公开(公告)号：US20160225919A1

公开(公告)日：2016-08-04

申请号：US14612639

申请日：2015-02-03

Applicant: GLOBALFOUNDRIES INC.

Inventor： Fen Chen ,  Carole D. Graas ,  Terence L. Kane ,  Michael A. Shinosky

IPC: H01L29/94 ,  H01L29/32

CPC classification number: H01L29/945 ,  H01L29/495 ,  H01L29/518 ,  H01L47/005

Abstract: Device structures that exhibit negative resistance characteristics and fabrication methods for such device structures. A signal is applied to a metal layer of a metal-insulator-semiconductor capacitor to cause a breakdown of an insulator layer of the metal-insulator-semiconductor capacitor at a location. The breakdown at the location of the insulator layer causes the metal-insulator-semiconductor capacitor to exhibit negative resistance. The metal layer may be comprised of a polycrystalline metal. A grain of the polycrystalline metal may penetrate through the insulator layer and into a portion of a substrate at the location of the breakdown.

Abstract translation: 显示负电阻特性的器件结构和这种器件结构的制造方法。 将信号施加到金属 - 绝缘体 - 半导体电容器的金属层，以使金属 - 绝缘体 - 半导体电容器的绝缘体层在一处发生击穿。 在绝缘体层的位置处的击穿导致金属 - 绝缘体 - 半导体电容器呈现负电阻。 金属层可以由多晶金属构成。 多晶金属的晶粒可以在击穿位置处穿过绝缘体层并进入衬底的一部分。

公开(公告)号：US09470712B1

公开(公告)日：2016-10-18

申请号：US14879645

申请日：2015-10-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Terence L. Kane ,  Matthew F. Stanton ,  Robert P. Marsin ,  Jochonia N. Nxumalo

IPC: G01Q30/20 ,  B65D51/16 ,  H01J37/20 ,  H01J37/305

CPC classification number: G01Q30/20 ,  B65D51/1644 ,  B65D51/26 ,  B65D2313/04 ,  H01J37/20 ,  H01J37/3053 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/204

Abstract: An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder requiring surface treatment, the holder being mountable in various instruments, the fixture being transportable in a container having a magnetized surface plate or disc for magnetic attachment of said fixture, with the container having a valve to permit alternative evacuation and backfill with an inert gas to protect the sample surface.

Abstract translation: 通过实施用于固定需要表面处理的样品的位置的可拆卸的磁化固定装置，用于促进原子力显微镜，SEM纳米探测，扫描探针显微镜和准直离子铣削的装置和方法，所述夹具可附接到支架 需要表面处理，保持器可安装在各种仪器中，该固定装置可在具有用于磁性附接所述固定装置的磁化表面板或盘的容器中运输，该容器具有阀，以允许替代的抽真空和惰性气体回填 保护样品表面。