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公开(公告)号：US20060226377A1
公开(公告)日：2006-10-12
申请号：US11402356
申请日：2006-04-11
申请人： Guido Hergenhan , Kai Gaebel , Thomas Brauner
发明人： Guido Hergenhan , Kai Gaebel , Thomas Brauner
IPC分类号： G21G4/00
摘要： The object of a plasma radiation source is to ensure a more effective protection against debris and, in particular, to counteract secondary sputtering. A target flow that is provided by a target generator by means of a target nozzle and a plasma that is generated by a pulsed excitation beam are enclosed within a vacuum chamber by a gas flow directed transverse to the optical axis.
摘要翻译： 等离子体辐射源的目的是确保更有效地防止碎片，特别是抵抗二次溅射。 由目标发生器通过目标喷嘴和由脉冲激发光束产生的等离子体提供的目标流通过横向于光轴的气流被包围在真空室内。
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公开(公告)号：US20060219959A1
公开(公告)日：2006-10-05
申请号：US11393325
申请日：2006-03-30
申请人： Guido Hergenhan , Kai Gaebel , Thomas Brauner
发明人： Guido Hergenhan , Kai Gaebel , Thomas Brauner
CPC分类号： H05G2/003 , G03F7/70841 , G03F7/70858 , G03F7/70908 , G03F7/70916
摘要： In a radiation source for the generation of short-wavelength radiation, it is the object of the invention to effectively increase the protection of the collimator optics by a buffer gas without substantially reducing the radiation transmission. A vacuum chamber which encloses a radiation-emitting plasma and is outfitted with at least one feed line and one outlet line for a buffer gas in order to ensure protection against debris for at least one optical element which directs the radiation to a radiation outlet opening in the vacuum chamber has chamber areas with particle deceleration of varying magnitude by the buffer gas. The particle deceleration is greater at least in a first chamber area in which the optical element is arranged than in any other chamber area.
摘要翻译： 在用于产生短波长辐射的辐射源中，本发明的目的是通过缓冲气体有效地增加对准直器光学元件的保护，而不会基本上减少辐射透射。 包围发射辐射的等离子体的真空室，并配备有用于缓冲气体的至少一个进料管线和一个出口管线，以便确保防止碎片对于至少一个将辐射引导到辐射出口开口处的碎片 真空室具有通过缓冲气体具有不同大小的粒子减速的腔室区域。 至少在布置光学元件的第一室区域中，粒子减速度比在任何其它室区域中更大。
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公开(公告)号：US07233013B2
公开(公告)日：2007-06-19
申请号：US11393325
申请日：2006-03-30
申请人： Guido Hergenhan , Kai Gaebel , Thomas Brauner
发明人： Guido Hergenhan , Kai Gaebel , Thomas Brauner
CPC分类号： H05G2/003 , G03F7/70841 , G03F7/70858 , G03F7/70908 , G03F7/70916
摘要： In a radiation source for the generation of short-wavelength radiation, it is the object of the invention to effectively increase the protection of the collimator optics by a buffer gas without substantially reducing the radiation transmission. A vacuum chamber which encloses a radiation-emitting plasma and is outfitted with at least one feed line and one outlet line for a buffer gas in order to ensure protection against debris for at least one optical element which directs the radiation to a radiation outlet opening in the vacuum chamber has chamber areas with particle deceleration of varying magnitude by the buffer gas. The particle deceleration is greater at least in a first chamber area in which the optical element is arranged than in any other chamber area.
摘要翻译： 在用于产生短波长辐射的辐射源中，本发明的目的是通过缓冲气体有效地增加对准直器光学元件的保护，而不会基本上减少辐射透射。 包围发射辐射的等离子体的真空室，并配备有用于缓冲气体的至少一个进料管线和一个出口管线，以便确保防止碎片对于至少一个将辐射引导到辐射出口开口处的碎片 真空室具有通过缓冲气体具有不同大小的粒子减速的腔室区域。 至少在布置光学元件的第一室区域中，粒子减速度比在任何其它室区域中更大。
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公开(公告)号：US09111744B2
公开(公告)日：2015-08-18
申请号：US13389450
申请日：2010-07-26
CPC分类号： H01J61/547 , H01J61/34
摘要： A high-pressure discharge lamp having an ignition aid, mounted in an outer bulb, wherein the discharge vessel comprises two ends having seals in which electrodes are mounted and wherein a frame having a clip wire retains the discharge vessel in the outer bulb. The clip wire is bent toward the seal of the opposite pole electrode until the bent part formed thereby acts as an ignition aid.
摘要翻译： 一种具有点火助剂的高压放电灯，其安装在外灯泡中，其中放电容器包括具有密封件的两端，电极安装在其中，并且其中具有夹线的框架将放电容器保持在外灯泡中。 夹线朝向相对极电极的密封件弯曲，直到由此形成的弯曲部分起到助燃剂的作用。
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公开(公告)号：US20120139413A1
公开(公告)日：2012-06-07
申请号：US13389450
申请日：2010-07-26
IPC分类号： H01J61/36
CPC分类号： H01J61/547 , H01J61/34
摘要： A high-pressure discharge lamp having an ignition aid, mounted in an outer bulb, wherein the discharge vessel comprises two ends having seals in which electrodes are mounted and wherein a frame having a clip wire retains the discharge vessel in the outer bulb. The clip wire is bent toward the seal of the opposite pole electrode until the bent part formed thereby acts as an ignition aid.
