公开(公告)号：US20190242927A1

公开(公告)日：2019-08-08

申请号：US15890270

申请日：2018-02-06

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ronald A. Feroli ,  John Cassels ,  Matthew F. Stanton

IPC: G01R1/073 ,  G01R31/26

Abstract: A continuity testing and cleaning fixture includes a continuity test area disposed on a portion of a first surface of the fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten. The continuity testing and cleaning fixture may be used in a method involving contacting at least two conductive elements of a probe card with a continuity test area of a continuity testing and cleaning fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten; determining an electrical resistance between the at least two conductive elements; and cleaning the at least two conductive elements with at least one cleaning zone of the continuity testing and cleaning fixture in response to determining the electrical resistance to be above a first threshold.

公开(公告)号：US09470712B1

公开(公告)日：2016-10-18

申请号：US14879645

申请日：2015-10-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Terence L. Kane ,  Matthew F. Stanton ,  Robert P. Marsin ,  Jochonia N. Nxumalo

IPC: G01Q30/20 ,  B65D51/16 ,  H01J37/20 ,  H01J37/305

CPC classification number: G01Q30/20 ,  B65D51/1644 ,  B65D51/26 ,  B65D2313/04 ,  H01J37/20 ,  H01J37/3053 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/204

Abstract: An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder requiring surface treatment, the holder being mountable in various instruments, the fixture being transportable in a container having a magnetized surface plate or disc for magnetic attachment of said fixture, with the container having a valve to permit alternative evacuation and backfill with an inert gas to protect the sample surface.

Abstract translation: 通过实施用于固定需要表面处理的样品的位置的可拆卸的磁化固定装置，用于促进原子力显微镜，SEM纳米探测，扫描探针显微镜和准直离子铣削的装置和方法，所述夹具可附接到支架 需要表面处理，保持器可安装在各种仪器中，该固定装置可在具有用于磁性附接所述固定装置的磁化表面板或盘的容器中运输，该容器具有阀，以允许替代的抽真空和惰性气体回填 保护样品表面。

公开(公告)号：US10705121B2

公开(公告)日：2020-07-07

申请号：US15890270

申请日：2018-02-06

Applicant: GLOBALFOUNDRIES INC.

Inventor： Ronald A. Feroli ,  John Cassels ,  Matthew F. Stanton

IPC: G01R1/073 ,  G01R31/26 ,  G01R35/00 ,  G01R3/00

Abstract: A continuity testing and cleaning fixture includes a continuity test area disposed on a portion of a first surface of the fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten. The continuity testing and cleaning fixture may be used in a method involving contacting at least two conductive elements of a probe card with a continuity test area of a continuity testing and cleaning fixture, wherein the continuity test area comprises an upper region comprising at least 99.99 wt % tungsten; determining an electrical resistance between the at least two conductive elements; and cleaning the at least two conductive elements with at least one cleaning zone of the continuity testing and cleaning fixture in response to determining the electrical resistance to be above a first threshold.