 ,  H05G2/006

Abstract: An extreme ultraviolet light generation apparatus may include a chamber containing a plasma generation region irradiated by a pulse laser beam from a laser apparatus, a target supply device configured to supply a plurality of targets consecutively to the plasma generation region in the chamber, a target detection unit configured to detect a target outputted from the target supply device, and a laser controller configured to control the laser apparatus; the laser controller generating a light emission trigger instructing a laser device included in the laser apparatus to emit a pulse laser beam, and outputting the generated light emission trigger to the laser apparatus, in accordance with a detection signal from the target detection unit; and the laser controller adjusting generation of the light emission trigger outputted consecutively to the laser apparatus so that a time interval of the light emission trigger is within a predetermined range.

Abstract translation: 极紫外线发生装置可以包括：包含由来自激光装置的脉冲激光束照射的等离子体产生区域的室，被配置为连续地向室内的等离子体产生区域供给多个目标的目标供给装置，目标检测 被配置为检测从目标供给装置输出的目标的单元，以及被配置为控制所述激光装置的激光控制器; 所述激光控制器生成指示所述激光装置所具备的激光装置发射脉冲激光束的发光触发器，并且根据来自所述目标检测部的检测信号将所生成的发光触发信号输出到所述激光装置; 并且所述激光控制器调整所述发光触发器的产生，连续输出到所述激光装置，使得所述发光触发的时间间隔在预定范围内。

公开(公告)号：US20130294470A1

公开(公告)日：2013-11-07

申请号：US13936819

申请日：2013-07-08

Applicant: GIGAPHOTON INC.

Inventor： Yukio WATANABE ,  Hideyuki HAYASHI ,  Kouji KAKIZAKI ,  Michio SHINOZAKI ,  Hideo HOSHINO

IPC: H01S3/04 ,  H01S3/22

CPC classification number: H01S3/0407 ,  F25B2400/06 ,  F25D17/02 ,  H01S3/03 ,  H01S3/041 ,  H01S3/22

Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

Abstract translation: 一种用于气体激光器的温度控制器，其控制多个温度控制装置的温度，包括需要高精度温度控制的第一温度控制部分和需要低精度温度控制的第二温度控制部分 与第一温度控制部分相比，第一温度控制部分与低温或高温的温度控制相比，包括产生冷却剂的第一温度控制部分或用于调节每个第一温度控制部分的温度的加热剂 温度控制部分，产生冷却剂的第二温度控制部分或用于调节每个第二温度控制部分的温度的加热剂，将第一温度控制部分和第一温度控制部分并联连接的第一管道系统， 以及连接第二回火的第二管道系统 所述控制部分和每个第二温度控制部分并联。

公开(公告)号：US20130294469A1

公开(公告)日：2013-11-07

申请号：US13936734

申请日：2013-07-08

Applicant: Gigaphoton Inc.

Inventor： Yukio WATANABE ,  Hideyuki HAYASHI ,  Kouji KAKIZAKI ,  Michio SHINOZAKI ,  Hideo HOSHINO

IPC: H01S3/04 ,  H01S3/03

CPC classification number: H01S3/0407 ,  F25B2400/06 ,  F25D17/02 ,  H01S3/03 ,  H01S3/041 ,  H01S3/22

Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

公开(公告)号：US20150189730A1

公开(公告)日：2015-07-02

申请号：US14643782

申请日：2015-03-10

Applicant: GIGAPHOTON INC.

Inventor： Masato MORIYA ,  Hideyuki HAYASHI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  H01J37/304 ,  H01J37/22

CPC classification number: H05G2/008 ,  H01J37/228 ,  H01J37/3045 ,  H01J2237/20292 ,  H05G2/005 ,  H05G2/006

Abstract: An extreme ultraviolet light generation device may comprise: a chamber provided with a through-hole; an introduction optical system configured to introduce the pulse laser beam into a first predetermined region inside the chamber through the through-hole; a target supply device configured to output the target toward the first predetermined region; a light source configured to irradiate a second predetermined region with light whose optical path in the second predetermined region has a transverse section that is longer along a direction perpendicular to a direction of movement of the target than along the direction of movement of the target, the second predetermined region including part of a trajectory of the target between the target supply device and the first predetermined region; and an optical sensor configured to detect light incident on the optical sensor from the second predetermined region to detect the target passing through the second predetermined region.

