公开(公告)号：US09435948B2

公开(公告)日：2016-09-06

申请号：US14304318

申请日：2014-06-13

Applicant: GLOBALFOUNDRIES INC.

Inventor： Robert K. Leidy ,  Mark D. Levy ,  Qizhi Liu ,  Gary L. Milo ,  Steven M. Shank

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/125 ,  G02B6/136

CPC classification number: G02B6/122 ,  G02B6/125 ,  G02B6/136 ,  G02B2006/12061

Abstract: Various embodiments include a silicon-based optical waveguide structure locally on a bulk silicon substrate, and systems and program products for forming such a structure by modifying an integrated circuit (IC) design structure. Embodiments include implementing processes of preparing manufacturing data for formation of the IC design structure in a computer-implemented IC formation system, wherein the preparing of the manufacturing data includes inserting instructions into the manufacturing data to convert an edge of the at least one shape from a crystallographic direction to a crystallographic direction.

Abstract translation: 各种实施例包括局部在体硅衬底上的硅基光波导结构，以及用于通过修改集成电路（IC）设计结构来形成这种结构的系统和程序产品。 实施例包括实现在计算机实现的IC形成系统中准备用于形成IC设计结构的制造数据的过程，其中制造数据的准备包括将指令插入到制造数据中以将至少一种形状的边缘从 <110>结晶方向到<100>晶体方向。