公开(公告)号：US20190283215A1

公开(公告)日：2019-09-19

申请号：US15924792

申请日：2018-03-19

Applicant: GLOBALFOUNDRIES INC.

Inventor： Sunghoon Lee ,  Sung Pyo Jung ,  Eric J. Bodensieck ,  Aldrin Bernard Anak Vincent Eddy ,  Dinesh R. Koli

IPC: B24D3/34 ,  B24B53/12 ,  H01L21/304 ,  H01L21/321

Abstract: A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.

公开(公告)号：US10814457B2

公开(公告)日：2020-10-27

申请号：US15924792

申请日：2018-03-19

Applicant: GLOBALFOUNDRIES INC.

Inventor： Sunghoon Lee ,  Sung Pyo Jung ,  Eric J. Bodensieck ,  Aldrin Bernard Anak Vincent Eddy ,  Dinesh R. Koli

IPC: B24D3/34 ,  B24B53/12 ,  H01L21/321 ,  H01L21/304 ,  B24B53/017 ,  B24B37/26

Abstract: A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.