RESISTIVE RANDOM-ACCESS MEMORY ELEMENTS WITH LATERAL SIDEWALL SWITCHING

    公开(公告)号:US20240365566A1

    公开(公告)日:2024-10-31

    申请号:US18140677

    申请日:2023-04-28

    IPC分类号: H10B63/00

    CPC分类号: H10B63/80

    摘要: Structures for a resistive random-access memory element and methods of forming a structure for a resistive random-access memory element. The structure comprises an interlayer dielectric layer including a first trench having a sidewall and a second trench having a sidewall adjacent to the sidewall of the first trench. The structure further comprises a first layer on the sidewall of the first trench, a second layer inside the second trench, and a third layer on the sidewall of the second trench. The first layer comprises a first metal, the second layer comprises a second metal, and the third layer comprises a dielectric material. The third layer includes a portion positioned between the first layer and the second layer.