公开(公告)号：US10078107B2

公开(公告)日：2018-09-18

申请号：US14924439

申请日：2015-10-27

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Jaime Bravo ,  Vikrant Chauhan ,  Ryan Scott Smith

IPC: G01R31/26 ,  G01R31/28

CPC classification number: G01R31/2607 ,  G01R31/2601 ,  G01R31/2831 ,  G01R31/2884

Abstract: Three reference resistors of the same resistance and a test structure are connected in a circuit having a Wheatstone Bride design. The circuit is electrically coupled between an input and ground. A voltage applied at the input resulting in an electrical characteristic difference between two midpoints of the circuit indicates the need for corrective action with respect to a design of the test structure for either OPC or etch bias.