公开(公告)号：US20170150591A1

公开(公告)日：2017-05-25

申请号：US15422489

申请日：2017-02-02

Applicant: GIGAPHOTON INC.

Inventor： Masahiko ANDO ,  Yoshifumi UENO ,  Toru SUZUKI

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70033 ,  G03F7/70808 ,  G03F7/70991

Abstract: The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.

公开(公告)号：US20210193344A1

公开(公告)日：2021-06-24

申请号：US17077172

申请日：2020-10-22

Applicant: Gigaphoton Inc.

Inventor： Masahiko ANDO

IPC: G21K1/06 ,  G02B19/00 ,  G02B5/08 ,  G02B1/14 ,  H05G2/00 ,  G03F7/20

Abstract: An extreme ultraviolet light condensation mirror includes a substrate, and a multi-layer reflective film provided on the substrate, formed by alternately stacking an amorphous silicon layer and a layer having a refractive index different from a refractive index of the amorphous silicon layer, and configured to reflect extreme ultraviolet light, a layer on a most surface side in the multi-layer reflective film being the amorphous silicon layer containing a silicon atom bonded with a cyano radical.