Abstract translation: 极紫外线发生装置可以包括：设置有通孔的室; 导入光学系统，被配置为通过所述通孔将所述脉冲激光束引入所述腔室内的第一预定区域; 目标供给装置，被配置为朝向所述第一预定区域输出所述目标; 光源，被配置为用第二预定区域的光线照射第二预定区域中的光路，沿着与目标的移动方向垂直的方向的垂直于目标的移动方向的横向部分具有横向部分， 所述第二预定区域包括所述目标供给装置和所述第一预定区域之间的所述目标的轨迹的一部分; 以及光学传感器，被配置为从所述第二预定区域检测入射在所述光学传感器上的光，以检测通过所述第二预定区域的目标。

公开(公告)号：US20140111635A1

公开(公告)日：2014-04-24

申请号：US14061295

申请日：2013-10-23

Applicant: GIGAPHOTON INC.

Inventor： Toru SUZUKI ,  Hiroshi TANAKA ,  Hideyuki HAYASHI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G06T7/20

CPC classification number: H05G2/008 ,  G06T7/20 ,  G06T7/246 ,  G06T2207/30241 ,  H05G2/003 ,  H05G2/006

Abstract: In an extreme ultraviolet light generation apparatus, a target detection section may include a light source, a transfer optical system, an image sensor configured to output image data of an image that has been formed by irradiating a target outputted from a target supply device with light outputted from the light source on a light-receiving unit of the image sensor by the transfer optical system, and a processing unit, connected to the image sensor, configured to receive the image data, obtain a first optical intensity distribution along a first line that intersects with a trajectory of the target and a second optical intensity distribution along a second line that intersects with the trajectory, calculate a center of gravity position in the first optical intensity distribution and a center of gravity position in the second optical intensity distribution, and calculate an actual path of the target based on the calculated positions.

Abstract translation: 在极紫外光发生装置中，目标检测部可以包括光源，转印光学系统，图像传感器，被配置为输出通过用光照射从目标供给装置输出的目标而形成的图像的图像数据 通过所述传送光学系统从所述图像传感器的光接收单元从所述光源输出的图像数据;以及处理单元，连接到所述图像传感器，被配置为接收所述图像数据，沿着第一行获得第一光强分布， 与目标的轨迹相交，沿着与轨迹相交的第二线的第二光强分布，计算第一光强度分布中的重心位置和第二光强分布中的重心位置，并计算 基于计算出的位置的目标的实际路径。

公开(公告)号：US20180348397A1

公开(公告)日：2018-12-06

申请号：US16058000

申请日：2018-08-08

Applicant: Gigaphoton Inc.

Inventor： Hideyuki HAYASHI ,  Takeshi OKAMOTO

IPC: G01V8/10

CPC classification number: H05G2/00

Abstract: A droplet timing sensor that detects droplet passage timing by receiving a light from a light source unit with which a droplet is irradiated in an extreme ultraviolet light generating apparatus eliminates an influence of droplet passage on light source control for obtaining a constant light income. The droplet timing sensor includes: a light source unit configured to irradiate a droplet with an illumination light at a predetermined position; a light receiving unit (70) configured to receive the illumination light having passed through the predetermined position and detect a change in a light income; and a light source controller (301) configured to obtain a frequency distribution of light incomes measured multiple times with time using a statistical processing unit (76), and control an output of the light source unit based on a light income at maximum frequency.

公开(公告)号：US20150342015A1

公开(公告)日：2015-11-26

申请号：US14814983

申请日：2015-07-31

Applicant: GIGAPHOTON INC.

Inventor： Hideyuki HAYASHI ,  Kazuhiro SUZUKI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  H01S3/00

CPC classification number: H05G2/008 ,  H01S3/005 ,  H01S3/10015 ,  H01S3/10038 ,  H01S3/2316 ,  H05G2/006

Abstract: An extreme ultraviolet light generation apparatus may include a chamber containing a plasma generation region irradiated by a pulse laser beam from a laser apparatus, a target supply device configured to supply a plurality of targets consecutively to the plasma generation region in the chamber, a target detection unit configured to detect a target outputted from the target supply device, and a laser controller configured to control the laser apparatus; the laser controller generating a light emission trigger instructing a laser device included in the laser apparatus to emit a pulse laser beam, and outputting the generated light emission trigger to the laser apparatus, in accordance with a detection signal from the target detection unit; and the laser controller adjusting generation of the light emission trigger outputted consecutively to the laser apparatus so that a time interval of the light emission trigger is within a predetermined range.

