High-performance energy transfer system and method for thermal processing applications
    3.
    发明授权
    High-performance energy transfer system and method for thermal processing applications 失效
    高性能能量转移系统和热处理应用方法

    公开(公告)号:US06188044B1

    公开(公告)日:2001-02-13

    申请号:US09067142

    申请日:1998-04-27

    IPC分类号: F27B514

    CPC分类号: H01L21/67115 C23C16/481

    摘要: An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer device 40, which has a first set of energy transfer regions comprised of an emissive and thermally conductive material, and a second set of thermally insulating regions comprised of a reduced emissivity and reduced thermal conductivity material or free space. A multi-zone radiant energy source 30 provides radiative energy to energy transfer device 40, with a process controller 36, preferably a multi-zone controller, altering the amount of energy provided by each heat zone associated with each emissive region of energy transfer device 40. Sensors detect the thermal energy level of each energy transfer region to allow controller 36 to adjust the secondary radiation emitted by each region in real time, resulting in a predetermined and controlled distribution of thermal energy on substrate 20. Energy transfer device 40 can have plural emissive and thermally conductive concentric rings separated from each other by reduced emissivity and reduced thermal conductivity regions such as free space gaps 42. Alternatively, a solid plate 54 having an emissive coating or emissive surface 52 can have reduced emissivity and reduced conductivity isolation regions such as trenches 56 for defining the multi-zone high-emissivity and high thermal conductivity energy transfer regions.

    摘要翻译: 一种装置和方法通过用来自能量转移装置40的二次辐射加热衬底来支持诸如半导体芯片之类的微电子器件的热处理,该能量转移装置具有由发射和导热材料组成的第一组能量转移区 以及由减少的发射率和降低的热导率材料或自由空间组成的第二组热绝缘区域。 多区域辐射能源30向能量传递装置40提供辐射能,其中过程控制器36,优选多区域控制器,改变与能量传递装置40的每个发射区域相关联的每个加热区域提供的能量的量 传感器检测每个能量传递区域的热能级别,以允许控制器36实时地调整每个区域发射的次级辐射,从而导致基板20上预定和受控的热能分布。能量传递装置40可以具有多个 发射和导热的同心环通过降低的发射率和降低的热导率区域(例如自由空间间隙42)彼此分离。或者,具有发射涂层或发射表面52的固体板54可以具有降低的发射率和降低的电导率隔离区域,例如 用于定义多区高发射率和高导热性的沟槽56 ergy转移区域。

    Single ended line probing in DSL system using transformerless hybrid
    4.
    发明授权
    Single ended line probing in DSL system using transformerless hybrid 失效
    使用无变压器混合的DSL系统中的单端线路探测

    公开(公告)号:US06801601B2

    公开(公告)日:2004-10-05

    申请号:US10106291

    申请日:2002-03-25

    IPC分类号: H04M124

    摘要: Single Ended Line Probing (SELP) techniques for devices having transformerless hybrid circuits are disclosed. These SELP techniques provide an accurate estimate of the length of a transmission medium (e.g., subscriber loop in Digital Subscriber Line (DSL) system) by computing a transfer function that accounts for the characteristics of the transformerless hybrid circuit and the transmission medium, and relating the transfer function to the length of the transmission medium at one or more frequencies.

    摘要翻译: 公开了具有无变压器混合电路的装置的单端线检测(SELP)技术。 这些SELP技术通过计算考虑到无变压器混合电路和传输介质的特性的传递函数,提供传输介质的长度(例如,数字用户线(DSL)系统中的用户环路)的精确估计,并且 传输函数以一个或多个频率到传输介质的长度。

    High-performance energy transfer method for thermal processing applications
    5.
    发明授权
    High-performance energy transfer method for thermal processing applications 失效
    用于热处理应用的高性能能量传递方法

    公开(公告)号:US06753272B1

    公开(公告)日:2004-06-22

    申请号:US09669039

    申请日:2000-09-25

    IPC分类号: H01L21324

    CPC分类号: H01L21/67115 C23C16/481

    摘要: An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer device 40, which has a first set of energy transfer regions comprised of an emissive and thermally conductive material, and a second set of thermally insulating regions comprised of a reduced emissivity and reduced thermal conductivity material or free space. A multi-zone-radiant energy source 30 provides radiative energy to energy transfer device 40, with a process controller 36, preferably a multi-zone controller, altering the amount of energy provided by each heat zone associated with each emissive region of energy transfer device 40. Sensors detect the thermal energy level of each energy transfer region to allow controller 36 to adjust the secondary radiation emitted by each region in real time, resulting in a predetermined and controlled distribution of thermal energy on substrate 20. Energy transfer device 40 can have plural emissive and thermally conductive concentric rings separated from each other by reduced emissivity and reduced thermal conductivity regions such as free space gaps 42. Alternatively, a solid plate 54 having an emissive coating or emissive surface 52 can have reduced emissivity and reduced conductivity isolation regions such as trenches 56 for defining the multi-zone high-emissivity and high thermal conductivity energy transfer regions.

