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公开(公告)号：US09640765B2
公开(公告)日：2017-05-02
申请号：US15190365
申请日：2016-06-23
Applicant: GLOBALFOUNDRIES Inc.
Inventor： Lawrence A. Clevenger , Chandrasekhar Narayan , Gregory A. Northrop , Carl J. Radens , Brian C. Sapp
CPC classification number: H01L51/0048 , B82Y10/00 , B82Y40/00 , H01L29/0673 , H01L29/66439 , H01L29/775 , H01L51/0012 , H01L51/0541 , Y10S977/742 , Y10S977/842
Abstract: Embodiments of the present invention provide a method of forming carbon nanotube based semiconductor devices. The method includes creating a guiding structure in a substrate for forming a device; dispersing a plurality of carbon nanotubes inside the guiding structure, the plurality of carbon nanotubes having an orientation determined by the guiding structure; fixating the plurality of carbon nanotubes to the guiding structure; and forming one or more contacts to the device. Structure of the formed carbon nanotube device is also provided.
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公开(公告)号：US20160336515A1
公开(公告)日：2016-11-17
申请号：US15190365
申请日：2016-06-23
Applicant: GLOBALFOUNDRIES Inc.
Inventor： Lawrence A. Clevenger , Chandrasekhar Narayan , Gregory A. Northrop , Carl J. Radens , Brian C. Sapp
IPC: H01L51/00 , H01L51/05 , H01L29/775 , H01L29/06 , H01L29/66
CPC classification number: H01L51/0048 , B82Y10/00 , B82Y40/00 , H01L29/0673 , H01L29/66439 , H01L29/775 , H01L51/0012 , H01L51/0541 , Y10S977/742 , Y10S977/842
Abstract: Embodiments of the present invention provide a method of forming carbon nanotube based semiconductor devices. The method includes creating a guiding structure in a substrate for forming a device; dispersing a plurality of carbon nanotubes inside the guiding structure, the plurality of carbon nanotubes having an orientation determined by the guiding structure; fixating the plurality of carbon nanotubes to the guiding structure; and forming one or more contacts to the device. Structure of the formed carbon nanotube device is also provided.
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