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公开(公告)号:US10224686B2
公开(公告)日:2019-03-05
申请号:US15356763
申请日:2016-11-21
Applicant: GIGAPHOTON INC.
Inventor: Yasufumi Kawasuji , Naoya Takaoka , Toshio Yokozuka
IPC: H01S3/102 , H01S3/13 , H01S3/10 , H01L21/027 , H01S3/097 , H01L21/67 , H01S3/09 , H01S3/104 , H01S3/23 , H05G2/00 , H01S3/134 , H01S3/223 , H01S5/34 , H01S5/40
Abstract: A laser apparatus may include: an optical amplifier configured to amplify a laser beam outputted from a master oscillator; an optical-amplifier power supply configured to supply an alternating current for optical amplification to the optical amplifier; and a laser controller. The optical-amplifier power supply may include: an alternating current generation circuit including an inverter circuit configured to change output amplitude in accordance with a duty cycle, the alternating current generation circuit being configured to generate the alternating current from an output of the inverter circuit; and a power supply control circuit configured to hold control information defining correspondence relations between command values from the laser controller and duty cycles of the inverter circuit, determine a duty cycle corresponding to a command value received from the laser controller based on the control information, and provide the determined duty cycle to the inverter circuit.