    摘要翻译: 一种装置和方法通过用来自能量转移装置40的二次辐射加热衬底来支持诸如半导体芯片之类的微电子器件的热处理,该能量转移装置具有由发射和导热材料组成的第一组能量转移区 以及由减少的发射率和降低的热导率材料或自由空间组成的第二组热绝缘区域。 多区域辐射能量源30向能量传递装置40提供辐射能,其中过程控制器36,优选地,多区域控制器,改变与能量传递装置的每个发射区域相关联的每个加热区域提供的能量的量 传感器检测每个能量转移区域的热能水平,以允许控制器36实时地调整由每个区域发射的次级辐射,从而导致基板20上预定和受控的热能分布。能量传递装置40可具有 多个发射和导热的同心环通过降低的发射率和降低的热导率区域(例如自由空间间隙42)彼此分离。或者,具有发射涂层或发射表面52的固体板54可以具有降低的发射率和降低的电导率隔离区域, 作为用于限定多区高发射率和高热导率的沟槽56 ergy转移区域。

    Single ended line probing in DSL system
    6.
    发明授权
    Single ended line probing in DSL system 失效
    DSL系统中的单端线路探测

    公开(公告)号:US06876725B2

    公开(公告)日:2005-04-05

    申请号:US10115503

    申请日:2002-04-02

    摘要: SELP techniques that provide an accurate estimate of the length of a transmission medium (e.g., subscriber loop in a DSL system) are disclosed. A probe signal is transmitted over the transmission medium at one or more frequencies. A reflected version of the probe signal is then received. Transmission medium impedance is determined based on the ratio of the reflected version of the probe signal and the transmitted probe signal. An estimate of transmission medium length is determined by comparing its impedance to a plurality of predetermined impedances, each of which is associated with a transmission medium having known length. Thus, the length of the systems transmission medium is identified. The transmission medium impedance can also be used to identify the presence of load coils and short circuits in the transmission medium.

    摘要翻译: 公开了提供传输介质(例如,DSL系统中的用户环路)的长度的精确估计的SELP技术。 探测信号以一个或多个频率在传输介质上传输。 然后接收探测信号的反射版本。 基于探测信号的反射版本与发射的探测信号的比率来确定传输介质阻抗。 通过将其阻抗与多个预定阻抗进行比较来确定传输介质长度的估计,每个阻抗与具有已知长度的传输介质相关联。 因此,识别系统传输介质的长度。 传输介质阻抗也可用于识别传输介质中存在负载线圈和短路。

    Double-ended line probing (DELP) for DSL systems
    7.
    发明授权
    Double-ended line probing (DELP) for DSL systems 失效
    DSL系统的双端线路探测(DELP)

    公开(公告)号:US07623630B2

    公开(公告)日:2009-11-24

    申请号:US11101945

    申请日:2005-04-08

    IPC分类号: H04M1/24 H04M3/08 H04M3/22

    摘要: Double-ended line probing (DELP) techniques are described herein that enable a loop configuration to be identified based on mathematically simple error functions, which are both time-efficient and less sensitive to measurement errors. A DELP algorithm uses readily available data about the channel that is generated prior to the modem operation (e.g., theoretical loop models) and other available data (e.g., that provided by loop diagnostic modules) to estimate the loop configuration including the line length and gauge, as well as the number of bridge taps and their gauges, lengths, and locations.

    摘要翻译: 本文描述了双端线路探测(DELP)技术,其使得能够基于数学上简单的误差函数来识别环路配置,这对于测量误差是时间有效的和较不敏感的。 DELP算法使用关于在调制解调器操作之前生成的信道(例如,理论环路模型)和其他可用数据(例如,由循环诊断模块提供的)的估计包括线路长度和量规的环路配置的可用数据 ,以及桥式水龙头及其量规,长度和位置的数量。

    Double-ended line probing (DELP) for DSL systems

    公开(公告)号:US20060227940A1

    公开(公告)日:2006-10-12

    申请号:US11101945

    申请日:2005-04-08

    IPC分类号: H04M1/24 H04M3/08 H04M3/22

    摘要: Double-ended line probing (DELP) techniques are described herein that enable a loop configuration to be identified based on mathematically simple error functions, which are both time-efficient and less sensitive to measurement errors. A DELP algorithm uses readily available data about the channel that is generated prior to the modem operation (e.g., theoretical loop models) and other available data (e.g., that provided by loop diagnostic modules) to estimate the loop configuration including the line length and gauge, as well as the number of bridge taps and their gauges, lengths, and locations.