摘要翻译： 一种具有点火助剂的高压放电灯，其安装在外灯泡中，其中放电容器包括具有密封件的两端，电极安装在其中，并且其中具有夹线的框架将放电容器保持在外灯泡中。 夹线朝向相对极电极的密封件弯曲，直到由此形成的弯曲部分起到助燃剂的作用。
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公开(公告)号：US20120223638A1
公开(公告)日：2012-09-06
申请号：US13497809
申请日：2010-08-12
IPC分类号： H01J61/36
CPC分类号： H01J61/547 , H01J61/34
摘要： In various embodiments, a high-pressure discharge lamp including a starting aid and a longitudinal axis having a ceramic discharge vessel that is housed in an outer bulb, the discharge vessel having two ends having including capillaries with electrodes fastened therein, wherein a frame having a hanger wire holds the discharge vessel in the outer bulb and the hanger wire is configured so that it includes a plate-like starting aid toward the capillary of the opposite-pole electrode, with the plate-like starting aid being configured as a foil or metal sheet and the plate-like starting aid further including a means for purely mechanical fastening to at least the capillary.
摘要翻译： 在各种实施例中，包括起动辅助装置的高压放电灯和容纳在外灯泡中的具有陶瓷放电容器的纵向轴线，放电容器具有包括固定有电极的具有电极的毛细管的两端，其中具有 衣架线将放电容器保持在外灯泡中，并且衣架线被构造成使得其包括朝向极极电极的毛细管的板状启动辅助件，板状启动辅助件被配置为箔或金属 板和起始辅助板进一步包括用于纯粹机械地紧固至少毛细管的装置。
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公开(公告)号：US08197750B2
公开(公告)日：2012-06-12
申请号：US12355683
申请日：2009-01-16
申请人： Heinz Trueeb , Armin Birrer , Thomas Brauner
发明人： Heinz Trueeb , Armin Birrer , Thomas Brauner
IPC分类号： B01L9/06
CPC分类号： B01L9/06 , B01L2300/022 , H01Q1/1235 , H01Q1/20 , H01Q1/2216 , H01Q7/00 , H01Q21/08
摘要： The invention relates to devices and methods for the identification of test tubes in a test tube rack using RFID technology.
摘要翻译： 本发明涉及使用RFID技术在试管架中识别试管的装置和方法。
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8.发明申请Laboratory Device, Laboratory Rack Assembly and Method for Coupling an RFID Chip 有权实验室设备，实验室机架组装和耦合RFID芯片的方法公开(公告)号：US20110095864A1
公开(公告)日：2011-04-28
申请号：US12356361
申请日：2009-01-20
申请人： Heinz Trueeb , Armin Birrer , Thomas Brauner
发明人： Heinz Trueeb , Armin Birrer , Thomas Brauner
IPC分类号： H04Q5/22
CPC分类号： G06K7/0008 , G01N35/00732 , G06K7/10079 , G06K7/10316 , G06K2017/0051
摘要： The invention relates to devices and methods for the identification of test tubes in a test tube rack using RFID technology.
摘要翻译： 本发明涉及使用RFID技术在试管架中识别试管的装置和方法。
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9.发明申请DEVICE FOR THE GENERATION OF A GAS CURTAIN FOR PLASMA-BASED EUV RADIATION SOURCES 有权用于基于等离子体的EUV辐射源生成气体玻璃的装置公开(公告)号：US20080283779A1
公开(公告)日：2008-11-20
申请号：US12120536
申请日：2008-05-14
IPC分类号： G02B5/00
CPC分类号： G03F7/70916 , G03F7/70908
摘要： The invention is directed to a device for generating flows of gas for filtering the radiation emitted in plasma-based radiation sources. It is the object of the invention to find a novel possibility for generating a gas curtain in the immediate vicinity of a radiating plasma so as to permit a simple arrangement and design and a long life of the device for generating the gas curtain under extreme thermal stress. According to the invention, this object is met in that a slit nozzle is formed of a plurality of partial bodies comprising different materials to form a supersonic nozzle profile for the generation of a broad gas curtain in order to accommodate the slit nozzle to different thermal and precision-mechanical requirements in the gas inlet region and in the gas outlet region.
摘要翻译： 本发明涉及用于产生用于过滤基于等离子体的辐射源中发射的辐射的气体流的装置。 本发明的目的是发现在靠近辐射等离子体处产生气幕的新颖可能性，以便在极端热应力下产生气幕的装置的简单布置和设计以及使用寿命长 。 根据本发明，该目的在于，狭缝喷嘴由包括不同材料的多个部分主体形成，以形成用于产生宽气帘的超音速喷嘴轮廓，以便将狭缝喷嘴适应于不同的热和 气体入口区域和气体出口区域的精密机械要求。
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公开(公告)号：US08659226B2
公开(公告)日：2014-02-25
申请号：US13389442
申请日：2010-07-26
IPC分类号： H01J61/54
CPC分类号： H01J61/34 , H01J61/547
摘要： A high-pressure discharge lamp with an ignition aid has a discharge vessel which is mounted in an outer bulb, the discharge vessel comprising two ends having seals in which electrodes are secured, and a frame having a clip wire retaining the discharge vessel in the outer bulb. The clip wire comprises a plate-like part acting as an ignition aid and facing the seal of the opposite pole electrode.
摘要翻译： 具有点火助剂的高压放电灯具有安装在外灯泡中的放电容器，放电容器包括两端，其两端具有电极固定的密封件，以及具有将放电容器保持在外部的夹线的框架 灯泡。 夹线包括用作点火助剂并面向相对极电极的密封的板状部分。
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