Abstract translation: 极紫外线发生装置可以包括：包含由来自激光装置的脉冲激光束照射的等离子体产生区域的室，被配置为连续地向室内的等离子体产生区域供给多个目标的目标供给装置，目标检测 被配置为检测从目标供给装置输出的目标的单元，以及被配置为控制所述激光装置的激光控制器; 所述激光控制器生成指示所述激光装置所具备的激光装置发射脉冲激光束的发光触发器，并且根据来自所述目标检测部的检测信号将所生成的发光触发信号输出到所述激光装置; 并且所述激光控制器调整所述发光触发器的产生，连续输出到所述激光装置，使得所述发光触发的时间间隔在预定范围内。

公开(公告)号：US20140098830A1

公开(公告)日：2014-04-10

申请号：US14047753

申请日：2013-10-07

Applicant: Gigaphoton Inc.

Inventor： Takayuki YABU ,  Takashi SAITO ,  Hideyuki HAYASHI ,  Kazuhiro SUZUKI ,  Hiroaki NAKARAI

IPC: H01S3/00

CPC classification number: H01S3/0085 ,  H01S3/005 ,  H01S3/2391 ,  H05G2/005 ,  H05G2/008

Abstract: An extreme ultraviolet light generation system may include an optical device configured to cause an optical path of a pulse laser beam to approximately match one of a first optical path in which the pulse laser beam is focused at a plasma generation region and a second optical path in which the pulse laser beam passes outside the plasma generation region, and a control unit configured to output a control signal to the optical device so that the optical device sets the optical path of the pulse laser beam to the second optical path from when a predetermined time starts to when the number of pulses contained in a timing signal reaches a predetermined value and sets the optical path of the pulse laser beam to the first optical path from when the number of pulses reaches the predetermined value to when the predetermined time ends.

Abstract translation: 极紫外光发生系统可以包括光学装置，其被配置为使脉冲激光束的光路近似地匹配脉冲激光束在等离子体产生区域聚焦的第一光路中的一个和第二光路中的第二光路 脉冲激光束通过等离子体产生区域以外的控制单元，以及控制单元，其配置为向光学装置输出控制信号，使得光学装置将脉冲激光束的光路从预定时间设定为第二光路 开始于当定时信号中包含的脉冲数达到预定值并且将脉冲激光束的光路从脉冲数达到预定值到当预定时间结束时设置为第一光路。

公开(公告)号：US20130062539A1

公开(公告)日：2013-03-14

申请号：US13668725

申请日：2012-11-05

Applicant: GIGAPHOTON INC.

Inventor： Hideyuki HAYASHI ,  Tooru ABE ,  Kouji KAKIZAKI ,  Toshihiro NISHISAKA

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/006

Abstract: An apparatus for measuring and controlling a target trajectory within a chamber apparatus for generating extreme ultraviolet light from plasma generated by irradiating a droplet target supplied from a target injection nozzle with a driver laser beam from an external driver laser. The apparatus includes: a nozzle adjustment mechanism for adjusting at least one of a position and an angle of the target injection nozzle; a target trajectory measuring unit for measuring a target trajectory to obtain trajectory information on the target trajectory; a target trajectory angle detecting unit for obtaining a value related to an angle deviation between the target trajectory represented by the trajectory information and a predetermined target trajectory; and a nozzle adjustment controller for controlling the nozzle adjustment mechanism based on the value related to the angle deviation such that the droplet target passes through a predetermined laser beam irradiation position.

Abstract translation: 一种用于测量和控制腔室装置内的目标轨迹的装置，用于通过用来自外部驱动器激光器的驱动器激光束照射从目标喷嘴提供的液滴目标产生的等离子体产生极紫外光。 该装置包括：用于调节目标喷嘴的位置和角度中的至少一个的喷嘴调节机构; 目标轨迹测量单元，用于测量目标轨迹以获得关于目标轨迹的轨迹信息; 目标轨迹角检测单元，用于获得与由所述轨迹信息表示的目标轨迹与预定目标轨迹之间的角度偏差相关的值; 以及喷嘴调节控制器，用于基于与角度偏差相关的值来控制喷嘴调节机构，使得液滴目标通过预定的激光束照射位置。